KR880002669B1 - 주사형 전자현미경 또는 유사장치내의 대물렌즈를 제어하기 위한 방법 - Google Patents

주사형 전자현미경 또는 유사장치내의 대물렌즈를 제어하기 위한 방법 Download PDF

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Publication number
KR880002669B1
KR880002669B1 KR1019810003372A KR810003372A KR880002669B1 KR 880002669 B1 KR880002669 B1 KR 880002669B1 KR 1019810003372 A KR1019810003372 A KR 1019810003372A KR 810003372 A KR810003372 A KR 810003372A KR 880002669 B1 KR880002669 B1 KR 880002669B1
Authority
KR
South Korea
Prior art keywords
objective lens
excitation current
sample
focal length
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019810003372A
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English (en)
Korean (ko)
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KR830008389A (ko
Inventor
세쯔오 노리오까
Original Assignee
니혼덴시 가부시끼 가이샤
가세이다다오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼덴시 가부시끼 가이샤, 가세이다다오 filed Critical 니혼덴시 가부시끼 가이샤
Publication of KR830008389A publication Critical patent/KR830008389A/ko
Application granted granted Critical
Publication of KR880002669B1 publication Critical patent/KR880002669B1/ko
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
KR1019810003372A 1980-09-12 1981-09-10 주사형 전자현미경 또는 유사장치내의 대물렌즈를 제어하기 위한 방법 Expired KR880002669B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP55126812A JPS5750756A (en) 1980-09-12 1980-09-12 Objective lens current control method for scan type electron microscope
JP126812 1980-09-12
JP55126812 1980-09-12

Publications (2)

Publication Number Publication Date
KR830008389A KR830008389A (ko) 1983-11-18
KR880002669B1 true KR880002669B1 (ko) 1988-12-17

Family

ID=14944563

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019810003372A Expired KR880002669B1 (ko) 1980-09-12 1981-09-10 주사형 전자현미경 또는 유사장치내의 대물렌즈를 제어하기 위한 방법

Country Status (4)

Country Link
US (1) US4393309A (enExample)
JP (1) JPS5750756A (enExample)
KR (1) KR880002669B1 (enExample)
GB (1) GB2084837B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3428802A1 (de) * 1984-08-04 1986-02-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur steuerung des fokussierungszustandes eines abgelenkten elektronenstrahls
JPS61253756A (ja) * 1985-05-07 1986-11-11 Hitachi Ltd 走査形電子顕微鏡
GB8622976D0 (en) * 1986-09-24 1986-10-29 Trialsite Ltd Scanning electron microscopes
JPS63231856A (ja) * 1987-03-19 1988-09-27 Jeol Ltd 電子顕微鏡等の制御方法
US4845362A (en) * 1988-02-02 1989-07-04 North American Philips Corporation In situ differential imaging and method utilizing a scanning electron microscope
JPH01255142A (ja) * 1988-04-01 1989-10-12 Nichidenshi Tekunikusu:Kk 電子顕微鏡のオートフォーカス回路
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
JPH0766770B2 (ja) * 1989-03-10 1995-07-19 株式会社日立製作所 電子線照射装置
US5057689A (en) * 1989-09-20 1991-10-15 Matsushita Electric Industrial Co., Ltd. Scanning electron microscope and a method of displaying cross sectional profiles using the same
JP2685603B2 (ja) * 1989-10-20 1997-12-03 日本電子株式会社 電子線装置
JPH0582067A (ja) * 1991-09-20 1993-04-02 Jeol Ltd 対物レンズの励磁電流発生方式
FR2737785B1 (fr) * 1995-08-11 1997-10-17 Matra Mhs Procede et dispositif de positionnement d'un objet par rapport au point de focalisation d'un microscope
US6278114B1 (en) 1997-12-19 2001-08-21 Kabushiki Kaisha Toshiba Method and apparatus for measuring dimensions of a feature of a specimen
JP4121849B2 (ja) * 2002-12-26 2008-07-23 オリンパス株式会社 欠陥検査装置及び欠陥検査方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3715582A (en) * 1970-02-13 1973-02-06 Hitachi Ltd Method of and apparatus for attaining focusing following variation in magnification in electron microscope
US3842236A (en) * 1970-03-28 1974-10-15 Steigerwald Strahltech Process to control the movement of a workpiece with respect to a beam of a stock processing machine operating by means of controllable power irradiation
JPS55110044A (en) * 1979-02-16 1980-08-25 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam projector

Also Published As

Publication number Publication date
KR830008389A (ko) 1983-11-18
GB2084837B (en) 1984-03-14
JPS5750756A (en) 1982-03-25
GB2084837A (en) 1982-04-15
JPH0366777B2 (enExample) 1991-10-18
US4393309A (en) 1983-07-12

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