KR940703936A - 초경질막 피복부재 및 그 제조방법(superhard film-coated member and method of manufacturing the same) - Google Patents
초경질막 피복부재 및 그 제조방법(superhard film-coated member and method of manufacturing the same)Info
- Publication number
- KR940703936A KR940703936A KR1019940702363A KR19940702363A KR940703936A KR 940703936 A KR940703936 A KR 940703936A KR 1019940702363 A KR1019940702363 A KR 1019940702363A KR 19940702363 A KR19940702363 A KR 19940702363A KR 940703936 A KR940703936 A KR 940703936A
- Authority
- KR
- South Korea
- Prior art keywords
- diamond
- substrate
- cemented carbide
- superhard
- coating member
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
본 발명은 다이아몬드 등의 초경질막과 초경합금기재가 강고하게 부착한 초경질막 피복부재와 그 제조방법을 제공하는 것이다.
본 발명은 초경합금기재를 열처리하여 기재표면상에 기재표면부에 가까운 기재중의 결합금속을 반구상으로 석출시킨다. 이 석출물을 그대로 남기던지 또는 그 일부 혹은 전부를 제거하고, 이 표면상에 화학적기상 합성법에 의하여 다이아몬드 및/또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 것이다.
이 석출물의 생성에 의하여 초경질막과 초경합금기재의 부착력은 현저하게 강하게 되고, 두꺼운 막의 형성이 가능하게 된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 실시예에 있어서 열처리 및 막을 형성하는데 사용한 열필라멘트 CVD장치의 개략단면도이며, 제 2 도는 초경합금기재의 입자구조를 나타내는 표면부의 2차 전자현미경 조직이며, 제 3 도는 제 2 도를 설명하기 위한 모식도이다.
Claims (8)
- 초경합금기재의 표면에 다이아몬드 및/또는 다이아몬드 모양 탄소로 이루어지는 초경질막을 형성하여 구성되는 부재에 있어서, 이 기재는 기재표면에서 30㎛의 범위내에 경질상 입자간의 간격이 원기재의 그것보다 협소하고 결합상 금속의 함유량이 적은 부분을 지니는 것을 특징으로 하는 초경질막 피복부재.
- 제 1 항에 있어서, 이 막은 기재표면의 계면에서 막두께의 1/2 이하의 범위에 있어서, 막 가운데 초경합금기재의 결합상 금속을 함유하여 이루어지는 것을 특징으로 하는 초경질막 피복부재.
- 제 1 항 또는 제 2 항에 있어서, 초경질막 표면은 연마되어 있는 것을 특징으로 하는 초경질막 피복부재.
- 초경합금기재표면에 열처리를 하고, 이 기재표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물을 생성하는 공정을 거친후 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
- 제 4 항에 있어서, 탄소원자가 존재하는 분위기 중에서 초경합금기재표면에 열처리를 시행하고, 이 표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물 및 탄소를 주성분으로 하는 퇴적물을 생성시키고, 이 표면상에 생긴 퇴적물을 제거하든가 또는 다시 석출물의 일부 또는 전부를 제거한 뒤, 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
- 제 5 항에 있어서, 열처리와 퇴적물 또는 퇴적물 및 석출물의 제거를 2회 이상 행하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
- 제 4 항에 있어서, 수소원자가 존재하는 분위기 중 또는 저진공중에서 초경합금기재에 열처리를 시행하고, 이 기재표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물을 생성하는 공정을 거친 뒤, 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
- 제 4, 5, 6항 또는 7 항에 있어서, 초경합금의 열처리를 열필라멘트 CVD장치로 행하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP92-351955 | 1992-12-08 | ||
JP35195592 | 1992-12-08 | ||
JP91-351955 | 1992-12-08 | ||
PCT/JP1993/001779 WO1994013852A1 (en) | 1992-12-08 | 1993-12-08 | Superhard film-coated material and method of producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940703936A true KR940703936A (ko) | 1994-12-12 |
KR100193546B1 KR100193546B1 (ko) | 1999-06-15 |
Family
ID=18420773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940702363A KR100193546B1 (ko) | 1992-12-08 | 1993-12-08 | 초경질막 피복부재 및 그 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5955212A (ko) |
EP (1) | EP0628642B1 (ko) |
KR (1) | KR100193546B1 (ko) |
DE (1) | DE69330052T2 (ko) |
WO (1) | WO1994013852A1 (ko) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5674620A (en) * | 1994-08-11 | 1997-10-07 | Saint-Gobain/Norton Industrial Ceramics Corporation | Diamond-coated composite cutting tool and method of making |
AT411070B (de) * | 1996-03-25 | 2003-09-25 | Electrovac | Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht |
DE69823495T2 (de) * | 1997-02-05 | 2005-04-07 | Cemecon Ag | Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material |
DE19859905C2 (de) * | 1998-01-27 | 2002-05-23 | Gfd Ges Fuer Diamantprodukte M | Diamantschneidwerkzeug |
KR100305315B1 (ko) * | 1999-04-09 | 2001-09-13 | 박호군 | 다이아몬드 막이 코팅된 절삭공구 및 그 제조방법 |
US6261693B1 (en) * | 1999-05-03 | 2001-07-17 | Guardian Industries Corporation | Highly tetrahedral amorphous carbon coating on glass |
DE10130590B4 (de) * | 2001-05-16 | 2011-06-30 | Widia GmbH, 45145 | Verbundwerkstoff und Verfahren zu dessen Herstellung |
HUP0302074A2 (hu) * | 2001-05-16 | 2003-09-29 | Widia Gmbh | Kompozit anyag és eljárás annak elżállítására |
BR0103109B1 (pt) * | 2001-06-08 | 2011-09-06 | ferramenta de corte e processo de formação desta. | |
US7866343B2 (en) | 2002-12-18 | 2011-01-11 | Masco Corporation Of Indiana | Faucet |
US8555921B2 (en) | 2002-12-18 | 2013-10-15 | Vapor Technologies Inc. | Faucet component with coating |
US7866342B2 (en) | 2002-12-18 | 2011-01-11 | Vapor Technologies, Inc. | Valve component for faucet |
US8220489B2 (en) | 2002-12-18 | 2012-07-17 | Vapor Technologies Inc. | Faucet with wear-resistant valve component |
EP1649955B1 (en) * | 2003-07-31 | 2013-08-14 | Sumitomo Electric Industries, Ltd. | Diamond film coated tool and process for producing the same |
EP2152926A4 (en) * | 2007-04-27 | 2012-01-25 | Taegu Tec Ltd | COATED SEALED CARBIDE CUTTING TOOLS AND METHOD FOR PRE-TREATING AND APPLYING A COATING FOR THE PRODUCTION OF CEMENTED CARBIDE CUTTING TOOLS |
JP5817116B2 (ja) * | 2010-02-03 | 2015-11-18 | 東洋製罐株式会社 | ダイヤモンド表面の研磨方法 |
US9926622B2 (en) | 2015-11-12 | 2018-03-27 | Uchicago Argonne, Llc | Methods for forming pitting resistant carbon coating |
CN106011782B (zh) * | 2016-07-21 | 2018-07-03 | 新疆红电金铸耐磨材料有限责任公司 | 一种超高硬度耐磨薄膜及其生产方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6152363A (ja) * | 1984-08-21 | 1986-03-15 | Mitsubishi Metal Corp | サ−メツト部材の表面に人工ダイヤモンド皮膜を析出形成する方法 |
JPH0672302B2 (ja) | 1985-09-19 | 1994-09-14 | 住友電気工業株式会社 | 硬質炭素膜被覆超硬合金の製造法 |
JPS63100182A (ja) * | 1986-04-24 | 1988-05-02 | Mitsubishi Metal Corp | ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ |
JPH0791651B2 (ja) * | 1986-04-24 | 1995-10-04 | 三菱マテリアル株式会社 | ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ |
JPS631280A (ja) | 1986-06-20 | 1988-01-06 | Matsushita Electric Ind Co Ltd | 帰還型くし形フイルタ |
JPH088466B2 (ja) | 1986-07-15 | 1996-01-29 | 松下電器産業株式会社 | シンセサイザ受信機のロ−タリ−選局方式 |
JPH01212491A (ja) | 1988-02-20 | 1989-08-25 | Mitsumi Electric Co Ltd | チップ部品の製造法 |
JPH01242491A (ja) * | 1988-03-24 | 1989-09-27 | Sumitomo Electric Ind Ltd | ダイヤモンド被覆超硬合金部品及びその製造方法 |
US4988421A (en) * | 1989-01-12 | 1991-01-29 | Ford Motor Company | Method of toughening diamond coated tools |
JP2554941B2 (ja) * | 1989-11-01 | 1996-11-20 | 東洋鋼鈑株式会社 | ダイヤモンド被覆超硬合金部材の製造方法 |
JP2734157B2 (ja) * | 1990-01-24 | 1998-03-30 | 三菱マテリアル株式会社 | ダイヤモンド被覆炭化タングステン基超硬合金切削工具の製造法 |
JP3191878B2 (ja) * | 1991-02-21 | 2001-07-23 | 三菱マテリアル株式会社 | 気相合成ダイヤモンド被覆切削工具の製造法 |
-
1993
- 1993-12-08 EP EP94902089A patent/EP0628642B1/en not_active Expired - Lifetime
- 1993-12-08 WO PCT/JP1993/001779 patent/WO1994013852A1/ja active IP Right Grant
- 1993-12-08 KR KR1019940702363A patent/KR100193546B1/ko not_active IP Right Cessation
- 1993-12-08 US US08/256,788 patent/US5955212A/en not_active Expired - Fee Related
- 1993-12-08 DE DE69330052T patent/DE69330052T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0628642B1 (en) | 2001-03-21 |
US5955212A (en) | 1999-09-21 |
EP0628642A1 (en) | 1994-12-14 |
DE69330052T2 (de) | 2001-11-15 |
WO1994013852A1 (en) | 1994-06-23 |
EP0628642A4 (en) | 1997-02-26 |
DE69330052D1 (de) | 2001-04-26 |
KR100193546B1 (ko) | 1999-06-15 |
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