KR920005395A - 광전장치 - Google Patents
광전장치 Download PDFInfo
- Publication number
- KR920005395A KR920005395A KR1019910015188A KR910015188A KR920005395A KR 920005395 A KR920005395 A KR 920005395A KR 1019910015188 A KR1019910015188 A KR 1019910015188A KR 910015188 A KR910015188 A KR 910015188A KR 920005395 A KR920005395 A KR 920005395A
- Authority
- KR
- South Korea
- Prior art keywords
- region
- semiconductor
- photovoltaic device
- semiconductor layer
- layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 claims 19
- 239000000758 substrate Substances 0.000 claims 7
- 230000005693 optoelectronics Effects 0.000 claims 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
- Photovoltaic Devices (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도(A) 및 제3도(B)는 각각 본 발명의 광전장치의 기본구조를 도시한 도면,
제4도(A) 및 제3도(B)는 각각 본 발명의 제1실시예에 의한 광전장치의 구조를 도시한 도면,
제5도는 제1실시예의 광전구조의 밴드갭에너지 차아트를 도시한 도면.
Claims (16)
- 광전영역으로서, 제1도전형의 반도체층의 일부분에 제2도전형의 제1영역을 선택적으로 설치하므로서 형성된 pn접합영역을 가진 상부유입형 광전 장치에 있어서, 상기 제1영역이 상기 반도체층의 일부분에 형성된 제2도전형의 제2영역에 의해 둘러싸여 있는 것을 특징으로 하는 광전장치.
- 제1항에 있어서, 상기 반도체층이 상기 반도체기판과 동일한 조성을 가지는 반도체의 결정성장에 의해 형성되는 것을 특징으로 하는 광전장치.
- 제1항에 있어서, 상기 반도체층은, 불순물의 농도가 상기 반도체 기판보다 낮은 복수개의 반도체층을 적층하여 형성되고, 상기 복수개의 반도체중 상기 반도체기판과 접촉하지 않는 적어도 한층은, 조성이 상기 반도체 기판과 상이한 것을 특징으로 하는 광전장치.
- 제3항에 있어서, 상기 반도체 기판은 n+형 InP(인듐-인)기판이며, 상기 반도체층은 n형 InP버퍼층과, n형 InGaAs(인듐-갈륨-비소)광흡수층과, n형 InP윈도층을 순차로 적층하여 형성된 것을 특징으로 하는 광전장치.
- 제2항에 있어서, 상기 제2영역과 상기 제1영역의 길이가 동일한 것을 특징으로 하는 광전장치.
- 제3항에 있어서, 상기 제2영역과 상기 제1영역의 길이가 동일한 것을 특징으로 하는 광전장치.
- 제2항에 있어서, 상기 제2영역의 깊이가 상기 제1영역보다 깊은 것을 특징으로 하는 광전장치.
- 제3항에 있어서, 상기 제2영역의 깊이가 상기 제1영역보다 깊은 것을 특징으로 하는 광전장치.
- 제5항에 있어서, 상기 제1영역과 상기 반도체층사이에는 역전압이 인가되는 것을 특징으로 하는 광전장치.
- 제6항에 있어서, 상기 제1영역과 상기 반도체층사이에는 역전압이 인가되는 것을 특징으로 하는 광전장치.
- 제7항에 있어서, 상기 제2영역상에는 전하유출전극이 형성되어 있는 것을 특징으로 하는 광전장치.
- 제5항에 있어서, 상기 제1영역을 제외한 상기 반도체의 상부면이 금속막으로 피복되어 있는 것을 특징으로 하는 광전장치.
- 제6항에 있어서, 상기 제1영역을 제외한 상기 반도체의 상부면이 금속막으로 피복되어 있는 것을 특징으로 하는 광전장치.
- 제5항에 있어서, 상기 제2영역상에 전하유출전극이 형성되어 있는 것을 특징으로 하는 광전장치.
- 제6항에 있어서, 상기 제2영역상에 전하유출전극이 형성되어 있는 것을 특징으로 하는 광전장치.
- 제8항에 있어서, 상기 제2영역상에 전하유출전극이 형성되어 있는 것을 특징으로 하는 광전장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP90-230206 | 1990-08-31 | ||
JP2230206A JPH04111477A (ja) | 1990-08-31 | 1990-08-31 | 受光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920005395A true KR920005395A (ko) | 1992-03-28 |
KR950003950B1 KR950003950B1 (ko) | 1995-04-21 |
Family
ID=16904238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910015188A KR950003950B1 (ko) | 1990-08-31 | 1991-08-31 | 수광소자 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5304824A (ko) |
EP (1) | EP0473198B1 (ko) |
JP (1) | JPH04111477A (ko) |
KR (1) | KR950003950B1 (ko) |
CA (1) | CA2050435C (ko) |
DE (1) | DE69128751T2 (ko) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3245838B2 (ja) * | 1992-02-03 | 2002-01-15 | 住友電気工業株式会社 | 半導体レーザ装置 |
US5542018A (en) * | 1990-08-31 | 1996-07-30 | Kuhara; Yoshiki | Semiconductor laser device making use of photodiode chip |
CA2119176C (en) * | 1993-03-19 | 1998-06-23 | Masahiro Kobayashi | Semiconductor light detecting device |
US5668395A (en) * | 1994-11-22 | 1997-09-16 | Northwestern University | Composition for InSB and GaAs thin film on silicon substrate for use in photodetectors |
JPH08204224A (ja) * | 1995-01-23 | 1996-08-09 | Sumitomo Electric Ind Ltd | 化合物半導体受光素子及びその製造方法 |
JPH09289333A (ja) * | 1996-04-23 | 1997-11-04 | Mitsubishi Electric Corp | 半導体受光素子 |
JP3436009B2 (ja) * | 1996-07-31 | 2003-08-11 | 住友電気工業株式会社 | 光半導体素子 |
CA2227804C (en) * | 1997-02-03 | 2002-10-01 | Yasushi Fujimura | Photodiode module and method of making same |
US6081020A (en) * | 1998-02-20 | 2000-06-27 | Lucent Technologies Inc. | Linear PIN photodiode |
US6326649B1 (en) * | 1999-01-13 | 2001-12-04 | Agere Systems, Inc. | Pin photodiode having a wide bandwidth |
JP2008066497A (ja) * | 2006-09-07 | 2008-03-21 | Sony Corp | 受光装置および受光装置の製造方法 |
JP5560818B2 (ja) | 2010-03-25 | 2014-07-30 | 住友電気工業株式会社 | 受光素子、受光素子アレイ、ハイブリッド型検出装置、光学センサ装置 |
WO2020121852A1 (ja) | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | 光検出装置 |
WO2020121851A1 (ja) * | 2018-12-12 | 2020-06-18 | 浜松ホトニクス株式会社 | 光検出装置 |
JP7454917B2 (ja) | 2018-12-12 | 2024-03-25 | 浜松ホトニクス株式会社 | 光検出装置 |
US11513002B2 (en) | 2018-12-12 | 2022-11-29 | Hamamatsu Photonics K.K. | Light detection device having temperature compensated gain in avalanche photodiode |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173276A (en) * | 1981-04-17 | 1982-10-25 | Nec Corp | Solid-state image pickup device |
JPS5833881A (ja) * | 1981-08-21 | 1983-02-28 | Mitsubishi Electric Corp | 光電変換装置 |
JPS60171768A (ja) * | 1984-02-17 | 1985-09-05 | Internatl Rectifier Corp Japan Ltd | プレ−ナ型半導体装置 |
JPS60182778A (ja) * | 1984-02-29 | 1985-09-18 | Fujitsu Ltd | 半導体受光装置 |
JPS6195580A (ja) * | 1984-10-17 | 1986-05-14 | Hitachi Ltd | 受光素子およびこの受光素子を内臓した光電子装置 |
JPH0799782B2 (ja) * | 1985-06-18 | 1995-10-25 | 株式会社ニコン | 半導体光検出装置 |
DE3650287T2 (de) * | 1985-09-24 | 1995-08-10 | Toshiba Kawasaki Kk | Halbleiter-Photodetektor mit einem zweistufigen Verunreinigungsprofil. |
US4819039A (en) * | 1986-12-22 | 1989-04-04 | American Telephone And Telegraph Co. At&T Laboratories | Devices and device fabrication with borosilicate glass |
JPS63187671A (ja) * | 1987-01-30 | 1988-08-03 | Furukawa Electric Co Ltd:The | 1.3μm帯半導体受光素子 |
JPS6428872A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Ltd | Semiconductor element for detecting radiation |
JPS6447081A (en) * | 1987-08-18 | 1989-02-21 | Toshiba Corp | Semiconductor photodetector |
JPH01262672A (ja) * | 1988-04-14 | 1989-10-19 | Sanyo Electric Co Ltd | Pinダイオード |
US4901153A (en) * | 1988-08-10 | 1990-02-13 | Seiko Instruments Inc. | Image sensor with reduced surface reflection interference |
-
1990
- 1990-08-31 JP JP2230206A patent/JPH04111477A/ja active Pending
-
1991
- 1991-08-30 CA CA002050435A patent/CA2050435C/en not_active Expired - Fee Related
- 1991-08-31 KR KR1019910015188A patent/KR950003950B1/ko not_active IP Right Cessation
- 1991-09-02 EP EP91114760A patent/EP0473198B1/en not_active Expired - Lifetime
- 1991-09-02 DE DE69128751T patent/DE69128751T2/de not_active Expired - Fee Related
-
1993
- 1993-04-08 US US08/050,720 patent/US5304824A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0473198A1 (en) | 1992-03-04 |
DE69128751D1 (de) | 1998-02-26 |
EP0473198B1 (en) | 1998-01-21 |
JPH04111477A (ja) | 1992-04-13 |
KR950003950B1 (ko) | 1995-04-21 |
US5304824A (en) | 1994-04-19 |
CA2050435C (en) | 1999-02-02 |
DE69128751T2 (de) | 1998-08-27 |
CA2050435A1 (en) | 1992-03-01 |
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