DE69330052D1 - Ultrahartes folienbeschichtetes material und dessen herstellung - Google Patents

Ultrahartes folienbeschichtetes material und dessen herstellung

Info

Publication number
DE69330052D1
DE69330052D1 DE69330052T DE69330052T DE69330052D1 DE 69330052 D1 DE69330052 D1 DE 69330052D1 DE 69330052 T DE69330052 T DE 69330052T DE 69330052 T DE69330052 T DE 69330052T DE 69330052 D1 DE69330052 D1 DE 69330052D1
Authority
DE
Germany
Prior art keywords
ultra
production
hard film
covered material
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69330052T
Other languages
English (en)
Other versions
DE69330052T2 (de
Inventor
Yasushi Matsumoto
Kazuhito Nishimura
Hiroshi Tomimori
Akio Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Diamond Industrial Co Ltd
Original Assignee
Osaka Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Diamond Industrial Co Ltd filed Critical Osaka Diamond Industrial Co Ltd
Application granted granted Critical
Publication of DE69330052D1 publication Critical patent/DE69330052D1/de
Publication of DE69330052T2 publication Critical patent/DE69330052T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
DE69330052T 1992-12-08 1993-12-08 Ultrahartes folienbeschichtetes material und dessen herstellung Expired - Fee Related DE69330052T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35195592 1992-12-08
PCT/JP1993/001779 WO1994013852A1 (en) 1992-12-08 1993-12-08 Superhard film-coated material and method of producing the same

Publications (2)

Publication Number Publication Date
DE69330052D1 true DE69330052D1 (de) 2001-04-26
DE69330052T2 DE69330052T2 (de) 2001-11-15

Family

ID=18420773

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69330052T Expired - Fee Related DE69330052T2 (de) 1992-12-08 1993-12-08 Ultrahartes folienbeschichtetes material und dessen herstellung

Country Status (5)

Country Link
US (1) US5955212A (de)
EP (1) EP0628642B1 (de)
KR (1) KR100193546B1 (de)
DE (1) DE69330052T2 (de)
WO (1) WO1994013852A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5674620A (en) * 1994-08-11 1997-10-07 Saint-Gobain/Norton Industrial Ceramics Corporation Diamond-coated composite cutting tool and method of making
AT411070B (de) * 1996-03-25 2003-09-25 Electrovac Verfahren zur herstellung eines substrates mit einer polykristallinen diamantschicht
DE69823495T2 (de) * 1997-02-05 2005-04-07 Cemecon Ag Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material
DE19859905C2 (de) * 1998-01-27 2002-05-23 Gfd Ges Fuer Diamantprodukte M Diamantschneidwerkzeug
KR100305315B1 (ko) * 1999-04-09 2001-09-13 박호군 다이아몬드 막이 코팅된 절삭공구 및 그 제조방법
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
DE10130590B4 (de) * 2001-05-16 2011-06-30 Widia GmbH, 45145 Verbundwerkstoff und Verfahren zu dessen Herstellung
JP2004529270A (ja) * 2001-05-16 2004-09-24 ヴィディア ゲゼルシャフト ミット ベシュレンクテル ハフツング 複合材料及びその製造方法
BR0103109B1 (pt) * 2001-06-08 2011-09-06 ferramenta de corte e processo de formação desta.
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
JP4420901B2 (ja) * 2003-07-31 2010-02-24 株式会社アライドマテリアル ダイヤモンド膜被覆工具およびその製造方法
EP2152926A4 (de) * 2007-04-27 2012-01-25 Taegu Tec Ltd Beschichtete hartmetallschneidwerkzeuge und verfahren zur vorbehandlung und beschichtung zur herstellung von hartmetallschneidwerkzeugen
JP5817116B2 (ja) * 2010-02-03 2015-11-18 東洋製罐株式会社 ダイヤモンド表面の研磨方法
US9926622B2 (en) * 2015-11-12 2018-03-27 Uchicago Argonne, Llc Methods for forming pitting resistant carbon coating
CN106011782B (zh) * 2016-07-21 2018-07-03 新疆红电金铸耐磨材料有限责任公司 一种超高硬度耐磨薄膜及其生产方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152363A (ja) * 1984-08-21 1986-03-15 Mitsubishi Metal Corp サ−メツト部材の表面に人工ダイヤモンド皮膜を析出形成する方法
JPH0672302B2 (ja) * 1985-09-19 1994-09-14 住友電気工業株式会社 硬質炭素膜被覆超硬合金の製造法
JPH0791651B2 (ja) * 1986-04-24 1995-10-04 三菱マテリアル株式会社 ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ
JPS63100182A (ja) 1986-04-24 1988-05-02 Mitsubishi Metal Corp ダイヤモンド被覆炭化タングステン基超硬合金製切削工具チツプ
JPS631280A (ja) 1986-06-20 1988-01-06 Matsushita Electric Ind Co Ltd 帰還型くし形フイルタ
JPH088466B2 (ja) 1986-07-15 1996-01-29 松下電器産業株式会社 シンセサイザ受信機のロ−タリ−選局方式
JPH01212491A (ja) 1988-02-20 1989-08-25 Mitsumi Electric Co Ltd チップ部品の製造法
JPH01242491A (ja) * 1988-03-24 1989-09-27 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金部品及びその製造方法
US4988421A (en) * 1989-01-12 1991-01-29 Ford Motor Company Method of toughening diamond coated tools
JP2554941B2 (ja) * 1989-11-01 1996-11-20 東洋鋼鈑株式会社 ダイヤモンド被覆超硬合金部材の製造方法
JP2734157B2 (ja) * 1990-01-24 1998-03-30 三菱マテリアル株式会社 ダイヤモンド被覆炭化タングステン基超硬合金切削工具の製造法
JP3191878B2 (ja) * 1991-02-21 2001-07-23 三菱マテリアル株式会社 気相合成ダイヤモンド被覆切削工具の製造法

Also Published As

Publication number Publication date
US5955212A (en) 1999-09-21
EP0628642A1 (de) 1994-12-14
KR940703936A (ko) 1994-12-12
DE69330052T2 (de) 2001-11-15
EP0628642B1 (de) 2001-03-21
KR100193546B1 (ko) 1999-06-15
WO1994013852A1 (en) 1994-06-23
EP0628642A4 (de) 1997-02-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee