KR880009777A - 유기질막을 절단하는 방법 - Google Patents

유기질막을 절단하는 방법 Download PDF

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Publication number
KR880009777A
KR880009777A KR1019880000959A KR880000959A KR880009777A KR 880009777 A KR880009777 A KR 880009777A KR 1019880000959 A KR1019880000959 A KR 1019880000959A KR 880000959 A KR880000959 A KR 880000959A KR 880009777 A KR880009777 A KR 880009777A
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KR
South Korea
Prior art keywords
needle
membrane
organic membrane
organic film
section
Prior art date
Application number
KR1019880000959A
Other languages
English (en)
Other versions
KR960016815B1 (ko
Inventor
도시오 가야
마고토 후지모토
Original Assignee
다케바야시 쇼오고
미쯔이 세끼유 가가꾸 고오교오 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다케바야시 쇼오고, 미쯔이 세끼유 가가꾸 고오교오 가부시끼가이샤 filed Critical 다케바야시 쇼오고
Publication of KR880009777A publication Critical patent/KR880009777A/ko
Application granted granted Critical
Publication of KR960016815B1 publication Critical patent/KR960016815B1/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
    • B29C67/0044—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00 for shaping edges or extremities
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/108—Flash, trim or excess removal

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

내용 없음.

Description

유기질막을 절단하는 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 바늘(1)을 페리클막(2)에 윗쪽으로부터 찔러서 통하게하거나 바늘끝에서 적하하는 유기용매로 천공하면서 바늘을 통하게하고, 페리클틀(3)의 측단면과 모세관현상이 생길수 있는 적절한 간그(clearance)을 가지고 곁붙여 이 바늘을 이동시켜서 틀에 연한 절단을 하도록한 제1의 실시예도.
제2도는 바늘(1)을 경사시켜 페리클막(2)에 통하게하여 바늘선단을 틀측단면에 적절한 간격을 두고 접근 또는 접촉시킨 상태로 틀측단면에 따라서 이동시켜 절단하도록한 제2의 실시예도.

Claims (3)

  1. 틀이나 기판상에 유기질의 막을 접착 내지 밀착시져서 이루어진 기구의 제조공정에 있어서, 주사바늘모양의 바늘을 틀측단면에 접촉 내지 접근시켜, 이 측단면에 따라서 이동시키면서 바늘에서 유기질의 막을 용해하는 유기용매를 주출함으로써 상기 막을 틀에 따라서 절단하게끔한것을 특징으로하는 유기질의 막을 절단하는 방법.
  2. 제1항에 있어서, 상기 유기질의 막이 페리클막임을 특징으로 하는 유기질의 막을 절단하는 방법.
  3. 제2항에 있어서, 상기 페리클막이 니트로셀룰로오스 또는 에틸셀룰로오스임을 특징으로하는 유기질의 막을 절단하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880000959A 1987-02-03 1988-02-03 유기질막을 절단하는 방법 KR960016815B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP?62-23750 1987-02-03
JP62-23750 1987-02-03
JP2375087A JPH0757528B2 (ja) 1987-02-03 1987-02-03 有機質の膜を切断する方法

Publications (2)

Publication Number Publication Date
KR880009777A true KR880009777A (ko) 1988-10-05
KR960016815B1 KR960016815B1 (ko) 1996-12-21

Family

ID=12118990

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880000959A KR960016815B1 (ko) 1987-02-03 1988-02-03 유기질막을 절단하는 방법

Country Status (8)

Country Link
US (1) US4797177A (ko)
EP (1) EP0277820B1 (ko)
JP (1) JPH0757528B2 (ko)
KR (1) KR960016815B1 (ko)
CN (1) CN1013837B (ko)
CA (1) CA1299072C (ko)
DE (1) DE3874160T2 (ko)
MY (1) MY102314A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203961A (en) * 1991-09-20 1993-04-20 Yen Yung Tsai Wet die cutter assembly and method
KR20000057324A (ko) 1996-12-16 2000-09-15 나까니시 히로유끼 펠리클의 제조 방법 및 펠리클 제조용 지그
JP4698517B2 (ja) * 2006-04-18 2011-06-08 日東電工株式会社 保護テープ剥離方法およびこれを用いた装置
JP5195082B2 (ja) * 2008-06-30 2013-05-08 セイコーエプソン株式会社 シート材の加工方法およびシート材加工装置
CN103158175B (zh) * 2013-03-15 2015-04-15 安泰（嘉兴）医疗用品有限公司 全自动灯把罩制作设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3447985A (en) * 1965-09-24 1969-06-03 Russell Seitz Method for machining fragile crystals
FR2386494A1 (fr) * 1977-04-04 1978-11-03 Saint Gobain Decoupe du verre feuillete
US4465550A (en) * 1982-06-16 1984-08-14 General Signal Corporation Method and apparatus for slicing semiconductor ingots
US4523974A (en) * 1983-02-14 1985-06-18 The Perkin-Elmer Corporation Method of fabricating a pellicle cover for projection printing system
JPS60130736A (ja) * 1983-12-19 1985-07-12 Fuji Photo Film Co Ltd ハロゲン化銀カラー反転感光材料
NL8403459A (nl) * 1984-11-13 1986-06-02 Philips Nv Werkwijze en inrichting voor het aanbrengen van een laag van fotogevoelig materiaal op een halfgeleiderschijf.

Also Published As

Publication number Publication date
MY102314A (en) 1992-05-28
EP0277820B1 (en) 1992-09-02
DE3874160D1 (de) 1992-10-08
JPH0757528B2 (ja) 1995-06-21
CN88100613A (zh) 1988-08-17
JPS63191619A (ja) 1988-08-09
CA1299072C (en) 1992-04-21
EP0277820A3 (en) 1989-09-06
US4797177A (en) 1989-01-10
KR960016815B1 (ko) 1996-12-21
DE3874160T2 (de) 1993-04-08
CN1013837B (zh) 1991-09-11
EP0277820A2 (en) 1988-08-10

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