KR960003087U - 웨이퍼 건조장치 - Google Patents

웨이퍼 건조장치

Info

Publication number
KR960003087U
KR960003087U KR2019940013911U KR19940013911U KR960003087U KR 960003087 U KR960003087 U KR 960003087U KR 2019940013911 U KR2019940013911 U KR 2019940013911U KR 19940013911 U KR19940013911 U KR 19940013911U KR 960003087 U KR960003087 U KR 960003087U
Authority
KR
South Korea
Prior art keywords
drying equipment
wafer drying
wafer
equipment
drying
Prior art date
Application number
KR2019940013911U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940013911U priority Critical patent/KR960003087U/ko
Publication of KR960003087U publication Critical patent/KR960003087U/ko

Links

KR2019940013911U 1994-06-15 1994-06-15 웨이퍼 건조장치 KR960003087U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013911U KR960003087U (ko) 1994-06-15 1994-06-15 웨이퍼 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013911U KR960003087U (ko) 1994-06-15 1994-06-15 웨이퍼 건조장치

Publications (1)

Publication Number Publication Date
KR960003087U true KR960003087U (ko) 1996-01-22

Family

ID=60667281

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013911U KR960003087U (ko) 1994-06-15 1994-06-15 웨이퍼 건조장치

Country Status (1)

Country Link
KR (1) KR960003087U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100724184B1 (ko) * 2005-12-28 2007-05-31 동부일렉트로닉스 주식회사 반도체 제조용 세라믹 설비부품의 오염물질 제거 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100724184B1 (ko) * 2005-12-28 2007-05-31 동부일렉트로닉스 주식회사 반도체 제조용 세라믹 설비부품의 오염물질 제거 방법

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination