KR970045370U - 웨이퍼의 노광장치 - Google Patents

웨이퍼의 노광장치

Info

Publication number
KR970045370U
KR970045370U KR2019950047441U KR19950047441U KR970045370U KR 970045370 U KR970045370 U KR 970045370U KR 2019950047441 U KR2019950047441 U KR 2019950047441U KR 19950047441 U KR19950047441 U KR 19950047441U KR 970045370 U KR970045370 U KR 970045370U
Authority
KR
South Korea
Prior art keywords
exposure equipment
wafer exposure
wafer
equipment
exposure
Prior art date
Application number
KR2019950047441U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950047441U priority Critical patent/KR970045370U/ko
Publication of KR970045370U publication Critical patent/KR970045370U/ko

Links

KR2019950047441U 1995-12-26 1995-12-26 웨이퍼의 노광장치 KR970045370U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950047441U KR970045370U (ko) 1995-12-26 1995-12-26 웨이퍼의 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950047441U KR970045370U (ko) 1995-12-26 1995-12-26 웨이퍼의 노광장치

Publications (1)

Publication Number Publication Date
KR970045370U true KR970045370U (ko) 1997-07-31

Family

ID=60878443

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950047441U KR970045370U (ko) 1995-12-26 1995-12-26 웨이퍼의 노광장치

Country Status (1)

Country Link
KR (1) KR970045370U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application