KR940021421A - 판상 알루미나 - Google Patents
판상 알루미나 Download PDFInfo
- Publication number
- KR940021421A KR940021421A KR1019940002406A KR19940002406A KR940021421A KR 940021421 A KR940021421 A KR 940021421A KR 1019940002406 A KR1019940002406 A KR 1019940002406A KR 19940002406 A KR19940002406 A KR 19940002406A KR 940021421 A KR940021421 A KR 940021421A
- Authority
- KR
- South Korea
- Prior art keywords
- plate
- alumina
- less
- powder
- shaped
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C01F7/021—After-treatment of oxides or hydroxides
- C01F7/022—Classification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C01F7/021—After-treatment of oxides or hydroxides
- C01F7/023—Grinding, deagglomeration or disintegration
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
- C09C1/62—Metallic pigments or fillers
- C09C1/64—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/51—Particles with a specific particle size distribution
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
본 발명은 응집물, 분립 또는 단편이 거의 없는 신규한 판상 알루미나에 관한 것이다. 본 발명의 생성물은 극소전자 공학 적용용 기판 웨이퍼의 래핑에 매우 유리하다. 이러한 생성물을 제조하는 방법에 또한 기술되어 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 따른, 필수적으로 분립 또는 단편이 없는 일정한 크기의 자형(euhedral) 판상 입자를 도시한 것이다.
제3A도, 제3B도 및 제3C도는 고품질 생성물을 제조하는 대표적인 선행기술의 방법의 입자 크기 분포를 도시한 것으로, 이들은 제1도에 도시된 생성물과 유사한 생성물로서 확인된 생성물에 상응하며, 제3A도의 비교새성물은 표1에 A-15 및 B-15로 나타낸다.
제4도는 본 발명에 따른 판상 알루미나 래핑 분말의 대표적인 입자 크기 분포를 도시한 것이다(제3도 및 제4도는 컬터 멀티사이저 Accu Comp 계수기를 사용하여 수득한다).
Claims (11)
- 직경이 3 내지 20μ인 개별적인 자형(euheral) 판상 알루미나 알갱이로 필수적으로 이루어지며 실질적으로 응집물과 분립이 없으며 판상 알루미나 입자 단편을 약 5% 미만으로 함유하는 판상 알루미나 분말.
- 제1항에 있어서, D50/D94비가 1.4미만인 판상 알루미나 분말.
- 제2항에 있어서, D3/D50비가 1.6미만인 판상 알루미나 분말.
- 제1항에 있어서, 입자의 90% 이상의 크기가 6 내지 12μ인 판상 알루미나 분말.
- D50이 9μ이고 12μ를 초과하는 입자가 없으며 벌크 밀도가 1.35g/㏄ 미만인 판상 알루미나 분말.
- D50이 6 내지 12μ이고 D3/D50이 1.6미만이고 D50/D94가 1.4미만인 개별적인 자형 판상 입자로 필수적으로 이루어지며 분립과 응집물이 실질적으로 없으며 이러한 판상 알루미나 입자 단편을 5% 미만으로 함유하는 판상 알루미나 분말.
- a) 응집물 약 10 내지 약 30중량%를 함유하는 판상 알루미나 생성물을 제공하고; b) 판상 알루미나 생성물을 굵은 분획과 6μ보다 작은 입자를 함유하는 미세분획으로 분류하고; c) 분말의 입자 크기가 약 6 내지 약 12의 D50에 도달할 때까지 굵은 분획을 습식 밀링하고; d) 입자 크기가 3μ 미만인 분획을 분리하여 제거함을 포함하여, 판상 알루미나 래핑 분말을 제조하는 방법.
- 제7항에 있어서, 응집물 함유 판상 알루미나가, 응집물의 백분율이 목적하는 정도로 감소될 때까지 갓 제조되고 하소된 판상 알루미나 생성물을 가볍게 건식 밀링함으로써 수득되는 방법.
- 제7항에 있어서, 습식 밀링 작업 후에 6μ 미만의 입자를 제거하는 방법.
- 제7항에 있어서, 습식 밀링 작업 후에 습식 밀링 작업에서 방출된 알루미나의 수중 슬러리를 방치시켜 수층과 슬러리층을 형성하고 분립성분을 수층과 함께 제거하는 작업으로 분립의 적어도 일부를 분리하는 방법.
- 제10항에 있어서, 습식 밀링 후의 분립 분리공정이 밀링된 슬러리를 분리하여 건조시키고 건조 도중에 형성된 엉성한 응집물을 가볍게 밀링하여 부순 후에 공기 분리시키는 단계를 포함하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/028,079 | 1993-03-08 | ||
US08/028,079 US5277702A (en) | 1993-03-08 | 1993-03-08 | Plately alumina |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940021421A true KR940021421A (ko) | 1994-10-17 |
KR100278251B1 KR100278251B1 (ko) | 2001-01-15 |
Family
ID=21841457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940002406A KR100278251B1 (ko) | 1993-03-08 | 1994-02-08 | 판상 알루미나 및 이의 제조방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5277702A (ko) |
JP (1) | JPH07315833A (ko) |
KR (1) | KR100278251B1 (ko) |
CN (1) | CN1092381A (ko) |
DE (1) | DE4407086C2 (ko) |
MY (1) | MY110409A (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100679611B1 (ko) * | 2005-07-20 | 2007-02-08 | 주식회사 코델 | 판상 알파알루미나의 제조방법 |
KR20210032003A (ko) * | 2018-08-10 | 2021-03-23 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 복수의 연마 입자를 포함하는 조성물 및 이의 사용 방법 |
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US4820498A (en) * | 1986-09-16 | 1989-04-11 | Lanxide Technology Company, Lp | Method for producing substantially pure alumina material |
US5196180A (en) * | 1988-10-13 | 1993-03-23 | Ici Australia Operations Proprietary Limited | Ceramic powders |
US4952389A (en) * | 1989-09-15 | 1990-08-28 | Norton Company | Alumina particles |
JPH06104816B2 (ja) * | 1990-02-09 | 1994-12-21 | 日本研磨材工業株式会社 | 焼結アルミナ砥粒及びその製造方法 |
-
1993
- 1993-03-08 US US08/028,079 patent/US5277702A/en not_active Expired - Fee Related
-
1994
- 1994-02-08 MY MYPI94000295A patent/MY110409A/en unknown
- 1994-02-08 KR KR1019940002406A patent/KR100278251B1/ko not_active IP Right Cessation
- 1994-02-08 CN CN94100796A patent/CN1092381A/zh active Pending
- 1994-03-03 DE DE4407086A patent/DE4407086C2/de not_active Expired - Fee Related
- 1994-03-08 JP JP6062140A patent/JPH07315833A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100679611B1 (ko) * | 2005-07-20 | 2007-02-08 | 주식회사 코델 | 판상 알파알루미나의 제조방법 |
KR20210032003A (ko) * | 2018-08-10 | 2021-03-23 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 복수의 연마 입자를 포함하는 조성물 및 이의 사용 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN1092381A (zh) | 1994-09-21 |
KR100278251B1 (ko) | 2001-01-15 |
DE4407086C2 (de) | 1998-08-27 |
JPH07315833A (ja) | 1995-12-05 |
MY110409A (en) | 1998-04-30 |
US5277702A (en) | 1994-01-11 |
DE4407086A1 (de) | 1994-09-15 |
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