KR950002911A - Co_2레이저가공장치 - Google Patents

Co_2레이저가공장치 Download PDF

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Publication number
KR950002911A
KR950002911A KR1019940017208A KR19940017208A KR950002911A KR 950002911 A KR950002911 A KR 950002911A KR 1019940017208 A KR1019940017208 A KR 1019940017208A KR 19940017208 A KR19940017208 A KR 19940017208A KR 950002911 A KR950002911 A KR 950002911A
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KR
South Korea
Prior art keywords
laser
processing
laser processing
processing apparatus
pair
Prior art date
Application number
KR1019940017208A
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English (en)
Other versions
KR0141060B1 (ko
Inventor
토시루 오카다
이즈루 나카이
유우지 우에스기
쇼로 모치다
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 모리시타 요이찌, 마쯔시다덴기산교 가부시기가이샤 filed Critical 모리시타 요이찌
Publication of KR950002911A publication Critical patent/KR950002911A/ko
Application granted granted Critical
Publication of KR0141060B1 publication Critical patent/KR0141060B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

본 발명은, 전자부품, 전자기기 등의 정밀가공에 사용되는 CO₂레이저가공장치에 관한 것으로서, 고속이고 또한 고정밀의 가공을 가공하게 하는 CO₂레이저가공장치를 제공하는 것을 목적으로 한 것이며, 그 구성에 있어서, CO₂레이저발진기(1)와, 회전동작하는 미러(3),(4)와, 미러(3),(4)에 의해 반사·주사되는 레이저광선을 소정의 평면상에 접속시키는 광학부품(7)을 가지고, 임의의 구멍가공에 있어서, 매초 100구멍이상의 가공속도를 실현하는 것을 특징으로 한 것이다.

Description

CO₂레이저가공장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예에 있어서의 CO₂레이저가공장치의 구성을 표시한 도면, 제2도는 동 fe렌즈의 구성을 표시한 도면, 제3도는 본 발명의 제2실시예에 있어서의 CO₂레이저가공장치의 구성을 표시한 도면.

Claims (4)

  1. CO₂레이저발진기와 상기 CO₂레이저발진기로부터 출사한 레이저광선을 반사하고, 주사시키기 위한 1쌍의 회전동작하는 미러와, 상기 1쌍의 회전동작하는 미러에 의해 반사된 레이저광선을 소정의 평면상에 집속시키는 광학부품을 구비한 것을 특징으로 하는 CO₂레이저가공장치.
  2. 제1항에 있어서, 1축이상의 가동위치결정스테이지를 구비한 것을 특징으로 하는 CO₂레이저가공장치.
  3. 1대의 CO₂레이저발진기로부터 출사한 레이저광선을 복수로 분기하고, 각 분기마다 레이저광선을 반사하고, 주사시키기 위한 1쌍의 회전동작하는 미러와, 상기 1쌍의 회전동작하는 미러에 의해 반사, 주사되는 레이저광선을 소정의 평면상에 집속시키는 광학부품을 구비한 것을 특징으로 하는 CO₂레이저가공장치.
  4. 제3항에 있어서, 1대의 CO₂레이저발진기로부터 출사한 레이저광선을 복수로 분기하고, 각 분기마다 1축이상의 가동위치 결정 스테이지를 구비한 것을 특징으로 하는 CO₂레이저가공장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940017208A 1993-07-16 1994-07-16 Co2레이저가공장치 KR0141060B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP17645593A JP3257157B2 (ja) 1993-07-16 1993-07-16 Ｃｏ２レーザ穴加工装置及び方法
JP93-176455 1993-07-16

Publications (2)

Publication Number Publication Date
KR950002911A true KR950002911A (ko) 1995-02-16
KR0141060B1 KR0141060B1 (ko) 1998-07-15

Family

ID=16014007

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940017208A KR0141060B1 (ko) 1993-07-16 1994-07-16 Co2레이저가공장치

Country Status (3)

Country Link
JP (1) JP3257157B2 (ko)
KR (1) KR0141060B1 (ko)
CN (1) CN1056108C (ko)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7462801B1 (en) * 1996-11-20 2008-12-09 Ibiden Co., Ltd. Laser machining apparatus, and apparatus and method for manufacturing a multilayered printed wiring board
US7732732B2 (en) 1996-11-20 2010-06-08 Ibiden Co., Ltd. Laser machining apparatus, and apparatus and method for manufacturing a multilayered printed wiring board
JP3213882B2 (ja) * 1997-03-21 2001-10-02 住友重機械工業株式会社 レーザ加工装置及び加工方法
JP3341114B2 (ja) † 1997-03-21 2002-11-05 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
JP3511359B2 (ja) * 1998-02-27 2004-03-29 三菱電機株式会社 レーザ加工装置
US6037564A (en) * 1998-03-31 2000-03-14 Matsushita Electric Industrial Co., Ltd. Method for scanning a beam and an apparatus therefor
JP2001105164A (ja) * 1999-10-07 2001-04-17 Sumitomo Heavy Ind Ltd レーザ穴あけ加工方法及び加工装置
KR100488165B1 (ko) * 2002-01-29 2005-05-06 (주)삼성종합호스 분수 호스 천공 장치
KR100692137B1 (ko) * 2005-06-30 2007-03-12 현대자동차주식회사 레이저 용접 장치 및 시스템
US7538296B2 (en) * 2005-09-06 2009-05-26 Pratt & Whitney Canada Corp. High speed laser drilling machine and method
JP4687657B2 (ja) * 2007-01-26 2011-05-25 パナソニック株式会社 レーザ加工装置
US8362392B2 (en) 2008-02-05 2013-01-29 Pratt & Whitney Canada Corp. Method for drilling holes according to an optimized sequence
CH700111B1 (fr) * 2009-09-25 2010-06-30 Agie Sa Machine d'usinage par laser.
JP5271394B2 (ja) * 2011-07-20 2013-08-21 三星ダイヤモンド工業株式会社 レーザスクライブ装置
WO2013121818A1 (ja) * 2012-02-14 2013-08-22 村田機械株式会社 レーザ加工機

Also Published As

Publication number Publication date
CN1102796A (zh) 1995-05-24
KR0141060B1 (ko) 1998-07-15
JPH0732183A (ja) 1995-02-03
JP3257157B2 (ja) 2002-02-18
CN1056108C (zh) 2000-09-06

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