KR950033479A - 가스 및 습도센서 - Google Patents

가스 및 습도센서 Download PDF

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Publication number
KR950033479A
KR950033479A KR1019940026409A KR19940026409A KR950033479A KR 950033479 A KR950033479 A KR 950033479A KR 1019940026409 A KR1019940026409 A KR 1019940026409A KR 19940026409 A KR19940026409 A KR 19940026409A KR 950033479 A KR950033479 A KR 950033479A
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KR
South Korea
Prior art keywords
gas
humidity sensor
substrate
insulated substrate
die bond
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KR1019940026409A
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English (en)
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KR100313408B1 (ko
Inventor
요시노부 마쯔우라
토오루 노무라
토모히로 이노우에
Original Assignee
카와무라 쇼오지
피가로기켄 카부시키가이샤
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Publication of KR950033479A publication Critical patent/KR950033479A/ko
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Publication of KR100313408B1 publication Critical patent/KR100313408B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/01—Method or apparatus with die casting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/038—Spot welding with other step
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

가스센서기판의 다이본드를 개선하고, (1)다이본드강도의 분산, (2)와이어본드강도의 분산, (3)다이본드시의 기판으로의 크랙의 발생을 방지한다. 알루미나기판(2)의 이면에, 글라스층(12)과 금페이스층(10)을 적층하고 프레임(4)의 금도금층(14)에 평행갭을 용착한다. 평행갭 용착시의 열로 금페이스트층(10)은 금도금층(14)에 용착되어, 균일한 다이본드강도가 얻어지고 또 다이본드재료가 센서본체(16)측으로 비산하는 일이 없으며, 균일한 와이어본드강도가 얻어진다. 더우기, 다이본드시의 열충격이 기판(2)으로 전달되는 것을 글라스층(12)에서 방지되며 다이본드시의 크랙을 방지한다.

Description

가스 및 습도센서
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 실시예의 가스 및 습도센서의 단면도, 제2도는 실시예의 가스 및 습도센서의 기판을 표시하는 도면, 제3도는 실시예의 가스 및 습도센서의 요부단면도, 제4도는 제2실시예의 가스 및 습도센서의 단면도, 제5도는 제2실시예의 가스 및 습도센서의 요부측면도, 제6도는 제2실시예의 센서본체의 평면도, 제7도는 제2실시예에서의 글라스층(12)의 우무에 의한 크랙발생률의 변화를 표시하는 특성도, 제8도는 제2실시예에서의 와이어본드강도의 분포를 표시하는 특성도, 제9도는 제2실시예에서의 가지(36)의 유무에 의한 낙하내성의 변화를 표시하는 특성도.

Claims (5)

  1. 세라믹 절연기판 위에 센서본체를 형성하고, 전기한 절연기판의 이면을 프레임으로 다이본된 가스 및 습도센서에 있어서, 전기한 절연기판의 이면에 글라스층과 금속층을 적층하고, 이 금속층을 전기한 프레임에 용착한 것을 특징으로 하는 가스 및 습도센서.
  2. 제1항에 있어서, 다수의 프레임을 설치하여 그 1개에 전기한 절연기판을 용착함과 아울러, 그들의 프레임을 베이스에 고착하고 또한 센서본체와 접속된 복수의 전극패드를 절연기판에 설치하여, 이들의 전극패드를 전기한 프레임으로 와이어본딩하고, 더우기 기판을 용착한 프레임을 다른 프레임의 1개와 결합하는 가지를 설치한 것을 특징으로 하는 가스 및 습도센서.
  3. 제1항에 있어서, 와이어본딩에 사용한 와이어의 루우프높이(H)와 루우푸길이(G)와의 비를, 0.5이상 1.3이하로 한 것을 특징으로 하는 가스 및 습도센서.
  4. 제1항에 있어서, 전기한 센서본체가 히이터막과 2개의 같은 종류의 금속산화물 반도체의 막으로 이루어지며, 금속산화물 반도체막의 1개를 가스검출용으로 하고, 금속산화물 반도체막의 다른쪽을 글라스막으로 피복하여 수증기검출용으로 한 것을 특징으로 하는 가스 및 습도센서.
  5. 제4항에 있어서, 가스 및 습도센서를 조리기내에서 발생하는 가스와 수증기의 검출용센서로 한 것을 특징으로 하는 가스 및 습도센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940026409A 1994-05-16 1994-10-14 가스및습도센서 KR100313408B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12689094A JP3531971B2 (ja) 1994-05-16 1994-05-16 ガスまたは湿度を検出するセンサとその製造方法
JP94-126890 1994-05-16

Publications (2)

Publication Number Publication Date
KR950033479A true KR950033479A (ko) 1995-12-26
KR100313408B1 KR100313408B1 (ko) 2002-06-22

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Family Applications (1)

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KR1019940026409A KR100313408B1 (ko) 1994-05-16 1994-10-14 가스및습도센서

Country Status (3)

Country Link
US (1) US5493897A (ko)
JP (1) JP3531971B2 (ko)
KR (1) KR100313408B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003171A (ko) * 2002-11-27 2003-01-09 (주)니즈 기판의 구성 층간의 열전도도 차이를 이용한펄스구동방식의 가스센서 제조
KR20030013234A (ko) * 2001-08-07 2003-02-14 삼성전자주식회사 전자레인지

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US6730270B1 (en) 2000-02-18 2004-05-04 Honeywell International Inc. Manufacturable single-chip hydrogen sensor
US6634213B1 (en) 2000-02-18 2003-10-21 Honeywell International Inc. Permeable protective coating for a single-chip hydrogen sensor
JP2002296214A (ja) * 2001-03-29 2002-10-09 Denso Corp ガスセンサの検査方法及び製造方法
US6927583B2 (en) * 2001-05-17 2005-08-09 Siemens Vdo Automotive Inc. Fuel sensor
KR20040016605A (ko) * 2002-08-19 2004-02-25 (주)니즈 가스센서 감지소자 조립방법
US20040084308A1 (en) * 2002-11-01 2004-05-06 Cole Barrett E. Gas sensor
JP4462864B2 (ja) * 2003-07-18 2010-05-12 フィガロ技研株式会社 ガスセンサの製造方法
US8739623B2 (en) 2012-03-09 2014-06-03 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates
EP2796488A4 (en) * 2012-08-01 2014-11-26 Nat Inst For Materials Science IN HIGH TIMES PROTON-CONDUCTIVE POLYMERIC FILM, MANUFACTURING METHOD AND HUMIDITY SENSOR

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030013234A (ko) * 2001-08-07 2003-02-14 삼성전자주식회사 전자레인지
KR20030003171A (ko) * 2002-11-27 2003-01-09 (주)니즈 기판의 구성 층간의 열전도도 차이를 이용한펄스구동방식의 가스센서 제조

Also Published As

Publication number Publication date
JPH07311173A (ja) 1995-11-28
KR100313408B1 (ko) 2002-06-22
JP3531971B2 (ja) 2004-05-31
US5493897A (en) 1996-02-27

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