KR910000275B1 - 회전 시간 선택에 의한 내식막 형성 방법 - Google Patents

회전 시간 선택에 의한 내식막 형성 방법 Download PDF

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Publication number
KR910000275B1
KR910000275B1 KR1019840007779A KR840007779A KR910000275B1 KR 910000275 B1 KR910000275 B1 KR 910000275B1 KR 1019840007779 A KR1019840007779 A KR 1019840007779A KR 840007779 A KR840007779 A KR 840007779A KR 910000275 B1 KR910000275 B1 KR 910000275B1
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KR
South Korea
Prior art keywords
substrate
corrosion resistant
rpm
resistant material
rotational speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019840007779A
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English (en)
Korean (ko)
Other versions
KR850005097A (ko
Inventor
마사또 오까다
Original Assignee
호야 가부시끼가이샤
스즈끼 데쓰오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 호야 가부시끼가이샤, 스즈끼 데쓰오 filed Critical 호야 가부시끼가이샤
Publication of KR850005097A publication Critical patent/KR850005097A/ko
Application granted granted Critical
Publication of KR910000275B1 publication Critical patent/KR910000275B1/ko
Expired legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/136—Coating process making radiation sensitive element

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1019840007779A 1983-12-08 1984-12-08 회전 시간 선택에 의한 내식막 형성 방법 Expired KR910000275B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP????231933? 1983-12-08
JP58231933A JPS60123031A (ja) 1983-12-08 1983-12-08 レジスト塗布方法
JP231933 1983-12-08

Publications (2)

Publication Number Publication Date
KR850005097A KR850005097A (ko) 1985-08-21
KR910000275B1 true KR910000275B1 (ko) 1991-01-23

Family

ID=16931335

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019840007779A Expired KR910000275B1 (ko) 1983-12-08 1984-12-08 회전 시간 선택에 의한 내식막 형성 방법

Country Status (4)

Country Link
US (1) US4748053A (https=)
JP (1) JPS60123031A (https=)
KR (1) KR910000275B1 (https=)
CH (1) CH663912A5 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7674561B2 (en) 2003-09-29 2010-03-09 Hoya Corporation Mask blanks and method of producing the same

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950579A (en) * 1988-07-08 1990-08-21 Minnesota Mining And Manufacturing Company Optical disc recording medium having a microstructure-derived inhomogeneity or anisotropy
DE3837827A1 (de) * 1988-11-08 1990-05-10 Nokia Unterhaltungselektronik Verfahren und vorrichtung zum beschichten einer substratplatte fuer einen flachen anzeigeschirm
US5294257A (en) * 1991-10-28 1994-03-15 International Business Machines Corporation Edge masking spin tool
JP3280791B2 (ja) * 1994-02-17 2002-05-13 東京応化工業株式会社 塗膜形成方法
JP3824334B2 (ja) 1995-08-07 2006-09-20 東京応化工業株式会社 シリカ系被膜形成用塗布液及び被膜形成方法
US6379744B1 (en) * 1996-02-05 2002-04-30 Motorola, Inc. Method for coating an integrated circuit substrate
TW344097B (en) * 1996-04-09 1998-11-01 Tokyo Electron Co Ltd Photoresist treating device of substrate and photoresist treating method
US5773083A (en) * 1996-08-02 1998-06-30 Motorola, Inc. Method for coating a substrate with a coating solution
US5985363A (en) * 1997-03-10 1999-11-16 Vanguard International Semiconductor Method of providing uniform photoresist coatings for tight control of image dimensions
US5912049A (en) * 1997-08-12 1999-06-15 Micron Technology, Inc. Process liquid dispense method and apparatus
US6177133B1 (en) 1997-12-10 2001-01-23 Silicon Valley Group, Inc. Method and apparatus for adaptive process control of critical dimensions during spin coating process
JP2000082647A (ja) 1998-09-04 2000-03-21 Nec Corp レジスト膜の塗布方法及び塗布装置
US6391800B1 (en) 1999-11-12 2002-05-21 Motorola, Inc. Method for patterning a substrate with photoresist
WO2001046619A1 (en) * 1999-12-22 2001-06-28 Kim Seng Lim Waste combustion furnace by jangbochungsang and method thereof
JP4118585B2 (ja) * 2002-04-03 2008-07-16 Ｈｏｙａ株式会社 マスクブランクの製造方法
JP3890026B2 (ja) * 2003-03-10 2007-03-07 東京エレクトロン株式会社 液処理装置および液処理方法
TWI244120B (en) * 2003-03-28 2005-11-21 Hoya Corp Method of manufacturing a mask blank
US9104107B1 (en) 2013-04-03 2015-08-11 Western Digital (Fremont), Llc DUV photoresist process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226214A (en) * 1975-08-25 1977-02-26 Hitachi Ltd Method for coating resist
JPS5819350B2 (ja) * 1976-04-08 1983-04-18 富士写真フイルム株式会社 スピンコ−テイング方法
JPS6057774B2 (ja) * 1978-08-25 1985-12-17 株式会社日立製作所 論理演算型ディジタル圧伸器
JPS6053675B2 (ja) * 1978-09-20 1985-11-27 富士写真フイルム株式会社 スピンコ−テイング方法
JPS5750573A (en) * 1980-09-11 1982-03-25 Sanyo Electric Co Ltd Method for coating resist
SE514737C2 (sv) * 1994-03-22 2001-04-09 Sandvik Ab Belagt skärverktyg av hårdmetall

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7674561B2 (en) 2003-09-29 2010-03-09 Hoya Corporation Mask blanks and method of producing the same
KR101047646B1 (ko) * 2003-09-29 2011-07-07 호야 가부시키가이샤 마스크 블랭크 및 그 제조방법

Also Published As

Publication number Publication date
JPH0429215B2 (https=) 1992-05-18
JPS60123031A (ja) 1985-07-01
CH663912A5 (de) 1988-01-29
US4748053A (en) 1988-05-31
KR850005097A (ko) 1985-08-21

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