KR960019562U - 기판 건조장치 - Google Patents

기판 건조장치

Info

Publication number
KR960019562U
KR960019562U KR2019940029791U KR19940029791U KR960019562U KR 960019562 U KR960019562 U KR 960019562U KR 2019940029791 U KR2019940029791 U KR 2019940029791U KR 19940029791 U KR19940029791 U KR 19940029791U KR 960019562 U KR960019562 U KR 960019562U
Authority
KR
South Korea
Prior art keywords
drying equipment
substrate drying
substrate
equipment
drying
Prior art date
Application number
KR2019940029791U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940029791U priority Critical patent/KR960019562U/ko
Publication of KR960019562U publication Critical patent/KR960019562U/ko

Links

KR2019940029791U 1994-11-10 1994-11-10 기판 건조장치 KR960019562U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029791U KR960019562U (ko) 1994-11-10 1994-11-10 기판 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029791U KR960019562U (ko) 1994-11-10 1994-11-10 기판 건조장치

Publications (1)

Publication Number Publication Date
KR960019562U true KR960019562U (ko) 1996-06-19

Family

ID=60848077

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029791U KR960019562U (ko) 1994-11-10 1994-11-10 기판 건조장치

Country Status (1)

Country Link
KR (1) KR960019562U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination