KR960015339U - 웨이퍼 주변 노광장치 - Google Patents
웨이퍼 주변 노광장치Info
- Publication number
- KR960015339U KR960015339U KR2019940027869U KR19940027869U KR960015339U KR 960015339 U KR960015339 U KR 960015339U KR 2019940027869 U KR2019940027869 U KR 2019940027869U KR 19940027869 U KR19940027869 U KR 19940027869U KR 960015339 U KR960015339 U KR 960015339U
- Authority
- KR
- South Korea
- Prior art keywords
- exposure equipment
- peripheral exposure
- wafer peripheral
- wafer
- equipment
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940027869U KR960015339U (ko) | 1994-10-25 | 1994-10-25 | 웨이퍼 주변 노광장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940027869U KR960015339U (ko) | 1994-10-25 | 1994-10-25 | 웨이퍼 주변 노광장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960015339U true KR960015339U (ko) | 1996-05-17 |
Family
ID=60847618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940027869U KR960015339U (ko) | 1994-10-25 | 1994-10-25 | 웨이퍼 주변 노광장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960015339U (ko) |
-
1994
- 1994-10-25 KR KR2019940027869U patent/KR960015339U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |