KR920010308A - 집적회로 검사장치 - Google Patents

집적회로 검사장치 Download PDF

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Publication number
KR920010308A
KR920010308A KR1019910021004A KR910021004A KR920010308A KR 920010308 A KR920010308 A KR 920010308A KR 1019910021004 A KR1019910021004 A KR 1019910021004A KR 910021004 A KR910021004 A KR 910021004A KR 920010308 A KR920010308 A KR 920010308A
Authority
KR
South Korea
Prior art keywords
test
signal
integrated circuit
test signal
inspection device
Prior art date
Application number
KR1019910021004A
Other languages
English (en)
Other versions
KR950010412B1 (ko
Inventor
요시카즈 오가와
가즈히코 오하시
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
다케다이 마사다카
도시바 마이크로 일렉트로닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아오이 죠이치, 가부시키가이샤 도시바, 다케다이 마사다카, 도시바 마이크로 일렉트로닉스 가부시키가이샤 filed Critical 아오이 죠이치
Publication of KR920010308A publication Critical patent/KR920010308A/ko
Application granted granted Critical
Publication of KR950010412B1 publication Critical patent/KR950010412B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
    • H03K5/01—Shaping pulses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31922—Timing generation or clock distribution

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

내용 없음.

Description

집적회로 검사장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 1실시예에 따른 집적회로 검사장치의 주요부구성을 나타낸 도면,
제2도는 제1도에 나타낸 장치에 대한 검사신호의 파형을 나타낸 도면.

Claims (1)

  1. 피검사집적회로(3)의 입력단자로 인가되는 검사신호에 대응되는 소진폭의 검사소신호를 발생시키는 검사소신호발생수단(1)과, 이 검사소신호발생수단(1)으로부터 발생된 검사소신호를 설정된 전력의 검사신호로 증폭해서 이 증폭된 검사신호를 상기 피검사집적회로(3)의 입력단자로 인가하는 검사신호공급수단(2) 및, 이 검사신호공급수단(2)에 대해 전력공급을 제어함으로써 상기 검사신호공급수단(2)에 의해 증폭된 검사신호의 상승시간 및 하강시간을 각각 독립해서 지정된 값으로 설정제어하는 제어수단(7)으로 구성된 것을 특징으로 하는 집적회로 검사장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910021004A 1990-11-27 1991-11-23 집적회로 검사장치 KR950010412B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP90-320945 1990-11-27
JP2320945A JPH04191678A (ja) 1990-11-27 1990-11-27 集積回路検査装置

Publications (2)

Publication Number Publication Date
KR920010308A true KR920010308A (ko) 1992-06-26
KR950010412B1 KR950010412B1 (ko) 1995-09-16

Family

ID=18127043

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910021004A KR950010412B1 (ko) 1990-11-27 1991-11-23 집적회로 검사장치

Country Status (3)

Country Link
US (1) US5412258A (ko)
JP (1) JPH04191678A (ko)
KR (1) KR950010412B1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0661809A1 (en) * 1993-12-30 1995-07-05 STMicroelectronics S.A. A buffer stage for use with a current controlled oscillator
KR100200916B1 (ko) * 1995-11-16 1999-06-15 윤종용 웨이퍼 테스트 신호 발생기를 가지는 반도체 메모리 장치
KR100412589B1 (ko) * 1996-07-05 2004-04-06 마츠시타 덴끼 산교 가부시키가이샤 반도체 회로 시스템, 반도체 집적회로의 검사방법 및 그 검사계열의 생성방법
JP4241728B2 (ja) * 2003-05-15 2009-03-18 株式会社アドバンテスト 試験装置
JP5025638B2 (ja) * 2006-04-19 2012-09-12 株式会社アドバンテスト 信号出力装置、試験装置、およびプログラム
CN102369791B (zh) 2009-03-12 2013-11-13 大自达电线股份有限公司 多层配线基板的制造方法及通过该方法获得的多层配线基板
US8310252B2 (en) * 2009-10-26 2012-11-13 Hewlett-Packard Development Company, L.P. Testing a nonvolatile circuit element having multiple intermediate states

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4882506A (en) * 1986-09-17 1989-11-21 Advanced Micro Devices, Inc. Low voltage and low power detector circuits
US4812677A (en) * 1987-10-15 1989-03-14 Motorola Power supply control with false shut down protection
JPH01121779A (ja) * 1987-11-05 1989-05-15 Hitachi Electron Eng Co Ltd Ｉｃ試験装置
US4907230A (en) * 1988-02-29 1990-03-06 Rik Heller Apparatus and method for testing printed circuit boards and their components
US5095226A (en) * 1989-08-08 1992-03-10 Asahi Kogaku Kogyo Kabushiki Kaisha Device for operating charge transfer device with different power supply voltages

Also Published As

Publication number Publication date
US5412258A (en) 1995-05-02
KR950010412B1 (ko) 1995-09-16
JPH04191678A (ja) 1992-07-09

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E701 Decision to grant or registration of patent right
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