KR950024298A - 반도체장치 매몰층 제조 방법 - Google Patents
반도체장치 매몰층 제조 방법 Download PDFInfo
- Publication number
- KR950024298A KR950024298A KR1019940001573A KR19940001573A KR950024298A KR 950024298 A KR950024298 A KR 950024298A KR 1019940001573 A KR1019940001573 A KR 1019940001573A KR 19940001573 A KR19940001573 A KR 19940001573A KR 950024298 A KR950024298 A KR 950024298A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- diffusion mask
- mask layer
- ion
- forming
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 238000009792 diffusion process Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims abstract 6
- 238000005530 etching Methods 0.000 claims abstract 3
- 239000012535 impurity Substances 0.000 claims abstract 3
- 238000005406 washing Methods 0.000 claims abstract 2
- 150000002500 ions Chemical class 0.000 claims 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical group [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000002253 acid Substances 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005137 deposition process Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 abstract 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Abstract
본 발명은 반도체장치에서 매몰층(Buried Layer)을 형성하는 방법에 관한 것으로 특히 질소입자를 주입하여 반도체기판의 결정결합 형성을 방지하는 반도체장치 매몰층 제조 방법에 관한 것으로 (가)반도체기판 위에 제1확산마스크 층을 형성하는 단계와, (나)상기 제1확산마스크 층내에 이온 주입하여 이온층을 형성하는 단계와, (다)사진식각방법으로 상기 제1확산마스크 층과 이온층의 일부를 제거하여 매몰층이 형성될 부위를 개방한 후, 세척하는 단계와, (라)상기 반도체기판의 개방부위에 불순물의 증착 및 확산공정을 실시하여 매몰층을 형성하고, 매몰층위에 산화막을 형성하고, 이온층이 제2확산마스크 층으로 변화되게하는 단계와, 이온층이 제2확산마스크 층으로 변화되게하는 단계와, 이온층으로 제2확산마스크 층를 형성하는 단계와, (마) 제2확산마스크 층 및 제1확산마스크 층, 산화막을 식각한 뒤, 매몰층이 있는 반도체기판위에 에피택샬층을 형성하는 단계를 포함한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 반도체장치 매몰층 제조 방법을 설명하기 위한 매몰층 부위의 단면도이다.
제4도는 질소입자주입애 의한 제1확산마스크 층 손상부위의 단면도이다.
Claims (4)
- 반도체장치 매몰층 제조 방법에 있어서, (가)반도체기판 위에 제1확산마스크 층을 형성하는 단계와, (나)상기 제1확산마스크 층 내에 이온주입하여 이온층을 형성하는 단계와, (다) 사진식각방법으로 상기 제l확산마스크 층과 이온층의 일부를 제거하여 매몰층이 형성될 부위를 개방한 후, 세척하는 단계와, (라)상기 반도체기판의 개방부위에 불순물의 증착 및 확산공정을 실시하여 매몰층읕 형성하고, 매몰층위에 산화막을 형성하고, 이온층이 제2확산마스크 층으로 변화되게하는 단계와, (마)제2확산마스크층 및 제1확산마스크 층, 산화막을 식각하 뒤, 매몰층이 있는 반도체기판위에 에피택샬층을 형성하는 단계를 포함하는 반도체장치 매몰층 제조 방법.
- 제l항에 있어서, 상기 제1확산마스크 층은 실리콘산화막으로 형성하고, 상기 이온층은 이온주입기로 질소입자를 30KeV 내지 200KeV의 에너지로 주입하여 형성하는 것을 특징으로하는 반도체장치 매몰층 제조 방법.
- 제1항에 있어서, 상기 제2확산마스크 층은 Si3N4로 형성되는 것을 특징으로하는 반도체장치 매몰층 제조 방법.
- 제1항에 있어서, 상기 불순물은 안티몬이며 Sb2O3를 사용하는 것을 특징으로하는 반도체 장치 매몰층 제조 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94001573A KR970005702B1 (en) | 1994-01-28 | 1994-01-28 | Method of manufacturing buried layer on the semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR94001573A KR970005702B1 (en) | 1994-01-28 | 1994-01-28 | Method of manufacturing buried layer on the semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950024298A true KR950024298A (ko) | 1995-08-21 |
KR970005702B1 KR970005702B1 (en) | 1997-04-19 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR94001573A KR970005702B1 (en) | 1994-01-28 | 1994-01-28 | Method of manufacturing buried layer on the semiconductor |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970005702B1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100393962B1 (ko) * | 1996-12-26 | 2003-11-17 | 주식회사 하이닉스반도체 | 반도체소자의제조방법 |
KR100416985B1 (ko) * | 1996-11-29 | 2004-06-16 | 삼성전자주식회사 | 캐리어 적재장치 |
-
1994
- 1994-01-28 KR KR94001573A patent/KR970005702B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100416985B1 (ko) * | 1996-11-29 | 2004-06-16 | 삼성전자주식회사 | 캐리어 적재장치 |
KR100393962B1 (ko) * | 1996-12-26 | 2003-11-17 | 주식회사 하이닉스반도체 | 반도체소자의제조방법 |
Also Published As
Publication number | Publication date |
---|---|
KR970005702B1 (en) | 1997-04-19 |
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