KR960025317U - 웨이퍼 건조장치 - Google Patents

웨이퍼 건조장치

Info

Publication number
KR960025317U
KR960025317U KR2019940033862U KR19940033862U KR960025317U KR 960025317 U KR960025317 U KR 960025317U KR 2019940033862 U KR2019940033862 U KR 2019940033862U KR 19940033862 U KR19940033862 U KR 19940033862U KR 960025317 U KR960025317 U KR 960025317U
Authority
KR
South Korea
Prior art keywords
drying device
wafer drying
wafer
drying
Prior art date
Application number
KR2019940033862U
Other languages
English (en)
Other versions
KR200197862Y1 (ko
Inventor
정재영
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940033862U priority Critical patent/KR200197862Y1/ko
Publication of KR960025317U publication Critical patent/KR960025317U/ko
Application granted granted Critical
Publication of KR200197862Y1 publication Critical patent/KR200197862Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/18—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019940033862U 1994-12-13 1994-12-13 웨이퍼 건조장치 KR200197862Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940033862U KR200197862Y1 (ko) 1994-12-13 1994-12-13 웨이퍼 건조장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940033862U KR200197862Y1 (ko) 1994-12-13 1994-12-13 웨이퍼 건조장치

Publications (2)

Publication Number Publication Date
KR960025317U true KR960025317U (ko) 1996-07-22
KR200197862Y1 KR200197862Y1 (ko) 2000-10-02

Family

ID=19401150

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940033862U KR200197862Y1 (ko) 1994-12-13 1994-12-13 웨이퍼 건조장치

Country Status (1)

Country Link
KR (1) KR200197862Y1 (ko)

Also Published As

Publication number Publication date
KR200197862Y1 (ko) 2000-10-02

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Legal Events

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FPAY Annual fee payment

Payment date: 20090624

Year of fee payment: 10

EXPY Expiration of term