JPS5247689A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5247689A JPS5247689A JP12403375A JP12403375A JPS5247689A JP S5247689 A JPS5247689 A JP S5247689A JP 12403375 A JP12403375 A JP 12403375A JP 12403375 A JP12403375 A JP 12403375A JP S5247689 A JPS5247689 A JP S5247689A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- layer
- sio
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To coat the holes of SiO2 opened on a semiconductor substrate with a composite layer of an SiO2 layer and PSG layer and reopen the holes, thereby obtaining a good contact between the substrate and electrodes.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12403375A JPS5247689A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12403375A JPS5247689A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5247689A true JPS5247689A (en) | 1977-04-15 |
Family
ID=14875353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12403375A Pending JPS5247689A (en) | 1975-10-15 | 1975-10-15 | Process for production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5247689A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225653A (en) * | 1982-06-22 | 1983-12-27 | Mitsubishi Electric Corp | Semiconductor device |
-
1975
- 1975-10-15 JP JP12403375A patent/JPS5247689A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225653A (en) * | 1982-06-22 | 1983-12-27 | Mitsubishi Electric Corp | Semiconductor device |
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