KR960002695U - 노광장치의 웨이퍼 스테이지 - Google Patents

노광장치의 웨이퍼 스테이지

Info

Publication number
KR960002695U
KR960002695U KR2019940013197U KR19940013197U KR960002695U KR 960002695 U KR960002695 U KR 960002695U KR 2019940013197 U KR2019940013197 U KR 2019940013197U KR 19940013197 U KR19940013197 U KR 19940013197U KR 960002695 U KR960002695 U KR 960002695U
Authority
KR
South Korea
Prior art keywords
exposure apparatus
wafer stage
wafer
stage
exposure
Prior art date
Application number
KR2019940013197U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940013197U priority Critical patent/KR960002695U/ko
Publication of KR960002695U publication Critical patent/KR960002695U/ko

Links

KR2019940013197U 1994-06-08 1994-06-08 노광장치의 웨이퍼 스테이지 KR960002695U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013197U KR960002695U (ko) 1994-06-08 1994-06-08 노광장치의 웨이퍼 스테이지

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013197U KR960002695U (ko) 1994-06-08 1994-06-08 노광장치의 웨이퍼 스테이지

Publications (1)

Publication Number Publication Date
KR960002695U true KR960002695U (ko) 1996-01-22

Family

ID=60667169

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013197U KR960002695U (ko) 1994-06-08 1994-06-08 노광장치의 웨이퍼 스테이지

Country Status (1)

Country Link
KR (1) KR960002695U (ko)

Similar Documents

Publication Publication Date Title
DE69730903D1 (de) Belichtungsverfahren und -apparat
DE69728948D1 (de) Projektionsbelichtungsapparat
DE69521107D1 (de) Ausrichtverfahren und Halbleiterbelichtungsverfahren
DE69711157T2 (de) Belichtungsapparat
DE69727016D1 (de) Belichtungsapparat
DE69527682D1 (de) Belichtungsapparat und Belichtungsverfahren
DE69722694D1 (de) Belichtungsapparat
DE69515831D1 (de) Belichtungsapparat
KR960038709U (ko) 웨이퍼 노광장치의 스테이지
DE69516644T2 (de) Belichtungsapparat
KR960002695U (ko) 노광장치의 웨이퍼 스테이지
KR960035590U (ko) 웨이퍼 노광용 스테이지의 접동면 클리닝장치
KR970045362U (ko) 반도체 노광장치
KR960003067U (ko) 노광장치의 레티클 스테이지
KR970045370U (ko) 웨이퍼의 노광장치
KR960032360U (ko) 웨이퍼 노광장치
KR960019070U (ko) 웨이퍼 에지 노광장치
KR960015339U (ko) 웨이퍼 주변 노광장치
KR970063625U (ko) 패널용 노광장치의 노광렌즈
KR960024379U (ko) 웨이퍼 주변 노광장치
KR950015158U (ko) 반도체 웨이퍼의 노광장치
KR960032725U (ko) 반도체 웨이퍼 노광장치
KR940011107U (ko) 노광 장치의 칩 확대율 보정 패턴
KR960012338U (ko) 노광장치의 셔터구조
KR970063626U (ko) 노광장치의 노광렌즈

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination