KR950021182A - Method of Cleaning Semiconductor Devices - Google Patents
Method of Cleaning Semiconductor Devices Download PDFInfo
- Publication number
- KR950021182A KR950021182A KR1019930029776A KR930029776A KR950021182A KR 950021182 A KR950021182 A KR 950021182A KR 1019930029776 A KR1019930029776 A KR 1019930029776A KR 930029776 A KR930029776 A KR 930029776A KR 950021182 A KR950021182 A KR 950021182A
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning
- semiconductor device
- oxide film
- pure
- semiconductor devices
- Prior art date
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
본 발명은 반도체 소자의 세정방법에 관한 것으로, 순수 DI 속에서 성장하는 자연 산화막을 제거하기 위하여 순수 DI로 세정하는 동안 일정량의무수(Anhydros) HF를 도시에 흘려주므로써 자연산화막속의 불순물이 제거되어 반도체 소자의 특성이 개선 되도록 한 반도체 소자의 세정방법에 관해 기술된다.The present invention relates to a method for cleaning a semiconductor device, in order to remove a natural oxide film growing in pure DI, by removing a certain amount of anhydrous HF flowing in the city during cleaning with pure DI to remove impurities in the natural oxide film A cleaning method of a semiconductor device in which the characteristics of the semiconductor device are improved is described.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 따른 반도체 소자의 세정방법을 설명하기 위한 세정 장치의 구조도.2 is a structural diagram of a cleaning device for explaining a method for cleaning a semiconductor device according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930029776A KR950021182A (en) | 1993-12-27 | 1993-12-27 | Method of Cleaning Semiconductor Devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930029776A KR950021182A (en) | 1993-12-27 | 1993-12-27 | Method of Cleaning Semiconductor Devices |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950021182A true KR950021182A (en) | 1995-07-26 |
Family
ID=66850881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930029776A KR950021182A (en) | 1993-12-27 | 1993-12-27 | Method of Cleaning Semiconductor Devices |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950021182A (en) |
-
1993
- 1993-12-27 KR KR1019930029776A patent/KR950021182A/en not_active Application Discontinuation
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