KR970059829U - 웨이퍼 습식처리 장비 - Google Patents
웨이퍼 습식처리 장비Info
- Publication number
- KR970059829U KR970059829U KR2019960006850U KR19960006850U KR970059829U KR 970059829 U KR970059829 U KR 970059829U KR 2019960006850 U KR2019960006850 U KR 2019960006850U KR 19960006850 U KR19960006850 U KR 19960006850U KR 970059829 U KR970059829 U KR 970059829U
- Authority
- KR
- South Korea
- Prior art keywords
- processing equipment
- wet processing
- wafer wet
- wafer
- equipment
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960006850U KR970059829U (ko) | 1996-04-01 | 1996-04-01 | 웨이퍼 습식처리 장비 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960006850U KR970059829U (ko) | 1996-04-01 | 1996-04-01 | 웨이퍼 습식처리 장비 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970059829U true KR970059829U (ko) | 1997-11-10 |
Family
ID=60837757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960006850U KR970059829U (ko) | 1996-04-01 | 1996-04-01 | 웨이퍼 습식처리 장비 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970059829U (ko) |
-
1996
- 1996-04-01 KR KR2019960006850U patent/KR970059829U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |