KR920007355B1 - Ccd영상 소자의 구조 및 제조방법 - Google Patents
Ccd영상 소자의 구조 및 제조방법 Download PDFInfo
- Publication number
- KR920007355B1 KR920007355B1 KR1019900006730A KR900006730A KR920007355B1 KR 920007355 B1 KR920007355 B1 KR 920007355B1 KR 1019900006730 A KR1019900006730 A KR 1019900006730A KR 900006730 A KR900006730 A KR 900006730A KR 920007355 B1 KR920007355 B1 KR 920007355B1
- Authority
- KR
- South Korea
- Prior art keywords
- type
- region
- bccd
- smear
- photodiode
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 150000002500 ions Chemical class 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 238000005036 potential barrier Methods 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900006730A KR920007355B1 (ko) | 1990-05-11 | 1990-05-11 | Ccd영상 소자의 구조 및 제조방법 |
DE4115060A DE4115060C2 (de) | 1990-05-11 | 1991-05-08 | CCD-Bildsensor und Verfahren zu dessen Herstellung |
SU4895484/25A RU2025830C1 (ru) | 1990-05-11 | 1991-05-08 | Структура формирователя сигналов изображений на приборе, с зарядовой связью и способ изготовления формирователя сигналов изображения на приборе с зарядовой связью |
GB9109966A GB2245423B (en) | 1990-05-11 | 1991-05-10 | Structure and method for fabrication of a CCD image sensor |
FR9105703A FR2662852B1 (fr) | 1990-05-11 | 1991-05-10 | Structure et procede de fabrication d'un capteur d'images ccd. |
NL9100825A NL9100825A (nl) | 1990-05-11 | 1991-05-13 | Structuur en werkwijze voor de vervaardiging van een ccd-beeldsensor. |
JP3107229A JP2641809B2 (ja) | 1990-05-11 | 1991-05-13 | Ccd映像素子 |
US08/011,110 US5276341A (en) | 1990-05-11 | 1993-01-29 | Structure for fabrication of a CCD image sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900006730A KR920007355B1 (ko) | 1990-05-11 | 1990-05-11 | Ccd영상 소자의 구조 및 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910020919A KR910020919A (ko) | 1991-12-20 |
KR920007355B1 true KR920007355B1 (ko) | 1992-08-31 |
Family
ID=19298928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900006730A KR920007355B1 (ko) | 1990-05-11 | 1990-05-11 | Ccd영상 소자의 구조 및 제조방법 |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP2641809B2 (de) |
KR (1) | KR920007355B1 (de) |
DE (1) | DE4115060C2 (de) |
FR (1) | FR2662852B1 (de) |
GB (1) | GB2245423B (de) |
NL (1) | NL9100825A (de) |
RU (1) | RU2025830C1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100090189A (ko) * | 2009-02-05 | 2010-08-13 | 소니 주식회사 | 고체 촬상 장치, 고체 촬상 장치의 제조 방법, 고체 촬상 장치의 구동 방법, 전자 기기 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960002645B1 (ko) * | 1992-04-03 | 1996-02-24 | 엘지반도체주식회사 | 전하 전송장치 및 고체 촬상장치 |
KR0130959B1 (ko) * | 1992-06-03 | 1998-04-14 | 쓰지 하루오 | 고체촬상장치 및 그 제조방법 |
DE4329838B4 (de) * | 1993-09-03 | 2005-09-22 | Hynix Semiconductor Inc., Ichon | Festkörper-Bildsensor |
JP2003248097A (ja) | 2002-02-25 | 2003-09-05 | Konica Corp | 放射線画像変換パネル及び放射線画像変換パネルの製造方法 |
JP5375142B2 (ja) * | 2009-02-05 | 2013-12-25 | ソニー株式会社 | 固体撮像装置、固体撮像装置の駆動方法、及び電子機器 |
JP5375141B2 (ja) * | 2009-02-05 | 2013-12-25 | ソニー株式会社 | 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、及び電子機器 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0048480B1 (de) * | 1980-09-19 | 1985-01-16 | Nec Corporation | Halbleitender lichtelektrischer Wandler |
JPS5819080A (ja) * | 1981-07-27 | 1983-02-03 | Sony Corp | 固体撮像素子 |
JPH0614544B2 (ja) * | 1983-10-03 | 1994-02-23 | 松下電子工業株式会社 | 固体撮像装置の製造方法 |
JPS60169165A (ja) * | 1984-02-10 | 1985-09-02 | Hitachi Ltd | 固体撮像素子 |
JP2610010B2 (ja) * | 1984-02-29 | 1997-05-14 | ソニー株式会社 | 縦形オーバーフローイメージセンサー |
JPS6156583A (ja) * | 1984-08-27 | 1986-03-22 | Sharp Corp | 固体撮像装置 |
JPH07107928B2 (ja) * | 1986-03-25 | 1995-11-15 | ソニー株式会社 | 固体撮像装置 |
JP2573582B2 (ja) * | 1986-09-05 | 1997-01-22 | 日本電気株式会社 | 固体撮像子の製造方法 |
JPH07120774B2 (ja) * | 1986-12-05 | 1995-12-20 | 松下電子工業株式会社 | 固体撮像装置 |
JPH01207964A (ja) * | 1988-02-16 | 1989-08-21 | Oki Electric Ind Co Ltd | 固体撮像素子 |
-
1990
- 1990-05-11 KR KR1019900006730A patent/KR920007355B1/ko not_active IP Right Cessation
-
1991
- 1991-05-08 DE DE4115060A patent/DE4115060C2/de not_active Expired - Lifetime
- 1991-05-08 RU SU4895484/25A patent/RU2025830C1/ru active
- 1991-05-10 GB GB9109966A patent/GB2245423B/en not_active Expired - Lifetime
- 1991-05-10 FR FR9105703A patent/FR2662852B1/fr not_active Expired - Lifetime
- 1991-05-13 NL NL9100825A patent/NL9100825A/nl unknown
- 1991-05-13 JP JP3107229A patent/JP2641809B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100090189A (ko) * | 2009-02-05 | 2010-08-13 | 소니 주식회사 | 고체 촬상 장치, 고체 촬상 장치의 제조 방법, 고체 촬상 장치의 구동 방법, 전자 기기 |
Also Published As
Publication number | Publication date |
---|---|
DE4115060A1 (de) | 1991-12-19 |
KR910020919A (ko) | 1991-12-20 |
GB9109966D0 (en) | 1991-07-03 |
NL9100825A (nl) | 1991-12-02 |
GB2245423B (en) | 1994-02-02 |
FR2662852A1 (fr) | 1991-12-06 |
JP2641809B2 (ja) | 1997-08-20 |
JPH0774334A (ja) | 1995-03-17 |
DE4115060C2 (de) | 1997-07-31 |
RU2025830C1 (ru) | 1994-12-30 |
GB2245423A (en) | 1992-01-02 |
FR2662852B1 (fr) | 1996-12-27 |
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