JPS5567151A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5567151A JPS5567151A JP14035378A JP14035378A JPS5567151A JP S5567151 A JPS5567151 A JP S5567151A JP 14035378 A JP14035378 A JP 14035378A JP 14035378 A JP14035378 A JP 14035378A JP S5567151 A JPS5567151 A JP S5567151A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- semiconductor device
- pinhole
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To raise a humidity-resisting property, by making an anodic oxidation film on an electrode or wiring from itself just under a small hole of a protective film.
CONSTITUTION: When an aluminum electrode wiring 8 of a semiconductor device is coated with an SiO2 film 9 made by the CVD process, there is a pinhole 10' in the film 9. The aluminum wiring 8 is anodic-oxidized through the pinhole in a chemiclal liquid to produce an alumina film 11 on the wiring. The aluminum electrode wiring 8 is thus isolated from the atmosphere. Therefore, the wiring is not eroded due to reaction with a PSG film 7 at high temperature and humidity.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14035378A JPS5567151A (en) | 1978-11-14 | 1978-11-14 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14035378A JPS5567151A (en) | 1978-11-14 | 1978-11-14 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5567151A true JPS5567151A (en) | 1980-05-21 |
Family
ID=15266846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14035378A Pending JPS5567151A (en) | 1978-11-14 | 1978-11-14 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5567151A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5877083A (en) * | 1994-11-01 | 1999-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
-
1978
- 1978-11-14 JP JP14035378A patent/JPS5567151A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5877083A (en) * | 1994-11-01 | 1999-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
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