KR980005370U - 웨이퍼 건조장치 - Google Patents
웨이퍼 건조장치Info
- Publication number
- KR980005370U KR980005370U KR2019960018890U KR19960018890U KR980005370U KR 980005370 U KR980005370 U KR 980005370U KR 2019960018890 U KR2019960018890 U KR 2019960018890U KR 19960018890 U KR19960018890 U KR 19960018890U KR 980005370 U KR980005370 U KR 980005370U
- Authority
- KR
- South Korea
- Prior art keywords
- drying equipment
- wafer drying
- wafer
- equipment
- drying
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960018890U KR980005370U (ko) | 1996-06-29 | 1996-06-29 | 웨이퍼 건조장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960018890U KR980005370U (ko) | 1996-06-29 | 1996-06-29 | 웨이퍼 건조장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005370U true KR980005370U (ko) | 1998-03-30 |
Family
ID=60876296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960018890U KR980005370U (ko) | 1996-06-29 | 1996-06-29 | 웨이퍼 건조장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005370U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100434714B1 (ko) * | 1997-04-18 | 2004-10-14 | 주식회사 하이닉스반도체 | 웨이퍼건조장치 |
-
1996
- 1996-06-29 KR KR2019960018890U patent/KR980005370U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100434714B1 (ko) * | 1997-04-18 | 2004-10-14 | 주식회사 하이닉스반도체 | 웨이퍼건조장치 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |