KR980005370U - 웨이퍼 건조장치 - Google Patents

웨이퍼 건조장치

Info

Publication number
KR980005370U
KR980005370U KR2019960018890U KR19960018890U KR980005370U KR 980005370 U KR980005370 U KR 980005370U KR 2019960018890 U KR2019960018890 U KR 2019960018890U KR 19960018890 U KR19960018890 U KR 19960018890U KR 980005370 U KR980005370 U KR 980005370U
Authority
KR
South Korea
Prior art keywords
drying equipment
wafer drying
wafer
equipment
drying
Prior art date
Application number
KR2019960018890U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960018890U priority Critical patent/KR980005370U/ko
Publication of KR980005370U publication Critical patent/KR980005370U/ko

Links

KR2019960018890U 1996-06-29 1996-06-29 웨이퍼 건조장치 KR980005370U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960018890U KR980005370U (ko) 1996-06-29 1996-06-29 웨이퍼 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960018890U KR980005370U (ko) 1996-06-29 1996-06-29 웨이퍼 건조장치

Publications (1)

Publication Number Publication Date
KR980005370U true KR980005370U (ko) 1998-03-30

Family

ID=60876296

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960018890U KR980005370U (ko) 1996-06-29 1996-06-29 웨이퍼 건조장치

Country Status (1)

Country Link
KR (1) KR980005370U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100434714B1 (ko) * 1997-04-18 2004-10-14 주식회사 하이닉스반도체 웨이퍼건조장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100434714B1 (ko) * 1997-04-18 2004-10-14 주식회사 하이닉스반도체 웨이퍼건조장치

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination