KR890011045A - Tem시편의 제조방법 - Google Patents
Tem시편의 제조방법 Download PDFInfo
- Publication number
- KR890011045A KR890011045A KR1019870015501A KR870015501A KR890011045A KR 890011045 A KR890011045 A KR 890011045A KR 1019870015501 A KR1019870015501 A KR 1019870015501A KR 870015501 A KR870015501 A KR 870015501A KR 890011045 A KR890011045 A KR 890011045A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- tem specimen
- sio
- thick
- tem
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0095—Semiconductive materials
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Sampling And Sample Adjustment (AREA)
- Weting (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명에 의한 제조공정도.
Claims (1)
- 실리콘 기판에 10,000~20,000Å 두께의 SiO2을 성장시켜 막을 만든 후에 SiO2층위에 측정하고자 하는 금속 또는 합금을 200~1,000Å 두께로 입히고 이어서 HF 식각제를 사용하여 SiO2을 용해시켜 박막을 분리한 후 필요한 후처리를 하여서 되는 TEM 시편의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870015501A KR950000856B1 (ko) | 1987-12-31 | 1987-12-31 | Tem시편의 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870015501A KR950000856B1 (ko) | 1987-12-31 | 1987-12-31 | Tem시편의 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR890011045A true KR890011045A (ko) | 1989-08-12 |
| KR950000856B1 KR950000856B1 (ko) | 1995-02-02 |
Family
ID=19267781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019870015501A KR950000856B1 (ko) | 1987-12-31 | 1987-12-31 | Tem시편의 제조방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR950000856B1 (ko) |
-
1987
- 1987-12-31 KR KR1019870015501A patent/KR950000856B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR950000856B1 (ko) | 1995-02-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20090121 Year of fee payment: 15 |
|
| EXPY | Expiration of term |