KR940001660B1 - 고열전도성 착색 질화 알루미늄 소결체 및 그 제조방법 - Google Patents

고열전도성 착색 질화 알루미늄 소결체 및 그 제조방법 Download PDF

Info

Publication number
KR940001660B1
KR940001660B1 KR1019910013553A KR910013553A KR940001660B1 KR 940001660 B1 KR940001660 B1 KR 940001660B1 KR 1019910013553 A KR1019910013553 A KR 1019910013553A KR 910013553 A KR910013553 A KR 910013553A KR 940001660 B1 KR940001660 B1 KR 940001660B1
Authority
KR
South Korea
Prior art keywords
weight
parts
aluminum nitride
less
terms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019910013553A
Other languages
English (en)
Korean (ko)
Other versions
KR920004311A (ko
Inventor
고오헤이 시모다
다까오 마에다
고오이찌 소가베
마사야 미야께
Original Assignee
스미또모덴끼고교 가부시끼가이샤
나까하라 쯔네오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16582526&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR940001660(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 스미또모덴끼고교 가부시끼가이샤, 나까하라 쯔네오 filed Critical 스미또모덴끼고교 가부시끼가이샤
Publication of KR920004311A publication Critical patent/KR920004311A/ko
Application granted granted Critical
Publication of KR940001660B1 publication Critical patent/KR940001660B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
KR1019910013553A 1990-08-07 1991-08-06 고열전도성 착색 질화 알루미늄 소결체 및 그 제조방법 Expired - Fee Related KR940001660B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP210022 1981-12-28
JP2210022A JP2943275B2 (ja) 1990-08-07 1990-08-07 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
JP90-210022 1990-08-07

Publications (2)

Publication Number Publication Date
KR920004311A KR920004311A (ko) 1992-03-27
KR940001660B1 true KR940001660B1 (ko) 1994-02-28

Family

ID=16582526

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910013553A Expired - Fee Related KR940001660B1 (ko) 1990-08-07 1991-08-06 고열전도성 착색 질화 알루미늄 소결체 및 그 제조방법

Country Status (8)

Country Link
US (1) US5147832A (cg-RX-API-DMAC7.html)
EP (1) EP0470501B1 (cg-RX-API-DMAC7.html)
JP (1) JP2943275B2 (cg-RX-API-DMAC7.html)
KR (1) KR940001660B1 (cg-RX-API-DMAC7.html)
CA (1) CA2048498C (cg-RX-API-DMAC7.html)
DE (1) DE69118613T2 (cg-RX-API-DMAC7.html)
SG (1) SG43219A1 (cg-RX-API-DMAC7.html)
TW (1) TW235291B (cg-RX-API-DMAC7.html)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US5273700A (en) * 1990-10-29 1993-12-28 Sumitomo Electric Industries Ltd. Aluminum nitride sintered body and process for producing the same
TW280836B (cg-RX-API-DMAC7.html) * 1992-09-21 1996-07-11 Sumitomo Electric Industries
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
US5773377A (en) * 1993-12-22 1998-06-30 Crystalline Materials Corporation Low temperature sintered, resistive aluminum nitride ceramics
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
US5677253A (en) * 1995-03-30 1997-10-14 Kyocera Corporation Wafer holding member
DE69635908T2 (de) * 1995-08-03 2006-11-23 Ngk Insulators, Ltd., Nagoya Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
DE60005234T2 (de) * 1999-03-17 2004-07-01 Asahi Techno Glass Corp., Funabashi Aluminiumnitridsinterprodukt und Verfahren zu seiner Herstellung
JP4447750B2 (ja) * 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
US6884972B2 (en) 1999-12-09 2005-04-26 Ibiden Co., Ltd. Ceramic plate for a semiconductor producing/inspecting apparatus
JP4493264B2 (ja) * 2001-11-26 2010-06-30 日本碍子株式会社 窒化アルミニウム質セラミックス、半導体製造用部材および耐蝕性部材
CN100545082C (zh) * 2004-03-29 2009-09-30 电气化学工业株式会社 氮化铝粉末及氮化铝烧结体
US7799269B2 (en) * 2007-09-25 2010-09-21 Osram Sylvania Inc. Method of sintering AIN under a methane-containing nitrogen atmosphere
JP5180034B2 (ja) * 2008-11-21 2013-04-10 日本碍子株式会社 窒化アルミニウム焼結体、その製法及びそれを用いた静電チャック
CN109075128B (zh) * 2016-06-10 2023-02-28 日本电气硝子株式会社 气密封装体的制造方法及气密封装体
KR102108023B1 (ko) * 2018-09-28 2020-05-07 포항공과대학교 산학협력단 이작용성 나노자임 및 이의 용도

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
EP0207465B1 (en) * 1985-06-28 1992-04-15 Kabushiki Kaisha Toshiba Aluminum nitride sintered body and preparation thereof
US4843038A (en) * 1986-11-13 1989-06-27 Narumi China Corporation Black sintered body of aluminum nitride and process for producing the same
JPS63233072A (ja) * 1986-11-14 1988-09-28 旭硝子株式会社 ＣａＯ含有耐火物
US4833108A (en) * 1987-03-28 1989-05-23 Narumi China Corporation Sintered body of aluminum nitride
JPS63310772A (ja) * 1987-06-10 1988-12-19 Shinko Electric Ind Co Ltd 窒化アルミニウム焼結体
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
KR920003226B1 (ko) * 1988-05-16 1992-04-24 스미도모덴기고오교오 가부시기가이샤 질화알루미늄소결체와 그것을 사용한 회로기판 및 반도체패키지
EP0437449A1 (en) * 1988-09-02 1991-07-24 THE DOW CHEMICAL COMPANY (a Delaware corporation) Increasing aluminum nitride thermal conductivity via pre-densification treatment
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
KR920004311A (ko) 1992-03-27
DE69118613T2 (de) 1996-11-21
SG43219A1 (en) 1997-10-17
JP2943275B2 (ja) 1999-08-30
CA2048498C (en) 1995-12-05
CA2048498A1 (en) 1992-02-08
JPH0492867A (ja) 1992-03-25
DE69118613D1 (de) 1996-05-15
US5147832A (en) 1992-09-15
EP0470501A2 (en) 1992-02-12
EP0470501B1 (en) 1996-04-10
EP0470501A3 (en) 1992-09-02
TW235291B (cg-RX-API-DMAC7.html) 1994-12-01

Similar Documents

Publication Publication Date Title
JP2943275B2 (ja) 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
EP0452871B1 (en) Heat conductive colored aluminum nitride sintered body and method of preparing the same
EP0263662B1 (en) Yttrium oxide ceramic body
US4778778A (en) Process for the production of sintered aluminum nitrides
KR960016070B1 (ko) 질화알루미늄 소결체 및 그 제조방법
KR960006248B1 (ko) 질화알루미늄소결체와 그의 제조방법
EP0267623B1 (en) Black sintered body of aluminum nitride and process for producing the same
KR970009989B1 (ko) 질화 알루미늄체 및 유리질 소결제를 사용하여 질화 알루미늄체를 형성시키는 방법
KR940000730B1 (ko) 질화알루미늄 소결체 및 그 제조법
US3769049A (en) Transparent sintered alumina and process for preparing the same
JP2899893B2 (ja) 窒化アルミニウム質焼結体およびその製造方法
KR950006209B1 (ko) 질화알루미늄 소결체 및 그 제조방법
US5126293A (en) Light-shielding a delta n sintered body and method of manufacturing the same
JP2807430B2 (ja) 窒化アルミニウム焼結体およびその製造方法
JP2742600B2 (ja) 窒化アルミニウム質焼結体およびその製造方法
US5250478A (en) Aluminum nitride sintered body and process for preparation thereof
JP2773416B2 (ja) 窒化アルミニウム焼結体およびその製造方法
KR940002198A (ko) 질화알루미늄기판의 제조방법
JP2704194B2 (ja) 黒色窒化アルミニウム焼結体
JPS63277572A (ja) 窒化アルミニウム焼結体の製造方法
JPS63277571A (ja) 高熱伝導性窒化アルミニウム焼結体の製造方法
JPH0678195B2 (ja) 窒化アルミニウム焼結体
JPH04164863A (ja) 窒化アルミニウム焼結体及びその製造方法
JPH0446060A (ja) 着色窒化アルミニウム焼結体及びその製造方法
JPH02217362A (ja) 窒化アルミニウム焼結体の製造法

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

St.27 status event code: A-2-2-Q10-Q13-nap-PG1605

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 14

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 15

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 16

FPAY Annual fee payment

Payment date: 20100223

Year of fee payment: 17

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 17

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20110301

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20110301

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000