KR970045362U - 반도체 노광장치 - Google Patents

반도체 노광장치

Info

Publication number
KR970045362U
KR970045362U KR2019950052641U KR19950052641U KR970045362U KR 970045362 U KR970045362 U KR 970045362U KR 2019950052641 U KR2019950052641 U KR 2019950052641U KR 19950052641 U KR19950052641 U KR 19950052641U KR 970045362 U KR970045362 U KR 970045362U
Authority
KR
South Korea
Prior art keywords
exposure equipment
semiconductor exposure
semiconductor
equipment
exposure
Prior art date
Application number
KR2019950052641U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950052641U priority Critical patent/KR970045362U/ko
Publication of KR970045362U publication Critical patent/KR970045362U/ko

Links

KR2019950052641U 1995-12-29 1995-12-29 반도체 노광장치 KR970045362U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950052641U KR970045362U (ko) 1995-12-29 1995-12-29 반도체 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950052641U KR970045362U (ko) 1995-12-29 1995-12-29 반도체 노광장치

Publications (1)

Publication Number Publication Date
KR970045362U true KR970045362U (ko) 1997-07-31

Family

ID=60843138

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950052641U KR970045362U (ko) 1995-12-29 1995-12-29 반도체 노광장치

Country Status (1)

Country Link
KR (1) KR970045362U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100290138B1 (ko) * 1998-07-10 2001-06-01 구자홍 웨이브가이드를이용한디스플레이패널과그구동방법및장치
KR100388490B1 (ko) * 1999-06-17 2003-06-25 한국전자통신연구원 파리눈 렌즈를 구비하는 사입사 조명계 및 그 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100290138B1 (ko) * 1998-07-10 2001-06-01 구자홍 웨이브가이드를이용한디스플레이패널과그구동방법및장치
KR100388490B1 (ko) * 1999-06-17 2003-06-25 한국전자통신연구원 파리눈 렌즈를 구비하는 사입사 조명계 및 그 제조 방법

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