KR960032754U - 반도체 웨이퍼 지지용 클램프링 - Google Patents

반도체 웨이퍼 지지용 클램프링

Info

Publication number
KR960032754U
KR960032754U KR2019950005162U KR19950005162U KR960032754U KR 960032754 U KR960032754 U KR 960032754U KR 2019950005162 U KR2019950005162 U KR 2019950005162U KR 19950005162 U KR19950005162 U KR 19950005162U KR 960032754 U KR960032754 U KR 960032754U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
clamp ring
wafer support
clamp
ring
Prior art date
Application number
KR2019950005162U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950005162U priority Critical patent/KR960032754U/ko
Publication of KR960032754U publication Critical patent/KR960032754U/ko

Links

KR2019950005162U 1995-03-22 1995-03-22 반도체 웨이퍼 지지용 클램프링 KR960032754U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950005162U KR960032754U (ko) 1995-03-22 1995-03-22 반도체 웨이퍼 지지용 클램프링

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950005162U KR960032754U (ko) 1995-03-22 1995-03-22 반도체 웨이퍼 지지용 클램프링

Publications (1)

Publication Number Publication Date
KR960032754U true KR960032754U (ko) 1996-10-24

Family

ID=60864767

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950005162U KR960032754U (ko) 1995-03-22 1995-03-22 반도체 웨이퍼 지지용 클램프링

Country Status (1)

Country Link
KR (1) KR960032754U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination