KR970025784U - 반도체 상압증착장치 - Google Patents
반도체 상압증착장치Info
- Publication number
- KR970025784U KR970025784U KR2019950036667U KR19950036667U KR970025784U KR 970025784 U KR970025784 U KR 970025784U KR 2019950036667 U KR2019950036667 U KR 2019950036667U KR 19950036667 U KR19950036667 U KR 19950036667U KR 970025784 U KR970025784 U KR 970025784U
- Authority
- KR
- South Korea
- Prior art keywords
- deposition equipment
- atmospheric deposition
- semiconductor
- semiconductor atmospheric
- equipment
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036667U KR970025784U (ko) | 1995-11-29 | 1995-11-29 | 반도체 상압증착장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036667U KR970025784U (ko) | 1995-11-29 | 1995-11-29 | 반도체 상압증착장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970025784U true KR970025784U (ko) | 1997-06-20 |
Family
ID=60907188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950036667U KR970025784U (ko) | 1995-11-29 | 1995-11-29 | 반도체 상압증착장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970025784U (ko) |
-
1995
- 1995-11-29 KR KR2019950036667U patent/KR970025784U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |