DE60004237D1 - LASER-Generatorsystem - Google Patents

LASER-Generatorsystem

Info

Publication number
DE60004237D1
DE60004237D1 DE60004237T DE60004237T DE60004237D1 DE 60004237 D1 DE60004237 D1 DE 60004237D1 DE 60004237 T DE60004237 T DE 60004237T DE 60004237 T DE60004237 T DE 60004237T DE 60004237 D1 DE60004237 D1 DE 60004237D1
Authority
DE
Germany
Prior art keywords
optical
laser
laser beam
generator system
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60004237T
Other languages
English (en)
Other versions
DE60004237T2 (de
Inventor
Daniel Dr Kopf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE60004237D1 publication Critical patent/DE60004237D1/de
Application granted granted Critical
Publication of DE60004237T2 publication Critical patent/DE60004237T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3525—Optical damage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers
    • H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
DE60004237T 1999-06-11 2000-06-07 LASER-Generatorsystem Expired - Lifetime DE60004237T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13889599P 1999-06-11 1999-06-11
US138895P 1999-06-11
PCT/EP2000/005203 WO2000077890A2 (en) 1999-06-11 2000-06-07 Optical system for lasers

Publications (2)

Publication Number Publication Date
DE60004237D1 true DE60004237D1 (de) 2003-09-04
DE60004237T2 DE60004237T2 (de) 2004-04-15

Family

ID=22484144

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60004237T Expired - Lifetime DE60004237T2 (de) 1999-06-11 2000-06-07 LASER-Generatorsystem

Country Status (4)

Country Link
EP (1) EP1194804B1 (de)
AT (1) ATE246367T1 (de)
DE (1) DE60004237T2 (de)
WO (1) WO2000077890A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1386196A1 (de) * 2001-05-08 2004-02-04 Spectra Physics Lasers, Inc. Algorithmus zur verbesserung der lebensdauer von kritischen komponenten in einem lasersystem
FR2938935B1 (fr) * 2008-11-21 2011-05-06 Eolite Systems Dispositif d'allongement de la duree de vie d'un systeme optique non lineaire soumis au rayonnement d'un faisceau laser intense et source optique non lineaire comprenant ce dispositif
US8873596B2 (en) 2011-07-22 2014-10-28 Kla-Tencor Corporation Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
US8976343B2 (en) 2012-06-21 2015-03-10 Kla-Tencor Corporation Laser crystal degradation compensation
US9042006B2 (en) 2012-09-11 2015-05-26 Kla-Tencor Corporation Solid state illumination source and inspection system
US8929406B2 (en) 2013-01-24 2015-01-06 Kla-Tencor Corporation 193NM laser and inspection system
US9529182B2 (en) 2013-02-13 2016-12-27 KLA—Tencor Corporation 193nm laser and inspection system
US9608399B2 (en) 2013-03-18 2017-03-28 Kla-Tencor Corporation 193 nm laser and an inspection system using a 193 nm laser
US9804101B2 (en) 2014-03-20 2017-10-31 Kla-Tencor Corporation System and method for reducing the bandwidth of a laser and an inspection system and method using a laser
US9419407B2 (en) 2014-09-25 2016-08-16 Kla-Tencor Corporation Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
US9748729B2 (en) 2014-10-03 2017-08-29 Kla-Tencor Corporation 183NM laser and inspection system
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3432771A (en) * 1964-12-18 1969-03-11 Ibm Optical scanning techniques employing an optical cavity including two reflectors and a focussing objective
FR2659258B1 (fr) * 1990-03-06 1994-10-21 Peugeot Dispositif de reglage d'orientation, notamment pour le reglage en position d'un faisceau laser.
IL111124A (en) * 1994-10-02 1996-07-23 Univ Ramot Positioning devices and a method and positioning device for aligning an optical fiber with an optical beam
DE19515321A1 (de) * 1995-04-20 1996-10-24 Gos Ges Zur Foerderung Angewan Durchstimmbare, justierstabile Laserlichtquelle mit spektral gefiltertem Ausgang
GB2305232B (en) * 1995-09-15 2000-04-19 Pilkington Perkin Elmer Ltd Adjustment arrangement
US5737132A (en) * 1996-05-06 1998-04-07 New Focus, Inc. Flip-type mirror mount
US5825562A (en) * 1997-08-18 1998-10-20 Novatec Corporation Method of continuous motion for prolong usage of optical elements under the irradiation of intensive laser beams
US5852519A (en) * 1997-09-05 1998-12-22 New Focus, Inc. Positionable multi-optic holder
US6034804A (en) * 1998-03-31 2000-03-07 The United States Of America As Represented By The Secretary Of The Navy Rapid, high-resolution scanning of flat and curved regions for gated optical imaging

Also Published As

Publication number Publication date
WO2000077890A2 (en) 2000-12-21
WO2000077890A3 (en) 2001-12-06
DE60004237T2 (de) 2004-04-15
EP1194804B1 (de) 2003-07-30
EP1194804A2 (de) 2002-04-10
ATE246367T1 (de) 2003-08-15

Similar Documents

Publication Publication Date Title
FR2661008B1 (fr) Systeme de lentilles pour focaliser le faisceau de sortie d'un laser a semi-conducteur.
GB9815968D0 (en) X-ray focusing apparatus
TW358892B (en) Projection display
DE60004237D1 (de) LASER-Generatorsystem
CA2307189A1 (en) Fabrication of optical waveguide gratings
TW358891B (en) Projection display
WO2002044785A3 (en) Method of and apparatus for adjusting optical component, and optical unit
EP0703088A3 (de) Bilderzeugungsvorrichtung mit optischer Zweistrahlabtasteinheit
DE60104351D1 (de) Laser-Photohärtungssystem
DE69107232D1 (de) Apparat zur Dämpfung eines Laserstrahls.
CA2408183A1 (en) Inspection system for edges of glass
IT1284535B1 (it) Amplificatore ottico con livello costante di luce di segnale amplificata con elevata precisione, particolarmente per comunicazioni
FR2667733B1 (fr) Ensemble capteur-element de reglage, pour le reglage du faisceau de lasers de forte puissance.
PL317614A1 (en) Light beam dispersing optical element
DE69805424D1 (de) Optisches abtastsystem mit mechanismus zur leistungsdämpfung eines laserstrahls
DE69329228T2 (de) Elektronenstrahlablenklinse für kathodenstrahlröhre
EP1094349A3 (de) Fokussierungsgerät für ein Bildaufzeichnungssystem
ATE221653T1 (de) Ellipsometer mit hoher räumlicher auflösung
DE69612130T2 (de) Optische Strahlabtastvorrichtung
FR2718539B1 (fr) Dispositif d'amplification de taux de modulation d'amplitude d'un faisceau optique.
ATE333659T1 (de) Optisches system mit veränderlicher vergrösserung
WO2003003071A3 (en) Long-throw, tight focusing optical coupler
EP0378149A3 (de) Achromatisches optisches Laserabtastsystem
KR950009735U (ko) 레이저빔 주사광학계의 빔 위치 조절장치
BR9904111A (pt) Aparelho para a conversão de imagens ou ilustrações em sinais eletrônicos

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1194804

Country of ref document: EP

Representative=s name: KAMINSKI HARMANN PATENTANWAELTE EST., VADUZ, LI

R082 Change of representative

Ref document number: 1194804

Country of ref document: EP

Representative=s name: KAMINSKI HARMANN PATENTANWAELTE AG, LI