JPS51122386A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS51122386A
JPS51122386A JP4632075A JP4632075A JPS51122386A JP S51122386 A JPS51122386 A JP S51122386A JP 4632075 A JP4632075 A JP 4632075A JP 4632075 A JP4632075 A JP 4632075A JP S51122386 A JPS51122386 A JP S51122386A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing
electrode
layers
sbustrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4632075A
Other languages
Japanese (ja)
Inventor
Toshihiko Ono
Ryoji Abe
Kazuo Tanaka
Kuniaki Makabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4632075A priority Critical patent/JPS51122386A/en
Publication of JPS51122386A publication Critical patent/JPS51122386A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To provide a suitable depth through-hole to expose the aimed electrode A1 layer in formation of semiconductor device of a multi-laminated-structure in which A1 electrode layers and insulator layers are piled up alternately on the Si sbustrate.
COPYRIGHT: (C)1976,JPO&Japio
JP4632075A 1975-04-18 1975-04-18 Manufacturing method of semiconductor device Pending JPS51122386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4632075A JPS51122386A (en) 1975-04-18 1975-04-18 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4632075A JPS51122386A (en) 1975-04-18 1975-04-18 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51122386A true JPS51122386A (en) 1976-10-26

Family

ID=12743859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4632075A Pending JPS51122386A (en) 1975-04-18 1975-04-18 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51122386A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175829A (en) * 1982-04-08 1983-10-15 Mitsubishi Electric Corp Semicoductor device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175829A (en) * 1982-04-08 1983-10-15 Mitsubishi Electric Corp Semicoductor device and manufacture thereof

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