KR960015339U - 웨이퍼 주변 노광장치 - Google Patents

웨이퍼 주변 노광장치

Info

Publication number
KR960015339U
KR960015339U KR2019940027869U KR19940027869U KR960015339U KR 960015339 U KR960015339 U KR 960015339U KR 2019940027869 U KR2019940027869 U KR 2019940027869U KR 19940027869 U KR19940027869 U KR 19940027869U KR 960015339 U KR960015339 U KR 960015339U
Authority
KR
South Korea
Prior art keywords
exposure equipment
peripheral exposure
wafer peripheral
wafer
equipment
Prior art date
Application number
KR2019940027869U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940027869U priority Critical patent/KR960015339U/ko
Publication of KR960015339U publication Critical patent/KR960015339U/ko

Links

KR2019940027869U 1994-10-25 1994-10-25 웨이퍼 주변 노광장치 KR960015339U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940027869U KR960015339U (ko) 1994-10-25 1994-10-25 웨이퍼 주변 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940027869U KR960015339U (ko) 1994-10-25 1994-10-25 웨이퍼 주변 노광장치

Publications (1)

Publication Number Publication Date
KR960015339U true KR960015339U (ko) 1996-05-17

Family

ID=60847618

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940027869U KR960015339U (ko) 1994-10-25 1994-10-25 웨이퍼 주변 노광장치

Country Status (1)

Country Link
KR (1) KR960015339U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application