KR940703936A - 초경질막 피복부재 및 그 제조방법(superhard film-coated member and method of manufacturing the same) - Google Patents

초경질막 피복부재 및 그 제조방법(superhard film-coated member and method of manufacturing the same)

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Publication number
KR940703936A
KR940703936A KR1019940702363A KR19940702363A KR940703936A KR 940703936 A KR940703936 A KR 940703936A KR 1019940702363 A KR1019940702363 A KR 1019940702363A KR 19940702363 A KR19940702363 A KR 19940702363A KR 940703936 A KR940703936 A KR 940703936A
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KR
South Korea
Prior art keywords
diamond
substrate
cemented carbide
superhard
coating member
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Application number
KR1019940702363A
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English (en)
Other versions
KR100193546B1 (ko
Inventor
야스시 마쓰모토
가즈히토 니시무라
히로시 도미모리
아키오 하라
Original Assignee
아키오 하라
오사카 다이아몬드 고교 가부시키가이샤
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Publication of KR940703936A publication Critical patent/KR940703936A/ko
Application granted granted Critical
Publication of KR100193546B1 publication Critical patent/KR100193546B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

본 발명은 다이아몬드 등의 초경질막과 초경합금기재가 강고하게 부착한 초경질막 피복부재와 그 제조방법을 제공하는 것이다.
본 발명은 초경합금기재를 열처리하여 기재표면상에 기재표면부에 가까운 기재중의 결합금속을 반구상으로 석출시킨다. 이 석출물을 그대로 남기던지 또는 그 일부 혹은 전부를 제거하고, 이 표면상에 화학적기상 합성법에 의하여 다이아몬드 및/또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 것이다.
이 석출물의 생성에 의하여 초경질막과 초경합금기재의 부착력은 현저하게 강하게 되고, 두꺼운 막의 형성이 가능하게 된다.

Description

초경질막 피복부재 및 그 제조방법(SUPERHARD FILM-COATED MEMBER AND METHOD OF MANUFACTURING THE SAME)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 실시예에 있어서 열처리 및 막을 형성하는데 사용한 열필라멘트 CVD장치의 개략단면도이며, 제 2 도는 초경합금기재의 입자구조를 나타내는 표면부의 2차 전자현미경 조직이며, 제 3 도는 제 2 도를 설명하기 위한 모식도이다.

Claims (8)

  1. 초경합금기재의 표면에 다이아몬드 및/또는 다이아몬드 모양 탄소로 이루어지는 초경질막을 형성하여 구성되는 부재에 있어서, 이 기재는 기재표면에서 30㎛의 범위내에 경질상 입자간의 간격이 원기재의 그것보다 협소하고 결합상 금속의 함유량이 적은 부분을 지니는 것을 특징으로 하는 초경질막 피복부재.
  2. 제 1 항에 있어서, 이 막은 기재표면의 계면에서 막두께의 1/2 이하의 범위에 있어서, 막 가운데 초경합금기재의 결합상 금속을 함유하여 이루어지는 것을 특징으로 하는 초경질막 피복부재.
  3. 제 1 항 또는 제 2 항에 있어서, 초경질막 표면은 연마되어 있는 것을 특징으로 하는 초경질막 피복부재.
  4. 초경합금기재표면에 열처리를 하고, 이 기재표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물을 생성하는 공정을 거친후 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
  5. 제 4 항에 있어서, 탄소원자가 존재하는 분위기 중에서 초경합금기재표면에 열처리를 시행하고, 이 표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물 및 탄소를 주성분으로 하는 퇴적물을 생성시키고, 이 표면상에 생긴 퇴적물을 제거하든가 또는 다시 석출물의 일부 또는 전부를 제거한 뒤, 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
  6. 제 5 항에 있어서, 열처리와 퇴적물 또는 퇴적물 및 석출물의 제거를 2회 이상 행하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
  7. 제 4 항에 있어서, 수소원자가 존재하는 분위기 중 또는 저진공중에서 초경합금기재에 열처리를 시행하고, 이 기재표면상에 결합상 금속을 주성분으로 하는 반구상의 석출물을 생성하는 공정을 거친 뒤, 동 표면상에 화학적기상합성법에 의하여 다이아몬드 및 또는 다이아몬드 모양 탄소를 생성하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
  8. 제 4, 5, 6항 또는 7 항에 있어서, 초경합금의 열처리를 열필라멘트 CVD장치로 행하는 것을 특징으로 하는 초경질막 피복부재의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940702363A 1992-12-08 1993-12-08 초경질막 피복부재 및 그 제조방법 KR100193546B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP92-351955 1992-12-08
JP91-351955 1992-12-08
JP35195592 1992-12-08
PCT/JP1993/001779 WO1994013852A1 (en) 1992-12-08 1993-12-08 Superhard film-coated material and method of producing the same

Publications (2)

Publication Number Publication Date
KR940703936A true KR940703936A (ko) 1994-12-12
KR100193546B1 KR100193546B1 (ko) 1999-06-15

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Country Status (5)

Country Link
US (1) US5955212A (ko)
EP (1) EP0628642B1 (ko)
KR (1) KR100193546B1 (ko)
DE (1) DE69330052T2 (ko)
WO (1) WO1994013852A1 (ko)

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Also Published As

Publication number Publication date
EP0628642A4 (en) 1997-02-26
DE69330052D1 (de) 2001-04-26
EP0628642B1 (en) 2001-03-21
DE69330052T2 (de) 2001-11-15
WO1994013852A1 (en) 1994-06-23
EP0628642A1 (en) 1994-12-14
US5955212A (en) 1999-09-21
KR100193546B1 (ko) 1999-06-15

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