KR930018608A - 전해 컨덴서의 전극용 플레이트 및 그 제조방법 - Google Patents

전해 컨덴서의 전극용 플레이트 및 그 제조방법 Download PDF

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KR930018608A
KR930018608A KR1019930001894A KR930001894A KR930018608A KR 930018608 A KR930018608 A KR 930018608A KR 1019930001894 A KR1019930001894 A KR 1019930001894A KR 930001894 A KR930001894 A KR 930001894A KR 930018608 A KR930018608 A KR 930018608A
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plate
aluminum
electrolytic capacitor
electrode plate
crystal
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알레그레 프랑시스
벤말레크 모하메트
가리엘 엠마누엘
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마르셀 방라에르
사트마 소시에떼 아노님
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/048Electrodes or formation of dielectric layers thereon characterised by their structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
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Abstract

본 발명은 전해 컨덴서의 양극이나 음극을 제조하기 위한 플레이트 및 그 제조방법에 관한 것으로써, 본 발명에 따른 플레이트는 알루미늄의 50%이상이 산화된 상태이고 금속 알루미늄 결정을 포함하는 알루미늄 산화물의 다공성 매트릭스 형태인 결정립 덩어리로 구성된 알루미늄기 증착층으로 코팅된 전기 전도 기판의 형태이고, 이 플레이트는 산화 대기중에서 기판위에 일루미늄을 증발시켜 증착층을 형성하는 방법으로 제조하는 것을 특징으로 하며, 본 발명에 따르면 증가된 충전용량을 갖는 플레이트를 제조하는 것이 가능하고 따라서 컨덴서의 크기가 감소되는 것을 특징으로 한다.

Description

전해·컨덴서의 전극용 플레이트 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 플레이트 제조용 장치의 수직 단면도(한면에만 증착)

Claims (14)

  1. 두께 100~10000nm이고 특히 알루미늄을 포함하는 증착층으로 한면 또는 양면이 증발-축합에 의해 코팅되어 있거나 거칠게 되었는 전기 전도기판의 형태인 전해 컨덴서의 전극용 플레이트에 있어서, 상기 증착층이 산화물 형태인 알루미늄을 50%이상 포함하고 있고 결정립 덩어리로 되어있으며, 상기 덩어리는 결정립내에 임의로 배열된 금속 알루미늄 결정을 포함하는 산화 알루미늄의 다공성 매트릭스를 형성하는 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  2. 제1항에 있어서, 덩어리의 평균직경이 10~10000nm인것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  3. 제1항에 있어서, 결정립의 평균직경이 10~50nm인 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  4. 제1항에 있어서, 결정의 직경은 결정이 들어있는 결정립의 결정보다 작고, 결정의 직경은 평균 1~20nm인 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  5. 제1항에 있어서, 결정립은 그 사이의 공동을 연결하는 교차 결합된 네트워크를 허용하는 방식으로 배열되어 있는 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  6. 제1항에 있어서, 공동의 부피는 증착층 부피의 20~50%인 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  7. 제1항에 있어서, 증착층은 인 산화물로 부터 유리된 이온 또한 포함하는 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  8. 제1항에 있어서, 전기 전도체가 알루미늄, 그 합금 및 알루미늄으로 코팅된 플라스틱 물질로 구성된 그룹에서 선택된는 것을 특징으로 하는 전해 컨덴서의 전극용 플레이트.
  9. 증착영역의 압력은 2.8~0.3Pa인 챔버내, 산소 또는 산화물을 함유하는 고정되거나 움직이는 기판의 한쪽면 또는 양쪽면에 알루미늄을 증발시킨후 축합하고 고화시키며, 초당 0.03~0.2μm로 두께가 증가하는 속도로 실시하는 것을 특징으로 하는 제1항에 따른 플레이트의 제조방법.
  10. 제9항에 있어서, 기판의 한 지점에서 축합단계 유지시간이 100초 이하인것을 특징으로 하는 플레이트의 제조방법.
  11. 제9항에 있어서, 한 면에만 증착하는 경우 0.002~0.04MPa의 압력과 1~100ℓ/h의 흐름속도로 산화 공기가 챔버에 주입되는 것을 특징으로 하는 플레이트의 제조방법.
  12. 제9항에 있어서, 주울 효과, 유도, 전자충돌, 전기용접 중 한가지 방법을 사용하여 알루미늄을 가열해서 알루미늄 증발을 실시하는 것을 특징으로 하는 플레이트의 제조방법.
  13. 제9항에 있어서, 플레이트를 화학적 또는 전기화학전 안정화 처리와 형성처리중 한가지 이상을 실시하는 것을 특징으로 하는 플레이트의 제조방법.
  14. 제13항에 있어서, 안정화가 인 산화물로부터 유리된 이온 존재하에서 실시되는 것을 특징으로 하는 플레이트 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930001894A 1992-02-14 1993-02-12 전해 컨덴서의 전극용 플레이트 및 그 제조방법 KR970004301B1 (ko)

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Application Number Priority Date Filing Date Title
FR9201899A FR2688092B1 (fr) 1992-02-14 1992-02-14 Feuille pour electrode de condensateur electrolytique et procede de fabrication.
FR9201899 1992-02-14

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KR930018608A true KR930018608A (ko) 1993-09-22
KR970004301B1 KR970004301B1 (ko) 1997-03-26

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US (2) US5431971A (ko)
EP (1) EP0556136B1 (ko)
JP (1) JPH0715864B2 (ko)
KR (1) KR970004301B1 (ko)
DE (1) DE69301939T2 (ko)
FR (1) FR2688092B1 (ko)
TW (1) TW215966B (ko)

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EP0556136B1 (fr) 1996-03-27
TW215966B (ko) 1993-11-11
DE69301939D1 (de) 1996-05-02
US5482743A (en) 1996-01-09
US5431971A (en) 1995-07-11
JPH0715864B2 (ja) 1995-02-22
EP0556136A1 (fr) 1993-08-18
DE69301939T2 (de) 1996-09-19
KR970004301B1 (ko) 1997-03-26
FR2688092B1 (fr) 1994-04-15
JPH0644977A (ja) 1994-02-18
FR2688092A1 (fr) 1993-09-03

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