KR970052816U - 반도체 제조 장치 - Google Patents

반도체 제조 장치

Info

Publication number
KR970052816U
KR970052816U KR2019960003413U KR19960003413U KR970052816U KR 970052816 U KR970052816 U KR 970052816U KR 2019960003413 U KR2019960003413 U KR 2019960003413U KR 19960003413 U KR19960003413 U KR 19960003413U KR 970052816 U KR970052816 U KR 970052816U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
manufacturing
Prior art date
Application number
KR2019960003413U
Other languages
English (en)
Other versions
KR0136232Y1 (ko
Inventor
장삼진
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960003413U priority Critical patent/KR0136232Y1/ko
Publication of KR970052816U publication Critical patent/KR970052816U/ko
Application granted granted Critical
Publication of KR0136232Y1 publication Critical patent/KR0136232Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
KR2019960003413U 1996-02-28 1996-02-28 반도체 제조 장치 KR0136232Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003413U KR0136232Y1 (ko) 1996-02-28 1996-02-28 반도체 제조 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003413U KR0136232Y1 (ko) 1996-02-28 1996-02-28 반도체 제조 장치

Publications (2)

Publication Number Publication Date
KR970052816U true KR970052816U (ko) 1997-09-08
KR0136232Y1 KR0136232Y1 (ko) 1999-03-20

Family

ID=19451146

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003413U KR0136232Y1 (ko) 1996-02-28 1996-02-28 반도체 제조 장치

Country Status (1)

Country Link
KR (1) KR0136232Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3472482B2 (ja) * 1998-06-30 2003-12-02 富士通株式会社 半導体装置の製造方法と製造装置

Also Published As

Publication number Publication date
KR0136232Y1 (ko) 1999-03-20

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Legal Events

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E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20061030

Year of fee payment: 9

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