KR960026277U - 기판 건조장치 - Google Patents

기판 건조장치

Info

Publication number
KR960026277U
KR960026277U KR2019940036270U KR19940036270U KR960026277U KR 960026277 U KR960026277 U KR 960026277U KR 2019940036270 U KR2019940036270 U KR 2019940036270U KR 19940036270 U KR19940036270 U KR 19940036270U KR 960026277 U KR960026277 U KR 960026277U
Authority
KR
South Korea
Prior art keywords
drying equipment
substrate drying
substrate
equipment
drying
Prior art date
Application number
KR2019940036270U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940036270U priority Critical patent/KR960026277U/ko
Publication of KR960026277U publication Critical patent/KR960026277U/ko

Links

KR2019940036270U 1994-12-27 1994-12-27 기판 건조장치 KR960026277U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940036270U KR960026277U (ko) 1994-12-27 1994-12-27 기판 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940036270U KR960026277U (ko) 1994-12-27 1994-12-27 기판 건조장치

Publications (1)

Publication Number Publication Date
KR960026277U true KR960026277U (ko) 1996-07-22

Family

ID=60850116

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940036270U KR960026277U (ko) 1994-12-27 1994-12-27 기판 건조장치

Country Status (1)

Country Link
KR (1) KR960026277U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100340154B1 (ko) * 1999-12-06 2002-06-10 김광교 웨이퍼를 스피닝하기 위한 웨이퍼 척

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100340154B1 (ko) * 1999-12-06 2002-06-10 김광교 웨이퍼를 스피닝하기 위한 웨이퍼 척

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination