KR970063625U - 패널용 노광장치의 노광렌즈 - Google Patents

패널용 노광장치의 노광렌즈

Info

Publication number
KR970063625U
KR970063625U KR2019960013677U KR19960013677U KR970063625U KR 970063625 U KR970063625 U KR 970063625U KR 2019960013677 U KR2019960013677 U KR 2019960013677U KR 19960013677 U KR19960013677 U KR 19960013677U KR 970063625 U KR970063625 U KR 970063625U
Authority
KR
South Korea
Prior art keywords
exposure
panel
lens
exposure apparatus
exposure lens
Prior art date
Application number
KR2019960013677U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960013677U priority Critical patent/KR970063625U/ko
Publication of KR970063625U publication Critical patent/KR970063625U/ko

Links

KR2019960013677U 1996-05-29 1996-05-29 패널용 노광장치의 노광렌즈 KR970063625U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960013677U KR970063625U (ko) 1996-05-29 1996-05-29 패널용 노광장치의 노광렌즈

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960013677U KR970063625U (ko) 1996-05-29 1996-05-29 패널용 노광장치의 노광렌즈

Publications (1)

Publication Number Publication Date
KR970063625U true KR970063625U (ko) 1997-12-11

Family

ID=60930660

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960013677U KR970063625U (ko) 1996-05-29 1996-05-29 패널용 노광장치의 노광렌즈

Country Status (1)

Country Link
KR (1) KR970063625U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102415094B1 (ko) * 2021-11-17 2022-06-30 한국기계연구원 비평면기판용 나노임프린트 노광장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102415094B1 (ko) * 2021-11-17 2022-06-30 한국기계연구원 비평면기판용 나노임프린트 노광장치 및 방법

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination