KR980005367U - 반도체 건식식각 장치 - Google Patents

반도체 건식식각 장치

Info

Publication number
KR980005367U
KR980005367U KR2019960018552U KR19960018552U KR980005367U KR 980005367 U KR980005367 U KR 980005367U KR 2019960018552 U KR2019960018552 U KR 2019960018552U KR 19960018552 U KR19960018552 U KR 19960018552U KR 980005367 U KR980005367 U KR 980005367U
Authority
KR
South Korea
Prior art keywords
dry etching
etching equipment
semiconductor dry
semiconductor
equipment
Prior art date
Application number
KR2019960018552U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960018552U priority Critical patent/KR980005367U/ko
Publication of KR980005367U publication Critical patent/KR980005367U/ko

Links

KR2019960018552U 1996-06-28 1996-06-28 반도체 건식식각 장치 KR980005367U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960018552U KR980005367U (ko) 1996-06-28 1996-06-28 반도체 건식식각 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960018552U KR980005367U (ko) 1996-06-28 1996-06-28 반도체 건식식각 장치

Publications (1)

Publication Number Publication Date
KR980005367U true KR980005367U (ko) 1998-03-30

Family

ID=60876112

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960018552U KR980005367U (ko) 1996-06-28 1996-06-28 반도체 건식식각 장치

Country Status (1)

Country Link
KR (1) KR980005367U (ko)

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