KR900012520A - 인쇄회로기판의 천공장치와 그 방법 - Google Patents

인쇄회로기판의 천공장치와 그 방법

Info

Publication number
KR900012520A
KR900012520A KR1019900000757A KR900000757A KR900012520A KR 900012520 A KR900012520 A KR 900012520A KR 1019900000757 A KR1019900000757 A KR 1019900000757A KR 900000757 A KR900000757 A KR 900000757A KR 900012520 A KR900012520 A KR 900012520A
Authority
KR
South Korea
Prior art keywords
circuit board
printed circuit
perforation device
perforation
printed
Prior art date
Application number
KR1019900000757A
Other languages
English (en)
Other versions
KR930002697B1 (ko
Inventor
쿠니오 아라이
야스히꼬 가나야
Original Assignee
히다찌 세이고 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히다찌 세이고 가부시기가이샤 filed Critical 히다찌 세이고 가부시기가이샤
Publication of KR900012520A publication Critical patent/KR900012520A/ko
Application granted granted Critical
Publication of KR930002697B1 publication Critical patent/KR930002697B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/0047—Drilling of holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • B23K2101/35—Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/12—Copper or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials
    • B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0313—Organic insulating material
    • H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0366—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement reinforced, e.g. by fibres, fabrics
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0388—Other aspects of conductors
    • H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09509—Blind vias, i.e. vias having one side closed
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09509—Blind vias, i.e. vias having one side closed
    • H05K2201/09518—Deep blind vias, i.e. blind vias connecting the surface circuit to circuit layers deeper than the first buried circuit layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0207—Partly drilling through substrate until a controlled depth, e.g. with end-point detection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Laser Beam Processing (AREA)
  • Drilling And Boring (AREA)
KR1019900000757A 1989-01-27 1990-01-23 인쇄회로기판의 천공장치와 그 방법 KR930002697B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP89-16157 1989-01-27
JP1016157A JPH02198193A (ja) 1989-01-27 1989-01-27 プリント基板の穴明け方法

Publications (2)

Publication Number Publication Date
KR900012520A true KR900012520A (ko) 1990-08-04
KR930002697B1 KR930002697B1 (ko) 1993-04-07

Family

ID=11908670

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900000757A KR930002697B1 (ko) 1989-01-27 1990-01-23 인쇄회로기판의 천공장치와 그 방법

Country Status (4)

Country Link
US (1) US5010232A (ko)
JP (1) JPH02198193A (ko)
KR (1) KR930002697B1 (ko)
DE (1) DE4002326A1 (ko)

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IT1240531B (it) * 1990-08-07 1993-12-17 Pluritec Italia Metodo e dispositivo di controllo della profondita' di lavorazione per una macchina utensile a controllo numerico
JPH07112113B2 (ja) * 1991-01-28 1995-11-29 松下電工株式会社 多層回路板のバイアホール加工方法
US5483100A (en) * 1992-06-02 1996-01-09 Amkor Electronics, Inc. Integrated circuit package with via interconnections formed in a substrate
JPH07336055A (ja) * 1994-06-06 1995-12-22 Hitachi Seiko Ltd レーザ加工方法及びその装置
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
US6043453A (en) * 1996-02-23 2000-03-28 Hitachi Via Mechanics Ltd. Apparatus for laser processing with a mechanical cutter
US7062845B2 (en) 1996-06-05 2006-06-20 Laservia Corporation Conveyorized blind microvia laser drilling system
WO1997046349A1 (en) * 1996-06-05 1997-12-11 Burgess Larry W Blind via laser drilling system
US6631558B2 (en) * 1996-06-05 2003-10-14 Laservia Corporation Blind via laser drilling system
DE69737991T2 (de) * 1996-11-20 2008-04-30 Ibiden Co., Ltd., Ogaki Laserbearbeitungsvorrichtung, verfahren und vorrichtung zur herstellung einer mehrschichtigen, gedruckten leiterplatte
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JPH11145581A (ja) * 1997-11-10 1999-05-28 Hitachi Seiko Ltd プリント基板の穴明け方法および装置
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TW503143B (en) 2000-10-06 2002-09-21 Hitachi Via Mechanics Ltd Method and apparatus for drilling printed wiring boards
TW532050B (en) * 2000-11-09 2003-05-11 Matsushita Electric Ind Co Ltd Circuit board and method for manufacturing the same
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US6804269B2 (en) * 2001-06-19 2004-10-12 Hitachi Via Mechanics, Ltd. Laser beam delivery system with trepanning module
US6884962B2 (en) * 2002-03-18 2005-04-26 Hitachi Via Mechanics, Ltd. Beam or wave front
US6909735B2 (en) * 2003-04-10 2005-06-21 Hitachi Via Mechanics, Ltd. System and method for generating and controlling multiple independently steerable laser beam for material processing
US20040251243A1 (en) * 2003-04-10 2004-12-16 Lizotte Todd E. System and method for generating and controlling multiple independently steerable laser beams for material processing
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ATE512743T1 (de) * 2007-11-23 2011-07-15 Siemens Ag Vorrichtung und verfahren zur bearbeitung von löchern
KR101026036B1 (ko) * 2008-04-10 2011-03-30 삼성전기주식회사 관통홀 형성 방법
US20100243617A1 (en) * 2009-03-26 2010-09-30 Electro Scientific Industries, Inc. Printed circuit board via drilling stage assembly
JP2010264508A (ja) * 2009-04-13 2010-11-25 Nippon Sharyo Seizo Kaisha Ltd 加工装置
CN102950386A (zh) * 2011-08-16 2013-03-06 悦虎电路(苏州)有限公司 一种线路板激光直接成孔后的孔顶悬铜解决方法
CN103167735B (zh) * 2011-12-12 2016-10-26 深南电路有限公司 带有台阶槽的pcb板加工方法及多层pcb板
CN103458626A (zh) * 2013-08-09 2013-12-18 北大方正集团有限公司 一种制作盲孔的方法以及装置
KR20150025245A (ko) * 2013-08-28 2015-03-10 삼성전기주식회사 인쇄회로기판용 동박 적층판 및 그의 제조방법
JP2015047621A (ja) * 2013-09-02 2015-03-16 三菱重工業株式会社 複合加工装置及び複合加工方法
CN104582302B (zh) * 2013-10-10 2017-11-21 北大方正集团有限公司 一种制作阶梯槽的方法和装置
WO2015084934A2 (en) * 2013-12-04 2015-06-11 Microlution Inc. Multi-station laser machine
CN104162583A (zh) * 2014-07-21 2014-11-26 苏州璟瑜自动化科技有限公司 带胶片感光对比检测与覆膜定位的冲孔系统
CN104625621A (zh) * 2014-12-15 2015-05-20 贵州黎阳航空动力有限公司 一种航空发动机用封严涨圈镀铬端面微孔加工方法
US10237983B2 (en) 2014-12-23 2019-03-19 Sanmina Corporation Method for forming hole plug
WO2016106428A1 (en) * 2014-12-23 2016-06-30 Sanmina Corporation Hole plug for thin laminate
CN104923620A (zh) * 2015-06-23 2015-09-23 苏州璟瑜自动化科技有限公司 基于热成像检测反馈调节的钣金冲孔装置
CN104923626A (zh) * 2015-06-24 2015-09-23 苏州璟瑜自动化科技有限公司 带胶片感光对比检测与覆膜定位的冲孔系统及方法
CN104923632A (zh) * 2015-06-25 2015-09-23 苏州璟瑜自动化科技有限公司 基于裂纹检测反馈的钣金冲孔装置及其方法
CN104942432B (zh) * 2015-07-14 2017-05-24 湖南科瑞特科技股份有限公司 全印制电子及印制电路激光成型和喷印一体机
CN105163499B (zh) * 2015-08-31 2018-04-13 北大方正集团有限公司 一种pcb板阶梯槽的制备方法
CN105592631A (zh) * 2015-12-18 2016-05-18 景旺电子科技(龙川)有限公司 一种金属基印制板背钻制作方法
CN105792526A (zh) * 2016-04-01 2016-07-20 广州兴森快捷电路科技有限公司 一种双面板的盲槽制作方法
CN112839443A (zh) * 2019-11-25 2021-05-25 深南电路股份有限公司 线路板及其制作方法
DE102022104052B4 (de) * 2022-02-21 2024-03-07 KSG GmbH Verfahren zum Herstellen einer Mehrlagen-Leiterplatte mit einer Sackloch-Kontaktierung
CN116390363B (zh) * 2023-06-02 2023-10-20 淄博芯材集成电路有限责任公司 基于镭射光圈直径及强度调整的hdi印刷电路板开窗方法
CN116437578B (zh) * 2023-06-13 2023-09-15 江油星联电子科技有限公司 一种印刷电路板生产用贯孔装置

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Also Published As

Publication number Publication date
DE4002326A1 (de) 1990-08-02
DE4002326C2 (ko) 1991-09-19
US5010232A (en) 1991-04-23
KR930002697B1 (ko) 1993-04-07
JPH02198193A (ja) 1990-08-06

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