KR970046715U - 웨이퍼의 건조장치 - Google Patents
웨이퍼의 건조장치Info
- Publication number
- KR970046715U KR970046715U KR2019950040266U KR19950040266U KR970046715U KR 970046715 U KR970046715 U KR 970046715U KR 2019950040266 U KR2019950040266 U KR 2019950040266U KR 19950040266 U KR19950040266 U KR 19950040266U KR 970046715 U KR970046715 U KR 970046715U
- Authority
- KR
- South Korea
- Prior art keywords
- drying equipment
- wafer drying
- wafer
- equipment
- drying
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950040266U KR970046715U (ko) | 1995-12-12 | 1995-12-12 | 웨이퍼의 건조장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950040266U KR970046715U (ko) | 1995-12-12 | 1995-12-12 | 웨이퍼의 건조장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970046715U true KR970046715U (ko) | 1997-07-31 |
Family
ID=60877733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950040266U KR970046715U (ko) | 1995-12-12 | 1995-12-12 | 웨이퍼의 건조장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970046715U (ko) |
-
1995
- 1995-12-12 KR KR2019950040266U patent/KR970046715U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |