KR920010012A - 다결정 다이아몬드 공구 및 그 제조방법 - Google Patents

다결정 다이아몬드 공구 및 그 제조방법 Download PDF

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KR920010012A
KR920010012A KR1019910021051A KR910021051A KR920010012A KR 920010012 A KR920010012 A KR 920010012A KR 1019910021051 A KR1019910021051 A KR 1019910021051A KR 910021051 A KR910021051 A KR 910021051A KR 920010012 A KR920010012 A KR 920010012A
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diamond
tool
polycrystalline diamond
impurity content
impurity
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KR940004903B1 (ko
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케이이치로 다나베
나오지 후지모리
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구라우치 노리타카
스미토모 덴키 고교 가부시키가이샤
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/277—Diamond only using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/26—Deposition of carbon only
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S76/00—Metal tools and implements, making
    • Y10S76/12—Diamond tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

내용 없음

Description

다결정 다이아몬드 공구 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 다결정 다이아몬드 공구의 일례를 나타낸 개략 사시도.
제2도는 다결정 다이아몬드 공구의 제작공정을 나타낸 개략 사시도.
제3도는 다결정 다이아몬드 공구의 인선부분 단면도.

Claims (11)

  1. 공구모재와 다결정 다이아몬드로 구성되며, 공구인선의 모재면에 다결정 다이아몬드의 한면이 맞닿도록 고정하여 다이아몬드를 인선으로 만든 구조의 공구에 있어서, 다이아몬드의 두께가 40μm이상이며, 다이아몬드의 두께방향으로 불순물 함유량이 변화하고 다이아몬드의 상부 레이크면측의 불순물 함유량 X0(%)가 다이아몬드의 모재설치 고정면측의 불순물 함유량 Y0(%)보다도 작은 것(X0<Y0)을 특징으로 하는 다결정 다이아몬드 공구.
  2. 공구모재와 다결정 다이아몬드로 구성되며, 공구인선의 모재면에 다결정 다이아몬드의 한면이 맞닿도록 하여 고정하여, 다이아몬드를 인선으로 만든 구조의 공구에 있어서, 다이아몬드의 두께가 40μm이상이며, 다이아몬드의 두께방향으로 불순물 함유량이 변화하며 다이아몬드의 상부 레이크면에서 부터 평균 막두께의 30% 두께까지의 영역의 평균 불순물 함유량 X1(%)가 다이아몬드의 모재설치 고정면측에서부터 평균막두께의 30%두께까지 영역의 평균불순물 함유량 Y1(%)보다도 작은 것(X1<Y1)을 특징으로 하는 다결정 다이아몬드 공구.
  3. 제1항 또는 제2항에 있어서, 다이아몬드의 상부 레이크면측에서 부터 평균 막두께의 30%두께까지의 영역의 불순물 함유량 X1이 5%이하인 것을 특징으로 하는 다결정 다이아몬드 공구.
  4. 제1항 또는 제2항, 제3항중의 어느 한항에 있어서, 불순물 원소로서 적어도 결정질 다이아몬드 이외의 탄소성분(결정질 그라파이트, 비결정질 탄소막 등)을 포함하는 것을 특징으로 하는 다결정 다이아몬드 공구.
  5. 제1항 또는 제2항또는 제3항중의 어느 한항에 있어서, 불순물 원소로서 Si, B, Al, W, Mo, Co, Fe, Nb, Ta 및 이들의 탄화물, 산화물, 질화물을 포함하는 것을 특징으로 하는 다결정 다이아몬드 공구.
  6. 제1항, 제2항, 제3항 또는 제4항중의 어느 한항에 있어서, 불순물 원소로서 할로겐 또는 할로겐화물을 포함하는 것을 특징으로 하는 다결정 다이아몬드 공구.
  7. 제1항, 제2항, 제3항 또는 제4항중의 어느 한항에 있어서, 불순물 원소로서 주기율표의 금속, 반금속, 비금속 및 이들의 탄화물, 질화물, 산화물 중의 어느 한 종류 또는 2종류 이상의 분말체를 포함하는 것을 특징으로 하는 다결정 다이아몬드 공구.
  8. 적어도 탄소를 포함하는 가스를 원료가스로 하고, 불순물로서 할로겐 또는 할로겐화물, SiH4, Si2H6, B2H6, N2의 적어도 하나를 첨가하여 불순물 첨가량을 변화시키면서 화학적 기상퇴적법에 의해 다이아몬드막을 기재상에 형성하고, 기재를 제거한 후 이 다이아몬드막의 불순물 함유량이 많은 쪽을 공구모재면에 설치고정하고, 불순물 함유량이 적은쪽을 상부 레이크면으로 만든 것을 특징으로 하는 다결정 다이아몬드의 공구의 제조 방법.
  9. 적어도 탄소를 포함하는 가스로 원료가스를 하고, 불순물로서 주기율표의 금속, 반금속 및 이들의 탄화물, 질화물, 산화물 중의 어느 한 종류 또는 두종류 이상의 분말체를 이 첨가량을 변화시키면서 화학적 기상 퇴적법에 의해 다이아몬드막을 기재상에 형성하여 이 다이아몬드막의 불순물 함유량이 많은쪽을 공구모재면에 설치고정하고, 불순물 함유량이 적은쪽을 상부레이크 면으로 만든 것을 특징으로 하는 다결정 다이아몬드의 공구의 제조 방법.
  10. 제8항 또는는 제9항에 있어서, 다이아몬드를 성장시키는 기재가 W, Mo, Ta, Nb, Si, Sic, WC, W2C, Mo2C, TaC, Si3N4, AlN, Ti, TiC, Tin, B, BN, B4C, 다이아몬드, Al2O3, SiO2중의 어느 하나인 것을 특징으로 하는 다결정 다이아몬드 공구의 제조방법.
  11. 제8항 또는 제9항에 있어서, 원료가스에 희가스를 포함하고 있는 것을 특징으로 하는 다결정 다이아몬드 공구의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910021051A 1990-11-22 1991-11-22 다결정 다이아몬드 공구 및 그 제조방법 KR940004903B1 (ko)

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EP0487292A1 (en) 1992-05-27
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