KR960019562U - 기판 건조장치 - Google Patents
기판 건조장치Info
- Publication number
- KR960019562U KR960019562U KR2019940029791U KR19940029791U KR960019562U KR 960019562 U KR960019562 U KR 960019562U KR 2019940029791 U KR2019940029791 U KR 2019940029791U KR 19940029791 U KR19940029791 U KR 19940029791U KR 960019562 U KR960019562 U KR 960019562U
- Authority
- KR
- South Korea
- Prior art keywords
- drying equipment
- substrate drying
- substrate
- equipment
- drying
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029791U KR960019562U (ko) | 1994-11-10 | 1994-11-10 | 기판 건조장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029791U KR960019562U (ko) | 1994-11-10 | 1994-11-10 | 기판 건조장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960019562U true KR960019562U (ko) | 1996-06-19 |
Family
ID=60848077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940029791U KR960019562U (ko) | 1994-11-10 | 1994-11-10 | 기판 건조장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960019562U (ko) |
-
1994
- 1994-11-10 KR KR2019940029791U patent/KR960019562U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |