KR960026277U - 기판 건조장치 - Google Patents
기판 건조장치Info
- Publication number
- KR960026277U KR960026277U KR2019940036270U KR19940036270U KR960026277U KR 960026277 U KR960026277 U KR 960026277U KR 2019940036270 U KR2019940036270 U KR 2019940036270U KR 19940036270 U KR19940036270 U KR 19940036270U KR 960026277 U KR960026277 U KR 960026277U
- Authority
- KR
- South Korea
- Prior art keywords
- drying equipment
- substrate drying
- substrate
- equipment
- drying
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940036270U KR960026277U (ko) | 1994-12-27 | 1994-12-27 | 기판 건조장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940036270U KR960026277U (ko) | 1994-12-27 | 1994-12-27 | 기판 건조장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960026277U true KR960026277U (ko) | 1996-07-22 |
Family
ID=60850116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940036270U KR960026277U (ko) | 1994-12-27 | 1994-12-27 | 기판 건조장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960026277U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100340154B1 (ko) * | 1999-12-06 | 2002-06-10 | 김광교 | 웨이퍼를 스피닝하기 위한 웨이퍼 척 |
-
1994
- 1994-12-27 KR KR2019940036270U patent/KR960026277U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100340154B1 (ko) * | 1999-12-06 | 2002-06-10 | 김광교 | 웨이퍼를 스피닝하기 위한 웨이퍼 척 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |