KR970025784U - 반도체 상압증착장치 - Google Patents

반도체 상압증착장치

Info

Publication number
KR970025784U
KR970025784U KR2019950036667U KR19950036667U KR970025784U KR 970025784 U KR970025784 U KR 970025784U KR 2019950036667 U KR2019950036667 U KR 2019950036667U KR 19950036667 U KR19950036667 U KR 19950036667U KR 970025784 U KR970025784 U KR 970025784U
Authority
KR
South Korea
Prior art keywords
deposition equipment
atmospheric deposition
semiconductor
semiconductor atmospheric
equipment
Prior art date
Application number
KR2019950036667U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950036667U priority Critical patent/KR970025784U/ko
Publication of KR970025784U publication Critical patent/KR970025784U/ko

Links

KR2019950036667U 1995-11-29 1995-11-29 반도체 상압증착장치 KR970025784U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950036667U KR970025784U (ko) 1995-11-29 1995-11-29 반도체 상압증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950036667U KR970025784U (ko) 1995-11-29 1995-11-29 반도체 상압증착장치

Publications (1)

Publication Number Publication Date
KR970025784U true KR970025784U (ko) 1997-06-20

Family

ID=60907188

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950036667U KR970025784U (ko) 1995-11-29 1995-11-29 반도체 상압증착장치

Country Status (1)

Country Link
KR (1) KR970025784U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application