JPS5240985A - Method of forming porous silicon layer - Google Patents
Method of forming porous silicon layerInfo
- Publication number
- JPS5240985A JPS5240985A JP11699375A JP11699375A JPS5240985A JP S5240985 A JPS5240985 A JP S5240985A JP 11699375 A JP11699375 A JP 11699375A JP 11699375 A JP11699375 A JP 11699375A JP S5240985 A JPS5240985 A JP S5240985A
- Authority
- JP
- Japan
- Prior art keywords
- silicon layer
- porous silicon
- forming porous
- type
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To form a P+ type layer between a P type Si substrate and an N type Si epitaxial layer deposited over the substrate and opposing to the top of the epitaxial layer, then contacting them as a drive-in thence making them porous thereby forming a deep porous Si layer of less expansion in cross direction.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11699375A JPS5240985A (en) | 1975-09-26 | 1975-09-26 | Method of forming porous silicon layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11699375A JPS5240985A (en) | 1975-09-26 | 1975-09-26 | Method of forming porous silicon layer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5240985A true JPS5240985A (en) | 1977-03-30 |
Family
ID=14700808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11699375A Pending JPS5240985A (en) | 1975-09-26 | 1975-09-26 | Method of forming porous silicon layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5240985A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879585A (en) * | 1972-01-24 | 1973-10-25 | ||
JPS48102988A (en) * | 1972-04-07 | 1973-12-24 | ||
JPS495282A (en) * | 1972-05-01 | 1974-01-17 |
-
1975
- 1975-09-26 JP JP11699375A patent/JPS5240985A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4879585A (en) * | 1972-01-24 | 1973-10-25 | ||
JPS48102988A (en) * | 1972-04-07 | 1973-12-24 | ||
JPS495282A (en) * | 1972-05-01 | 1974-01-17 |
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