KR950034364U - 웨이퍼 건조장치 - Google Patents

웨이퍼 건조장치

Info

Publication number
KR950034364U
KR950034364U KR2019940012331U KR19940012331U KR950034364U KR 950034364 U KR950034364 U KR 950034364U KR 2019940012331 U KR2019940012331 U KR 2019940012331U KR 19940012331 U KR19940012331 U KR 19940012331U KR 950034364 U KR950034364 U KR 950034364U
Authority
KR
South Korea
Prior art keywords
drying equipment
wafer drying
wafer
equipment
drying
Prior art date
Application number
KR2019940012331U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940012331U priority Critical patent/KR950034364U/ko
Publication of KR950034364U publication Critical patent/KR950034364U/ko

Links

KR2019940012331U 1994-05-30 1994-05-30 웨이퍼 건조장치 KR950034364U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940012331U KR950034364U (ko) 1994-05-30 1994-05-30 웨이퍼 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940012331U KR950034364U (ko) 1994-05-30 1994-05-30 웨이퍼 건조장치

Publications (1)

Publication Number Publication Date
KR950034364U true KR950034364U (ko) 1995-12-18

Family

ID=60861462

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940012331U KR950034364U (ko) 1994-05-30 1994-05-30 웨이퍼 건조장치

Country Status (1)

Country Link
KR (1) KR950034364U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application