KR950010189U - 웨이퍼 코팅장치 - Google Patents

웨이퍼 코팅장치

Info

Publication number
KR950010189U
KR950010189U KR2019930017291U KR930017291U KR950010189U KR 950010189 U KR950010189 U KR 950010189U KR 2019930017291 U KR2019930017291 U KR 2019930017291U KR 930017291 U KR930017291 U KR 930017291U KR 950010189 U KR950010189 U KR 950010189U
Authority
KR
South Korea
Prior art keywords
coating equipment
wafer coating
wafer
equipment
coating
Prior art date
Application number
KR2019930017291U
Other languages
English (en)
Other versions
KR200148603Y1 (ko
Inventor
이홍구
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019930017291U priority Critical patent/KR200148603Y1/ko
Publication of KR950010189U publication Critical patent/KR950010189U/ko
Application granted granted Critical
Publication of KR200148603Y1 publication Critical patent/KR200148603Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
KR2019930017291U 1993-09-01 1993-09-01 웨이퍼 코팅장치 KR200148603Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930017291U KR200148603Y1 (ko) 1993-09-01 1993-09-01 웨이퍼 코팅장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930017291U KR200148603Y1 (ko) 1993-09-01 1993-09-01 웨이퍼 코팅장치

Publications (2)

Publication Number Publication Date
KR950010189U true KR950010189U (ko) 1995-04-24
KR200148603Y1 KR200148603Y1 (ko) 1999-06-15

Family

ID=19362539

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930017291U KR200148603Y1 (ko) 1993-09-01 1993-09-01 웨이퍼 코팅장치

Country Status (1)

Country Link
KR (1) KR200148603Y1 (ko)

Also Published As

Publication number Publication date
KR200148603Y1 (ko) 1999-06-15

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Legal Events

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