KR960031480U - 실리콘웨이퍼폐수의 재이용장치 - Google Patents

실리콘웨이퍼폐수의 재이용장치

Info

Publication number
KR960031480U
KR960031480U KR2019950006156U KR19950006156U KR960031480U KR 960031480 U KR960031480 U KR 960031480U KR 2019950006156 U KR2019950006156 U KR 2019950006156U KR 19950006156 U KR19950006156 U KR 19950006156U KR 960031480 U KR960031480 U KR 960031480U
Authority
KR
South Korea
Prior art keywords
silicon wafer
recycling device
wastewater recycling
wastewater
wafer
Prior art date
Application number
KR2019950006156U
Other languages
English (en)
Other versions
KR0124499Y1 (ko
Inventor
지은상
Original Assignee
지은상
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 지은상 filed Critical 지은상
Priority to KR2019950006156U priority Critical patent/KR0124499Y1/ko
Publication of KR960031480U publication Critical patent/KR960031480U/ko
Application granted granted Critical
Publication of KR0124499Y1 publication Critical patent/KR0124499Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/28—Treatment of water, waste water, or sewage by sorption
    • C02F1/283—Treatment of water, waste water, or sewage by sorption using coal, charred products, or inorganic mixtures containing them
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
KR2019950006156U 1995-03-30 1995-03-30 실리콘웨이퍼폐수의 재이용장치 KR0124499Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950006156U KR0124499Y1 (ko) 1995-03-30 1995-03-30 실리콘웨이퍼폐수의 재이용장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950006156U KR0124499Y1 (ko) 1995-03-30 1995-03-30 실리콘웨이퍼폐수의 재이용장치

Publications (2)

Publication Number Publication Date
KR960031480U true KR960031480U (ko) 1996-10-22
KR0124499Y1 KR0124499Y1 (ko) 1998-08-17

Family

ID=19410384

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950006156U KR0124499Y1 (ko) 1995-03-30 1995-03-30 실리콘웨이퍼폐수의 재이용장치

Country Status (1)

Country Link
KR (1) KR0124499Y1 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020065106A (ko) * 2001-02-05 2002-08-13 동안엔지니어링 주식회사 반도체 세정폐수 중 절삭공정 폐수의 재이용방법
KR101007522B1 (ko) * 2010-11-12 2011-01-14 주식회사 시노펙스 멤브레인을 이용한 불산 폐수 처리시스템 및 처리방법
KR101142034B1 (ko) * 2009-10-01 2012-05-22 (주)에스엠텍 기판 식각 장치의 슬러지 필터 시스템
CN114341062A (zh) * 2019-08-26 2022-04-12 懿华水处理技术有限责任公司 唑类的处理

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101336657B1 (ko) * 2013-02-28 2013-12-04 차춘근 불산 폐액 재이용 멤브레인 시스템 및 재이용 방법
KR101641058B1 (ko) 2015-09-21 2016-07-20 우진건설주식회사 분리막을 이용한 실리콘 웨이퍼 가공 폐수 재이용 시스템

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020065106A (ko) * 2001-02-05 2002-08-13 동안엔지니어링 주식회사 반도체 세정폐수 중 절삭공정 폐수의 재이용방법
KR101142034B1 (ko) * 2009-10-01 2012-05-22 (주)에스엠텍 기판 식각 장치의 슬러지 필터 시스템
KR101007522B1 (ko) * 2010-11-12 2011-01-14 주식회사 시노펙스 멤브레인을 이용한 불산 폐수 처리시스템 및 처리방법
CN114341062A (zh) * 2019-08-26 2022-04-12 懿华水处理技术有限责任公司 唑类的处理

Also Published As

Publication number Publication date
KR0124499Y1 (ko) 1998-08-17

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