KR920017945A - 전자산업용 과산화수소 정제방법 - Google Patents

전자산업용 과산화수소 정제방법 Download PDF

Info

Publication number
KR920017945A
KR920017945A KR1019920002555A KR920002555A KR920017945A KR 920017945 A KR920017945 A KR 920017945A KR 1019920002555 A KR1019920002555 A KR 1019920002555A KR 920002555 A KR920002555 A KR 920002555A KR 920017945 A KR920017945 A KR 920017945A
Authority
KR
South Korea
Prior art keywords
hydrogen peroxide
purifying
purifying hydrogen
distillation
purification method
Prior art date
Application number
KR1019920002555A
Other languages
English (en)
Other versions
KR100198481B1 (ko
Inventor
호닉 헬무트
가이겔 시그프리드
Original Assignee
원본미기재
페록시드-캐미 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 페록시드-캐미 게엠베하 filed Critical 원본미기재
Publication of KR920017945A publication Critical patent/KR920017945A/ko
Application granted granted Critical
Publication of KR100198481B1 publication Critical patent/KR100198481B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
    • C01B15/01—Hydrogen peroxide
    • C01B15/013—Separation; Purification; Concentration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor

Abstract

내용 없음

Description

전자산업용 과산화수소 정제방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (6)

  1. 증류방법으로 미리 정제한 과산화수소에다 적은 양의 킬레이트화합물을 첨가하고 비이온교환 수지 흡착제와 접촉시키는 것을 특징으로 하는 반도체 기술에 사용할 수 있도록 아주 적은 양의 무기와 유기 불순물, 또는 무기나 유기 불순물을 함유하고 있는 과산화수소의 순도를 더 높이는 과산화수소 정제방법.
  2. 제1항에 있어서, 보로시리케이트 유리관에 증류로 미리 정제한 과산화수소를 넣는 것을 특징으로 하는 과산화수소 정제방법.
  3. 제1항에 있어서, 킬레이트 화합물을을 5에서 20㎎/ℓ가 되게 과산화수소에다 넣는 것을 특징으로 하는 과산화수소 정제방법.
  4. 제1항에 있어서, 수지 흡착제로는 스틸렌과 디비닐벤질을 기초로 하는 공중합물을 사용하는 것을 특징으로 하는 과산화수소 정제방법.
  5. 제4항에 있어서, 무게비로 88-92%의 스틸렌과 8-12%의 디비닐벤질을 기초로 한 공중합체를 사용하는 것을 특징으로 하는 과산화수소 정제방법.
  6. 상기 전 청구한 중 어느 한 항에 있어서, 수지 흡착제를 충진한 관을 통해서 과산화수소를 유입시키는 것을 특징으로 하는 과산화수소 정제방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920002555A 1991-03-07 1992-02-20 전자산업용 과산화수소 정제방법 KR100198481B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4107244.8 1991-03-07
DE4107244A DE4107244A1 (de) 1991-03-07 1991-03-07 Verfahren zur reinigung von wasserstoffperoxid fuer die mikroelektronik

Publications (2)

Publication Number Publication Date
KR920017945A true KR920017945A (ko) 1992-10-21
KR100198481B1 KR100198481B1 (ko) 1999-06-15

Family

ID=6426653

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920002555A KR100198481B1 (ko) 1991-03-07 1992-02-20 전자산업용 과산화수소 정제방법

Country Status (7)

Country Link
US (1) US5232680A (ko)
EP (1) EP0502466B1 (ko)
JP (1) JPH04325406A (ko)
KR (1) KR100198481B1 (ko)
AT (1) ATE128950T1 (ko)
CA (1) CA2062435C (ko)
DE (2) DE4107244A1 (ko)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4240370C1 (de) * 1992-12-01 1994-05-11 Degussa Verfahren zur Verringerung des Kohlenstoffgehalts wäßriger Wasserstoffperoxidlösungen
DE69406187T2 (de) * 1993-05-28 1998-02-12 Mitsubishi Gas Chemical Co Verfahren zur Reinigung von Wasserstoffperoxyd
US5614165A (en) * 1993-05-28 1997-03-25 Mitsubishi Gas Chemical Co., Inc. Process for purification of hydrogen peroxide
TW305821B (ko) * 1993-09-13 1997-05-21 Mitsubishi Gas Chemical Co
US5670028A (en) * 1994-11-22 1997-09-23 Ube Industries, Ltd. Process for preparing high purity hydrogen peroxide aqueous solution
FI97538C (fi) * 1995-02-15 1997-01-10 Kemira Chemicals Oy Menetelmä vetyperoksidin oleellisesti puhtaan vesiliuoksen valmistamiseksi
JP3715371B2 (ja) * 1996-04-08 2005-11-09 三菱化学株式会社 過酸化水素水の精製方法
JP3874036B2 (ja) * 1996-10-09 2007-01-31 三菱瓦斯化学株式会社 精製過酸化水素水溶液の製造方法
FR2763932B1 (fr) 1997-05-27 1999-07-30 Chemoxal Sa Procede de preparation d'une solution ultra-pure de peroxyde par echange ionique dans des lits a rapports h/d definis
FR2763930B1 (fr) * 1997-05-27 1999-07-30 Chemoxal Sa Procede de preparation d'une solution ultra-pure de peroxyde d'hydrogene par echange ionique sequence : anionique- cationique-anionique-cationique
DE19926725A1 (de) * 1999-06-11 2000-12-14 Basf Ag Verfahren zur Umsetzung organischer Verbindungen mit Wasserstoffperoxid
FR2800366B1 (fr) * 1999-10-27 2002-05-24 Air Liquide Procede de purification de solutions aqueuses de peroxyde d'hydrogene
DE10026363A1 (de) * 2000-05-27 2001-11-29 Merck Patent Gmbh Verfahren zur Aufreinigung von Wasserstoffperoxidlösungen
US7722847B2 (en) * 2002-09-30 2010-05-25 Evonik Degussa Gmbh Aqueous hydrogen peroxide solutions and method of making same
EP1403219A1 (en) † 2002-09-30 2004-03-31 Degussa AG Novel aqueous hydrogen peroxide solutions
EP1762252A1 (en) * 2005-09-12 2007-03-14 SOLVAY (Société Anonyme) Aqueous solution suitable for the chemical sterilization of packaging materials, process for its preparation and its use
US8899556B2 (en) * 2007-11-15 2014-12-02 Lawrence Livermore National Security, Llc. Systems and methods for generation of hydrogen peroxide vapor
CN102706981B (zh) * 2012-06-20 2014-09-10 湘潭大学 一种用正相高效液相吸附色谱分析蒽醌法生产双氧水工作液的定量分析方法
EP2857351A1 (en) * 2013-10-02 2015-04-08 Solvay SA Process for manufacturing a purified aqueous hydrogen peroxide solution
KR102421905B1 (ko) * 2013-10-02 2022-07-18 솔베이(소시에떼아노님) 정제된 과산화수소 수용액의 제조 방법
CA3108081A1 (en) 2018-08-02 2020-02-06 Evonik Corporation Process for preparing a stabilized aqueous hydrogen peroxide solution
CN112533865A (zh) 2018-08-02 2021-03-19 赢创有限公司 经聚合物稳定的过氧化氢水溶液和相关方法
WO2022272257A1 (en) * 2021-06-23 2022-12-29 Evonik Corporation A process for sterilization treatment using a residue-free hydrogen peroxide

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3297404A (en) * 1957-07-08 1967-01-10 Du Pont Purification of hydrogen peroxide
US3012860A (en) * 1958-03-17 1961-12-12 Shell Oil Co Hydrogen peroxide purification
FR1539843A (fr) * 1967-08-01 1968-09-20 Oxysynthese Purification organique des solutions aqueuses de peroxyde d'hydrogène
JP2570308B2 (ja) * 1986-08-06 1997-01-08 三菱瓦斯化学株式会社 過酸化水素水溶液中の有機不純物を除去する方法
JPH01153509A (ja) * 1987-12-11 1989-06-15 Tokai Denka Kogyo Kk 高純度過酸化水素の製造方法
DE3822348A1 (de) * 1988-07-01 1990-01-04 Siemens Ag Reinigungsverfahren fuer wasserstoffperoxid
US4999179A (en) * 1988-12-26 1991-03-12 Mitsubishi Gas Chemical Company, Inc. Method for purifying impure aqueous hydrogen peroxide solution
JP2643542B2 (ja) * 1990-06-14 1997-08-20 積水化学工業株式会社 熱可塑性ポリウレタンの製造方法

Also Published As

Publication number Publication date
CA2062435A1 (en) 1992-09-08
JPH04325406A (ja) 1992-11-13
EP0502466A1 (de) 1992-09-09
EP0502466B1 (de) 1995-10-11
ATE128950T1 (de) 1995-10-15
DE59203930D1 (de) 1995-11-16
US5232680A (en) 1993-08-03
CA2062435C (en) 2002-01-08
DE4107244A1 (de) 1992-09-10
KR100198481B1 (ko) 1999-06-15

Similar Documents

Publication Publication Date Title
KR920017945A (ko) 전자산업용 과산화수소 정제방법
KR970026899A (ko) 정제과산화수소수용액의 제조방법
KR920011904A (ko) 과산화수소의 제조방법
BR8903138A (pt) Processo de sintese direta para a producao seletiva de organo-halo-hidrossilanos,e composicao de silicio ativado para ser usada na sintese direta de organo-halo-hidrossilanos
BR9303436A (pt) Processo para purificar gas de alimentacao de alta pureza do grupo de helio contendo pelo menos um entre oxigenio,hidrogenio ou umidade,sistema de purificacao capaz de mudar ou inverter o fluxo da gas contaminado do grupo do helio,sistema de purificacao capaz de mudar ou inverter o fluxo de gas do grupo do helio e capaz de ser usado em um ponto de utilizacao de gas do grupo do helio de alta pureza
KR890000149A (ko) 실리카-결합된 칼슘 함유 지올라이트 a과립
KR840007532A (ko) 펠릿형 제올라이트 흡착제에 대한 기체 분리 카이네틱스를 향상시키는 방법
PE103799A1 (es) Procedimiento de purificacion de mesilato de alatrofloxacino
ES2062415T3 (es) Composiciones detergentes.
MY124849A (en) Organoboron waste stream treatment using hydrogen peroxide
DE3563067D1 (en) Lactulose purification process
ES2040684T3 (es) Metodo para la regeneracion de un adsorbente de tanino.
FI935356A0 (fi) Foerfarande foer foerminskning av kolhaltet i vattenloesningar av vaeteperoxid
KR860003845A (ko) 기체상 산성할로겐 화합물의 제거방법
MX172980B (es) Proceso para la purificacion de fluoruro de hidrogeno
ES2087383T3 (es) Procedimiento para la produccion de hidroxocobalamina.
KR880008829A (ko) 고순도 질소 제조방법 및 장치
ES2048858T3 (es) Perfeccionamientos en la extraccion por difusion del azucar de remolachas.
GB1401384A (en) Air and water pollution control
SU1662641A1 (ru) Способ очистки аргона
GB910130A (en) Diphenylamine purification process
KR870003939A (ko) 생수(生水)의 제조방법
IT1247961B (it) Procedimento per purificazione del perossido di idrogeno da anioni
JPS5241192A (en) Process for concentrating or storing ozone by adsorption
Akeroyd Teaching the Krebs Cycle

Legal Events

Date Code Title Description
N231 Notification of change of applicant
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee