KR980005367U - 반도체 건식식각 장치 - Google Patents
반도체 건식식각 장치Info
- Publication number
- KR980005367U KR980005367U KR2019960018552U KR19960018552U KR980005367U KR 980005367 U KR980005367 U KR 980005367U KR 2019960018552 U KR2019960018552 U KR 2019960018552U KR 19960018552 U KR19960018552 U KR 19960018552U KR 980005367 U KR980005367 U KR 980005367U
- Authority
- KR
- South Korea
- Prior art keywords
- dry etching
- etching equipment
- semiconductor dry
- semiconductor
- equipment
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960018552U KR980005367U (ko) | 1996-06-28 | 1996-06-28 | 반도체 건식식각 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960018552U KR980005367U (ko) | 1996-06-28 | 1996-06-28 | 반도체 건식식각 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005367U true KR980005367U (ko) | 1998-03-30 |
Family
ID=60876112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960018552U KR980005367U (ko) | 1996-06-28 | 1996-06-28 | 반도체 건식식각 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005367U (ko) |
-
1996
- 1996-06-28 KR KR2019960018552U patent/KR980005367U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |