KR900002324B1 - 반도체 시험장치 - Google Patents

반도체 시험장치 Download PDF

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Publication number
KR900002324B1
KR900002324B1 KR1019860002927A KR860002927A KR900002324B1 KR 900002324 B1 KR900002324 B1 KR 900002324B1 KR 1019860002927 A KR1019860002927 A KR 1019860002927A KR 860002927 A KR860002927 A KR 860002927A KR 900002324 B1 KR900002324 B1 KR 900002324B1
Authority
KR
South Korea
Prior art keywords
test
power supply
semiconductor
gnd
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860002927A
Other languages
English (en)
Korean (ko)
Other versions
KR870003393A (ko
Inventor
데쓰오 다다
히데시 마에노
Original Assignee
미쓰비시전기 주식회사
시끼모리야
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시전기 주식회사, 시끼모리야 filed Critical 미쓰비시전기 주식회사
Publication of KR870003393A publication Critical patent/KR870003393A/ko
Application granted granted Critical
Publication of KR900002324B1 publication Critical patent/KR900002324B1/ko
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1019860002927A 1985-09-20 1986-04-16 반도체 시험장치 Expired KR900002324B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP209418 1985-09-20
JP60209418A JPS6267474A (ja) 1985-09-20 1985-09-20 半導体試験装置

Publications (2)

Publication Number Publication Date
KR870003393A KR870003393A (ko) 1987-04-17
KR900002324B1 true KR900002324B1 (ko) 1990-04-11

Family

ID=16572548

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860002927A Expired KR900002324B1 (ko) 1985-09-20 1986-04-16 반도체 시험장치

Country Status (3)

Country Link
US (1) US4801871A (enExample)
JP (1) JPS6267474A (enExample)
KR (1) KR900002324B1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4928062A (en) * 1988-01-20 1990-05-22 Texas Instruments Incorporated Loading and accurate measurement of integrated dynamic parameters at point of contact in automatic device handlers
JPH02163898A (ja) * 1988-12-16 1990-06-25 Matsushita Refrig Co Ltd 伝言板自動販売機システム
US4989209A (en) * 1989-03-24 1991-01-29 Motorola, Inc. Method and apparatus for testing high pin count integrated circuits
US5124638A (en) * 1991-02-22 1992-06-23 Genrad, Inc. Automatic circuit tester employing a three-dimensional switch-matrix layout
JP2584908Y2 (ja) * 1991-03-25 1998-11-11 エルエスアイ・ロジック株式会社 プローバのアタッチメントボード
US5532983A (en) * 1992-12-30 1996-07-02 Intel Corporation Circuit design for point-to-point chip for high speed testing
US5854558A (en) * 1994-11-18 1998-12-29 Fujitsu Limited Test board for testing a semiconductor device and method of testing the semiconductor device
US5600257A (en) * 1995-08-09 1997-02-04 International Business Machines Corporation Semiconductor wafer test and burn-in
US5881121A (en) * 1997-02-13 1999-03-09 Cypress Semiconductor Corp. One-pin shift register interface
US5933019A (en) * 1997-03-05 1999-08-03 Depue; Clayton S. Circuit board testing switch
JP2001349925A (ja) * 2000-06-09 2001-12-21 Mitsubishi Electric Corp 半導体集積回路の検査装置および検査方法
DE10313872B3 (de) * 2003-03-21 2004-06-09 Infineon Technologies Ag Integrierte Schaltung mit einer Testschaltung
CN102043100B (zh) * 2009-10-09 2013-03-06 中芯国际集成电路制造(上海)有限公司 老化测试系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3496464A (en) * 1968-02-02 1970-02-17 Aai Corp Automatic circuit testing apparatus including impedance matched coaxial signal transmission systems
US4180203A (en) * 1977-09-30 1979-12-25 Westinghouse Electric Corp. Programmable test point selector circuit
US4168527A (en) * 1978-02-17 1979-09-18 Winkler Dean A Analog and digital circuit tester
US4275464A (en) * 1979-02-16 1981-06-23 Robertshaw Controls Company Universal self-diagnosing appliance control
JPS5692476A (en) * 1979-12-26 1981-07-27 Sony Corp Measuring device of ic
US4342958A (en) * 1980-03-28 1982-08-03 Honeywell Information Systems Inc. Automatic test equipment test probe contact isolation detection method
US4439858A (en) * 1981-05-28 1984-03-27 Zehntel, Inc. Digital in-circuit tester
US4635259A (en) * 1983-08-01 1987-01-06 Fairchild Semiconductor Corporation Method and apparatus for monitoring response signals during automated testing of electronic circuits
US4637020A (en) * 1983-08-01 1987-01-13 Fairchild Semiconductor Corporation Method and apparatus for monitoring automated testing of electronic circuits

Also Published As

Publication number Publication date
KR870003393A (ko) 1987-04-17
JPH0521431B2 (enExample) 1993-03-24
JPS6267474A (ja) 1987-03-27
US4801871A (en) 1989-01-31

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