KR970059867U - 반도체 장비의 웨이퍼 홀더 - Google Patents

반도체 장비의 웨이퍼 홀더

Info

Publication number
KR970059867U
KR970059867U KR2019960009651U KR19960009651U KR970059867U KR 970059867 U KR970059867 U KR 970059867U KR 2019960009651 U KR2019960009651 U KR 2019960009651U KR 19960009651 U KR19960009651 U KR 19960009651U KR 970059867 U KR970059867 U KR 970059867U
Authority
KR
South Korea
Prior art keywords
wafer holder
semiconductor equipment
semiconductor
equipment
wafer
Prior art date
Application number
KR2019960009651U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960009651U priority Critical patent/KR970059867U/ko
Publication of KR970059867U publication Critical patent/KR970059867U/ko

Links

KR2019960009651U 1996-04-29 1996-04-29 반도체 장비의 웨이퍼 홀더 KR970059867U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009651U KR970059867U (ko) 1996-04-29 1996-04-29 반도체 장비의 웨이퍼 홀더

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009651U KR970059867U (ko) 1996-04-29 1996-04-29 반도체 장비의 웨이퍼 홀더

Publications (1)

Publication Number Publication Date
KR970059867U true KR970059867U (ko) 1997-11-10

Family

ID=60929074

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009651U KR970059867U (ko) 1996-04-29 1996-04-29 반도체 장비의 웨이퍼 홀더

Country Status (1)

Country Link
KR (1) KR970059867U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10007287B2 (en) 2015-07-31 2018-06-26 SK Hynix Inc. Voltage generation circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10007287B2 (en) 2015-07-31 2018-06-26 SK Hynix Inc. Voltage generation circuit

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Legal Events

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