NL9100825A - Structuur en werkwijze voor de vervaardiging van een ccd-beeldsensor. - Google Patents
Structuur en werkwijze voor de vervaardiging van een ccd-beeldsensor. Download PDFInfo
- Publication number
- NL9100825A NL9100825A NL9100825A NL9100825A NL9100825A NL 9100825 A NL9100825 A NL 9100825A NL 9100825 A NL9100825 A NL 9100825A NL 9100825 A NL9100825 A NL 9100825A NL 9100825 A NL9100825 A NL 9100825A
- Authority
- NL
- Netherlands
- Prior art keywords
- type
- region
- bccd
- image sensor
- photodiode
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 25
- 239000000758 substrate Substances 0.000 claims description 25
- 150000002500 ions Chemical class 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004071 soot Substances 0.000 claims 1
- 230000008569 process Effects 0.000 description 10
- 238000011109 contamination Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000005036 potential barrier Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000003471 anti-radiation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900006730A KR920007355B1 (ko) | 1990-05-11 | 1990-05-11 | Ccd영상 소자의 구조 및 제조방법 |
KR900006730 | 1990-05-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL9100825A true NL9100825A (nl) | 1991-12-02 |
Family
ID=19298928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL9100825A NL9100825A (nl) | 1990-05-11 | 1991-05-13 | Structuur en werkwijze voor de vervaardiging van een ccd-beeldsensor. |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP2641809B2 (de) |
KR (1) | KR920007355B1 (de) |
DE (1) | DE4115060C2 (de) |
FR (1) | FR2662852B1 (de) |
GB (1) | GB2245423B (de) |
NL (1) | NL9100825A (de) |
RU (1) | RU2025830C1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960002645B1 (ko) * | 1992-04-03 | 1996-02-24 | 엘지반도체주식회사 | 전하 전송장치 및 고체 촬상장치 |
KR0130959B1 (ko) * | 1992-06-03 | 1998-04-14 | 쓰지 하루오 | 고체촬상장치 및 그 제조방법 |
DE4329838B4 (de) * | 1993-09-03 | 2005-09-22 | Hynix Semiconductor Inc., Ichon | Festkörper-Bildsensor |
JP2003248097A (ja) | 2002-02-25 | 2003-09-05 | Konica Corp | 放射線画像変換パネル及び放射線画像変換パネルの製造方法 |
JP5375142B2 (ja) * | 2009-02-05 | 2013-12-25 | ソニー株式会社 | 固体撮像装置、固体撮像装置の駆動方法、及び電子機器 |
JP5375141B2 (ja) * | 2009-02-05 | 2013-12-25 | ソニー株式会社 | 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、及び電子機器 |
JP4752926B2 (ja) * | 2009-02-05 | 2011-08-17 | ソニー株式会社 | 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、電子機器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182768A (ja) * | 1984-02-29 | 1985-09-18 | Sony Corp | 縦形オ−バ−フロ−イメ−ジセンサ− |
EP0174133A2 (de) * | 1984-08-27 | 1986-03-12 | Sharp Kabushiki Kaisha | Festkörper-Bildsensor |
JPS6365668A (ja) * | 1986-09-05 | 1988-03-24 | Nec Corp | 固体撮像素子 |
JPS63142858A (ja) * | 1986-12-05 | 1988-06-15 | Matsushita Electronics Corp | 固体撮像装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0048480B1 (de) * | 1980-09-19 | 1985-01-16 | Nec Corporation | Halbleitender lichtelektrischer Wandler |
JPS5819080A (ja) * | 1981-07-27 | 1983-02-03 | Sony Corp | 固体撮像素子 |
JPH0614544B2 (ja) * | 1983-10-03 | 1994-02-23 | 松下電子工業株式会社 | 固体撮像装置の製造方法 |
JPS60169165A (ja) * | 1984-02-10 | 1985-09-02 | Hitachi Ltd | 固体撮像素子 |
JPH07107928B2 (ja) * | 1986-03-25 | 1995-11-15 | ソニー株式会社 | 固体撮像装置 |
JPH01207964A (ja) * | 1988-02-16 | 1989-08-21 | Oki Electric Ind Co Ltd | 固体撮像素子 |
-
1990
- 1990-05-11 KR KR1019900006730A patent/KR920007355B1/ko not_active IP Right Cessation
-
1991
- 1991-05-08 DE DE4115060A patent/DE4115060C2/de not_active Expired - Lifetime
- 1991-05-08 RU SU4895484/25A patent/RU2025830C1/ru active
- 1991-05-10 GB GB9109966A patent/GB2245423B/en not_active Expired - Lifetime
- 1991-05-10 FR FR9105703A patent/FR2662852B1/fr not_active Expired - Lifetime
- 1991-05-13 NL NL9100825A patent/NL9100825A/nl unknown
- 1991-05-13 JP JP3107229A patent/JP2641809B2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182768A (ja) * | 1984-02-29 | 1985-09-18 | Sony Corp | 縦形オ−バ−フロ−イメ−ジセンサ− |
EP0174133A2 (de) * | 1984-08-27 | 1986-03-12 | Sharp Kabushiki Kaisha | Festkörper-Bildsensor |
JPS6365668A (ja) * | 1986-09-05 | 1988-03-24 | Nec Corp | 固体撮像素子 |
JPS63142858A (ja) * | 1986-12-05 | 1988-06-15 | Matsushita Electronics Corp | 固体撮像装置 |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 010, no. 024 (E - 377) 30 January 1986 (1986-01-30) * |
PATENT ABSTRACTS OF JAPAN vol. 012, no. 287 (E - 643) 5 August 1988 (1988-08-05) * |
PATENT ABSTRACTS OF JAPAN vol. 012, no. 402 (E - 673) 25 October 1988 (1988-10-25) * |
Also Published As
Publication number | Publication date |
---|---|
DE4115060A1 (de) | 1991-12-19 |
KR910020919A (ko) | 1991-12-20 |
GB9109966D0 (en) | 1991-07-03 |
GB2245423B (en) | 1994-02-02 |
FR2662852A1 (fr) | 1991-12-06 |
KR920007355B1 (ko) | 1992-08-31 |
JP2641809B2 (ja) | 1997-08-20 |
JPH0774334A (ja) | 1995-03-17 |
DE4115060C2 (de) | 1997-07-31 |
RU2025830C1 (ru) | 1994-12-30 |
GB2245423A (en) | 1992-01-02 |
FR2662852B1 (fr) | 1996-12-27 |
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