KR960010432B1 - 펄스 비임 발생 방법 및 발생 장치 - Google Patents

펄스 비임 발생 방법 및 발생 장치 Download PDF

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Publication number
KR960010432B1
KR960010432B1 KR1019930008386A KR930008386A KR960010432B1 KR 960010432 B1 KR960010432 B1 KR 960010432B1 KR 1019930008386 A KR1019930008386 A KR 1019930008386A KR 930008386 A KR930008386 A KR 930008386A KR 960010432 B1 KR960010432 B1 KR 960010432B1
Authority
KR
South Korea
Prior art keywords
sectional shape
cross
aperture
pulse
electron beam
Prior art date
Application number
KR1019930008386A
Other languages
English (en)
Korean (ko)
Other versions
KR930024280A (ko
Inventor
유이찌로 야마자끼
Original Assignee
가부시기가이샤 도시바
사또 후미오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 도시바, 사또 후미오 filed Critical 가부시기가이샤 도시바
Publication of KR930024280A publication Critical patent/KR930024280A/ko
Application granted granted Critical
Publication of KR960010432B1 publication Critical patent/KR960010432B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
KR1019930008386A 1992-05-18 1993-05-17 펄스 비임 발생 방법 및 발생 장치 KR960010432B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4124866A JP3046452B2 (ja) 1992-05-18 1992-05-18 パルスビーム発生方法および発生装置
JP92-124866 1992-05-18

Publications (2)

Publication Number Publication Date
KR930024280A KR930024280A (ko) 1993-12-22
KR960010432B1 true KR960010432B1 (ko) 1996-07-31

Family

ID=14896039

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930008386A KR960010432B1 (ko) 1992-05-18 1993-05-17 펄스 비임 발생 방법 및 발생 장치

Country Status (3)

Country Link
US (1) US5406178A (ja)
JP (1) JP3046452B2 (ja)
KR (1) KR960010432B1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004037781A1 (de) 2004-08-03 2006-02-23 Carl Zeiss Nts Gmbh Elektronenstrahlgerät
KR20220132053A (ko) * 2017-09-29 2022-09-29 에이에스엠엘 네델란즈 비.브이. 하전 입자 빔 검사를 위한 샘플 사전-충전 방법들 및 장치들

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4075488A (en) * 1974-09-06 1978-02-21 Agency Of Industrial Science & Technology Pattern forming apparatus using quadrupole lenses
US4243866A (en) * 1979-01-11 1981-01-06 International Business Machines Corporation Method and apparatus for forming a variable size electron beam
DE3010815C2 (de) * 1980-03-20 1982-08-19 Siemens AG, 1000 Berlin und 8000 München Hochstrom-Elektronenquelle
US5180919A (en) * 1990-09-18 1993-01-19 Fujitsu Limited Electron beam exposure system having the capability of checking the pattern of an electron mask used for shaping an electron beam

Also Published As

Publication number Publication date
KR930024280A (ko) 1993-12-22
US5406178A (en) 1995-04-11
JPH05325867A (ja) 1993-12-10
JP3046452B2 (ja) 2000-05-29

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