KR970023644A - 기판의 주변노광방법 및 장치 - Google Patents
기판의 주변노광방법 및 장치 Download PDFInfo
- Publication number
- KR970023644A KR970023644A KR1019960040459A KR19960040459A KR970023644A KR 970023644 A KR970023644 A KR 970023644A KR 1019960040459 A KR1019960040459 A KR 1019960040459A KR 19960040459 A KR19960040459 A KR 19960040459A KR 970023644 A KR970023644 A KR 970023644A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- mark
- exposure
- photosensitive
- alignment
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54493—Peripheral marks on wafers, e.g. orientation flats, notches, lot number
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP95-291916 | 1995-10-13 | ||
| JP7291916A JPH09115816A (ja) | 1995-10-13 | 1995-10-13 | 基板の周辺露光方法及び装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970023644A true KR970023644A (ko) | 1997-05-30 |
Family
ID=17775124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960040459A KR970023644A (ko) | 1995-10-13 | 1996-09-18 | 기판의 주변노광방법 및 장치 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH09115816A (ja) |
| KR (1) | KR970023644A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0989596A4 (en) * | 1997-06-12 | 2006-03-08 | Nippon Kogaku Kk | DEVICE MANUFACTURING SUBSTRATE, METHOD OF MANUFACTURING THE SUBSTRATE, AND METHOD OF EXPOSING THE SAME |
| JP4491446B2 (ja) * | 2005-11-04 | 2010-06-30 | 株式会社オーク製作所 | 周辺露光装置およびその方法 |
-
1995
- 1995-10-13 JP JP7291916A patent/JPH09115816A/ja active Pending
-
1996
- 1996-09-18 KR KR1019960040459A patent/KR970023644A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09115816A (ja) | 1997-05-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |