KR970046715U - 웨이퍼의 건조장치 - Google Patents

웨이퍼의 건조장치

Info

Publication number
KR970046715U
KR970046715U KR2019950040266U KR19950040266U KR970046715U KR 970046715 U KR970046715 U KR 970046715U KR 2019950040266 U KR2019950040266 U KR 2019950040266U KR 19950040266 U KR19950040266 U KR 19950040266U KR 970046715 U KR970046715 U KR 970046715U
Authority
KR
South Korea
Prior art keywords
drying equipment
wafer drying
wafer
equipment
drying
Prior art date
Application number
KR2019950040266U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950040266U priority Critical patent/KR970046715U/ko
Publication of KR970046715U publication Critical patent/KR970046715U/ko

Links

KR2019950040266U 1995-12-12 1995-12-12 웨이퍼의 건조장치 KR970046715U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950040266U KR970046715U (ko) 1995-12-12 1995-12-12 웨이퍼의 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950040266U KR970046715U (ko) 1995-12-12 1995-12-12 웨이퍼의 건조장치

Publications (1)

Publication Number Publication Date
KR970046715U true KR970046715U (ko) 1997-07-31

Family

ID=60877733

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950040266U KR970046715U (ko) 1995-12-12 1995-12-12 웨이퍼의 건조장치

Country Status (1)

Country Link
KR (1) KR970046715U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application