KR850003066A - 밀폐형 반환식 통으로부터의 약액 공급방법 및 장치 - Google Patents

밀폐형 반환식 통으로부터의 약액 공급방법 및 장치 Download PDF

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Publication number
KR850003066A
KR850003066A KR1019840006391A KR840006391A KR850003066A KR 850003066 A KR850003066 A KR 850003066A KR 1019840006391 A KR1019840006391 A KR 1019840006391A KR 840006391 A KR840006391 A KR 840006391A KR 850003066 A KR850003066 A KR 850003066A
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South Korea
Prior art keywords
liquid
chemical
container
return
monitoring
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KR1019840006391A
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English (en)
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KR930000225B1 (ko
Inventor
마사히로 야마자끼 (외 4)
Original Assignee
오오니시 사부로오 (외 1)
닛뽄 제온 가부시끼가이샤
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Priority claimed from JP19251483A external-priority patent/JPS6084136A/ja
Priority claimed from JP19251583A external-priority patent/JPS6084137A/ja
Application filed by 오오니시 사부로오 (외 1), 닛뽄 제온 가부시끼가이샤 filed Critical 오오니시 사부로오 (외 1)
Publication of KR850003066A publication Critical patent/KR850003066A/ko
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Publication of KR930000225B1 publication Critical patent/KR930000225B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/72—Devices for applying air or other gas pressure for forcing liquid to delivery point
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y10T137/314—Unitary mounting for gas pressure inlet and liquid outlet

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

내용 없음

Description

밀폐형 반환식 통으로부터의 약액 공급방법 및 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 공지의 밀폐형 반환식통의 개략적 측면도이고, 제2도는 반환식통체에 부착되어 있는 플랜지와 커플러를 보여주는 측면도이고, 제3도는 반환식통과 제조장치사이의 공지의 연결수단을 약시하는 예시도이고, 제4도는 본 발명의 약액공급방법을 수행하는 장치의 개력적 측단면도이고, 제5도는 감시조(monitortank)의 상부의 부분 측단면도이고.

Claims (4)

  1. 액면 가압수단을 사용하여 밀폐형 반환식(왕복식) 약액통으로부터 약액 처리공정에 약액을 공급하는 방법에 있어, 액면 가압수단이 장착된 감시조를 상기 반환식 약액통과 양액처리장치 사이에 배치하는 단계와 약액이 반환식 약액통으로부터 감시조내에 유입, 저류된 뒤 감시조내 약액의 액면을 항상 감시하면서 약액을 약액처리장치에 공급하는 단계와, 조내 약액의 액면이 소정위치 이하일 때 액면을 검출하여 반환식 약액통이 비었음을 경보하는 단계와, 반환식 약액통과 감시조 사이의 연결을 차단하고 액면 가압기체를 감시조내에 도입하여 약액을 감시조로부터 약액 처리장치에 계속 공급하며 이렇게 공급하는 동안에 빈 반환식 약액통을 액이한 새 반환식통으로 교환하는 단계가 있는 것을 특징으로 하는 밀폐형 반환식 통으로부터의 약액공급방법.
  2. 제1항에 있어서, 상기 감시조에 있는 약액의 낮아진 액면을 검출하는 단계. 이 검출을 바탕을 반환식 약액통과 감시조 사이에 연결을 차단하고 액면 가압기체의 반환식 약액통내로의 유입을 중지시키는 단계. 액면 가압기체를 감시조내에 도입하고 감시조로부터의 기체의 배출을 중지시켜 약액을 감시조에 공급하는 단계, 새 반환식 약액통의로의 교환이 완료한 뒤 반환식 약액통과 감시조간의 연결의 차단을 해제하고, 액면가압기체를 반환식통에 도입하고, 액면가압기체의 감시조내로의 고입을 중지하고, 기체를 감시조로부터 배출시키는 단계, 및 감시조내 약액의 액면이 소정위치 이상에 달할 때 감시조로부터의 기체의 배출을 중지시키는 단계를 포함하는 것을 특징으로 하는 밀폐형 반환식 통으로부터의 약액공급방법.
  3. 액면 가입기체를 도입하는 부재 및 약액을 수송하는 부재가 장착된 밀폐형 반환식 약액통, 반환식약액통과 약액처리장치 사이에 배설되어 있고 약액을 잠시 저류한뒤 그 약액을 상기 장치에 공급하는 감시조, 감시조에 연결되어 있는 액면 가압기체의 도입, 배출용 수단, 및 감시조내 약액의 액면을 항시 감시하고 약액의 액면의 저하를 검출하여 경보를 하고 그리하여 밸브의 절환 조작을 할수있게 하는 액면계를 구비한 것을 특징으로 하는 밀폐형 반환식 약액통으로 부터의 약액 공급장치.
  4. 제3항에 있어서, 감시조에는 그 상부에 가대가 배설되어 있고, 상기 가대는 감시조의 목부분안에 착탈가능하게 나합할 수 있는 나사부, 측벽, 상기 측벽위에 정착된 좌판 및 상기 좌판을 덮는 후우드로 구성되어 있고, 또한 상기 가대위에는 반환식 약액통과 감시조사이에 뻗쳐있는 약액관을 개폐하는 전자밸브, 반환식 약액통내로의 기체 유입을 허용, 중지하는 전자밸브, 감시조내로의 기체 유입을 허용, 중지하는 전자밸브, 기체 배출용 전자밸브 및 액면계 헤드가 장착되어 있는 것을 특징으로 하는 밀폐형 반환식 약액통으로 부터의 약액공급장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019840006391A 1983-10-17 1984-10-16 밀폐형 반환식 통으로부터의 약액 공급방법 및 장치 KR930000225B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP83-192514 1983-10-17
JP19251483A JPS6084136A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置
JP19251583A JPS6084137A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液供給看視装置
JP???58-192515 1983-10-17
JP???58-192514 1983-10-17
JP83-192515 1983-10-17

Publications (2)

Publication Number Publication Date
KR850003066A true KR850003066A (ko) 1985-05-28
KR930000225B1 KR930000225B1 (ko) 1993-01-14

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US (1) US4676404A (ko)
EP (1) EP0138718B1 (ko)
KR (1) KR930000225B1 (ko)
DE (1) DE3465970D1 (ko)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859375A (en) * 1986-12-29 1989-08-22 Air Products And Chemicals, Inc. Chemical refill system
US4911195A (en) * 1986-08-27 1990-03-27 Porton Instruments, Inc. Valve block assembly
DE3636887C2 (de) * 1986-10-30 1994-09-29 Merck Patent Gmbh Transport- und Lagerbehälter mit Schraubverschluß
ES2013223A4 (es) * 1988-07-25 1990-05-01 Nalco Chemical Co Almacenamiento quimico automatico y sistema de alimentacion quimico.
US4979545A (en) * 1988-10-31 1990-12-25 Olin Corporation Bubbler container automatic refill system
US4982036A (en) * 1989-09-21 1991-01-01 Phillips Petroleum Company Transfer of acid catalyst
US5038840A (en) * 1990-07-31 1991-08-13 Olin Corporation Bubbler container automatic refill system
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
JPH0692558A (ja) * 1990-09-28 1994-04-05 Otis Elevator Co 発進時の揺れ及び過剰加速を低減するエレベータの発進制御装置
DE4035588A1 (de) * 1990-11-09 1992-05-14 Jens Pannenborg Verfahren und mobile vorrichtung fuer das automatische befuellen und nachfuellen von temperierkreislaeufen in temperiergeraeten mit speziell konditioniertem wasser und anderen medien fuer den waermetransport
DE4305387A1 (en) * 1992-03-17 1993-09-23 Hinrich Haake System for distributing liq. received at low pressure - has level regulating system and compressed air source with valves for delivering pressurised liq. e.g. for producing pig swill
US5310087A (en) * 1992-08-24 1994-05-10 National Semiconductor Corporation Continuous feed, chemical switching unit
US5270079A (en) * 1992-12-18 1993-12-14 Specialty Coatings Systems, Inc. Methods of meniscus coating
US5339842A (en) * 1992-12-18 1994-08-23 Specialty Coating Systems, Inc. Methods and apparatus for cleaning objects
US6029717A (en) * 1993-04-28 2000-02-29 Advanced Delivery & Chemical Systems, Ltd. High aspect ratio containers for ultrahigh purity chemicals
US6557593B2 (en) 1993-04-28 2003-05-06 Advanced Technology Materials, Inc. Refillable ampule and method re same
US5964254A (en) * 1997-07-11 1999-10-12 Advanced Delivery & Chemical Systems, Ltd. Delivery system and manifold
US6260588B1 (en) 1993-04-28 2001-07-17 Advanced Technology Materials, Inc. Bulk chemical delivery system
US5878793A (en) * 1993-04-28 1999-03-09 Siegele; Stephen H. Refillable ampule and method re same
US5465766A (en) * 1993-04-28 1995-11-14 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5950693A (en) * 1993-04-28 1999-09-14 Advanced Delivery & Chemical Systems, Ltd. Bulk chemical delivery system
US5607002A (en) * 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5363513A (en) * 1993-09-22 1994-11-15 Karl Blankenburg Pressurized flushing toilet
DE4332353A1 (de) * 1993-09-23 1995-03-30 Thesys Ges Fuer Mikroelektroni Verfahren zur kontinuierlichen drucklosen Befüllung von Versorgungssystemen
US5607000A (en) * 1994-10-31 1997-03-04 Motorola, Inc. Hazardous material liquid dispensing system and method
US5568882A (en) * 1995-02-03 1996-10-29 Abc Techcorp Precise volume fluid dispenser
KR0175048B1 (ko) * 1996-03-19 1999-04-01 김광호 포토레지스트 분사장치
DE69738136T2 (de) * 1996-12-17 2008-06-12 Advanced Technology Materials, Inc., Danbury Reagenzzuführbehälter für cvd
US6199599B1 (en) 1997-07-11 2001-03-13 Advanced Delivery & Chemical Systems Ltd. Chemical delivery system having purge system utilizing multiple purge techniques
US6296026B1 (en) 1997-06-26 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US6296025B1 (en) 1997-07-11 2001-10-02 Advanced Technology Materials, Inc. Chemical delivery system having purge system utilizing multiple purge techniques
US6435229B1 (en) * 1997-07-11 2002-08-20 Advanced Technology Materials, Inc. Bulk chemical delivery system
US6637475B2 (en) 1997-07-11 2003-10-28 Advanced Technology Materials, Inc. Bulk chemical delivery system
TW387979B (en) * 1997-07-11 2000-04-21 Advanced Delivery & Chemical S Bulk chemical delivery system
US6021921A (en) * 1997-10-27 2000-02-08 Taiwan Semiconductor Manufacturing Co., Ltd. Liquid dispensing system and method for dispensing
DE19914202C2 (de) * 1999-03-29 2001-05-03 Steag Hamatech Ag Verfahren und Vorrichtung zum Einfüllen eines Fluids in einen Drucktank
US6186745B1 (en) 1999-04-28 2001-02-13 Chemand Corporation Gas pressurized liquid pump with intermediate chamber
US6435379B2 (en) * 1999-12-16 2002-08-20 Ebac Limited Bottled liquid dispensers
US6681813B2 (en) 2000-02-11 2004-01-27 Hydac Technology Gmbh Device for removing fluid from a container
JP2002143751A (ja) * 2000-10-17 2002-05-21 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 処理液分配装置及び方法
DE10200786B4 (de) * 2002-01-11 2004-11-11 Dockweiler Ag Sicherheitsbehälter
US7077388B2 (en) * 2002-07-19 2006-07-18 Asm America, Inc. Bubbler for substrate processing
JP4387091B2 (ja) * 2002-11-05 2009-12-16 株式会社半導体エネルギー研究所 薄膜トランジスタの作製方法
DE502004012396D1 (de) * 2004-02-20 2011-05-26 Cs Clean Systems Ag Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers
US20060107898A1 (en) * 2004-11-19 2006-05-25 Blomberg Tom E Method and apparatus for measuring consumption of reactants
US20060133955A1 (en) * 2004-12-17 2006-06-22 Peters David W Apparatus and method for delivering vapor phase reagent to a deposition chamber
KR101312237B1 (ko) 2005-04-25 2013-09-26 도쿄엘렉트론가부시키가이샤 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및분배 시스템
SG162759A1 (en) 2005-06-06 2010-07-29 Advanced Tech Materials Fluid storage and dispensing systems and processes
US7467890B2 (en) * 2005-11-04 2008-12-23 Custom Ultrasonics, Inc. Portable chemical transfer/neutralizing containment system
US20070102044A1 (en) * 2005-11-04 2007-05-10 Custom Ultrasonics, Inc. Disinfectant transfer system
US8016000B2 (en) * 2006-04-19 2011-09-13 W. R. Grace & Co.-Conn. Processes and systems for transferring particulate substances from containers
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
US8518482B2 (en) * 2007-01-29 2013-08-27 Praxair Technology, Inc. Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamber
JP5231028B2 (ja) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 塗布液供給装置
US20090214777A1 (en) * 2008-02-22 2009-08-27 Demetrius Sarigiannis Multiple ampoule delivery systems
CN102177374B (zh) * 2008-08-18 2013-06-19 西格玛-奥吉奇公司 阀组件
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
US8151814B2 (en) * 2009-01-13 2012-04-10 Asm Japan K.K. Method for controlling flow and concentration of liquid precursor
US20130068327A1 (en) * 2010-06-02 2013-03-21 Nissan Motor Co., Ltd. Electrolyte supplying apparatus
EP2715781B1 (en) 2011-05-28 2020-07-01 Entegris Inc. Refillable ampoule with purge capability
GB2561370A (en) * 2017-04-11 2018-10-17 Brealey Julian A Liquid Return Apparatus
CH713909A1 (de) * 2017-06-21 2018-12-28 Soudronic Ag Vorrichtung zur unterbruchlosen Beschichtung von Dosenzargen und Betriebsverfahren.
CN210449065U (zh) * 2019-08-09 2020-05-05 深圳市帝拓电子有限公司 一种气压推送式精油定量滴注装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1733106A (en) * 1929-10-22 Fining
US3535124A (en) * 1965-03-05 1970-10-20 Cornelius Co Process for preserving a fresh fruit juice in a dispenser
AT295309B (de) * 1969-02-21 1971-12-27 Imd Vorrichtung zur Herstellung von kohlensäurehältigen Getränken
US3612090A (en) * 1969-11-26 1971-10-12 Technicon Corp Flow regulator having no gas-liquid diaphragm interface
US3805819A (en) * 1972-10-05 1974-04-23 B Etter Method and means of applying additives to industrial gas
US3804297A (en) * 1973-06-08 1974-04-16 Jetronic Ind Inc Liquid chemical mixing and delivery system
US3909205A (en) * 1973-07-16 1975-09-30 Beckman Instruments Inc Liquid transfer system
US3878970A (en) * 1974-02-11 1975-04-22 Perlick Company Inc Beer dispensing instrumentalities and method
DE2535182A1 (de) * 1975-08-06 1977-02-24 Peters & Westebbe Kg Druckluftabfuellgeraet mit dosiervorrichtung
US4377246A (en) * 1977-06-13 1983-03-22 The Cornelius Company Apparatus for dispensing a carbonated beverage
WO1980001797A1 (en) * 1979-02-22 1980-09-04 D Haig Precision material filling systems
US4370356A (en) * 1981-05-20 1983-01-25 Integrated Technologies, Inc. Method of meniscus coating
JPS5921021A (ja) * 1982-07-27 1984-02-02 Nippon Zeon Co Ltd 半導体製造用薬液収納容器
AU563417B2 (en) * 1984-02-07 1987-07-09 Nippon Telegraph & Telephone Public Corporation Optical fibre manufacture

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KR930000225B1 (ko) 1993-01-14
DE3465970D1 (en) 1987-10-15
EP0138718A2 (en) 1985-04-24
EP0138718B1 (en) 1987-09-09
EP0138718A3 (en) 1985-06-05
US4676404A (en) 1987-06-30

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