KR970046659U - 반도체 식각장치 - Google Patents

반도체 식각장치

Info

Publication number
KR970046659U
KR970046659U KR2019950038430U KR19950038430U KR970046659U KR 970046659 U KR970046659 U KR 970046659U KR 2019950038430 U KR2019950038430 U KR 2019950038430U KR 19950038430 U KR19950038430 U KR 19950038430U KR 970046659 U KR970046659 U KR 970046659U
Authority
KR
South Korea
Prior art keywords
etching equipment
semiconductor etching
semiconductor
equipment
etching
Prior art date
Application number
KR2019950038430U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038430U priority Critical patent/KR970046659U/ko
Publication of KR970046659U publication Critical patent/KR970046659U/ko

Links

KR2019950038430U 1995-12-05 1995-12-05 반도체 식각장치 KR970046659U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038430U KR970046659U (ko) 1995-12-05 1995-12-05 반도체 식각장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038430U KR970046659U (ko) 1995-12-05 1995-12-05 반도체 식각장치

Publications (1)

Publication Number Publication Date
KR970046659U true KR970046659U (ko) 1997-07-31

Family

ID=60877326

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038430U KR970046659U (ko) 1995-12-05 1995-12-05 반도체 식각장치

Country Status (1)

Country Link
KR (1) KR970046659U (ko)

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Legal Events

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